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31. 发明专利

JPH11320371A POLISHING DEVICE 失效
公开(公告)号：JPH11320371A
公开(公告)日：1999-11-24
申请号：JP13866798
申请日：1998-05-20
申请人： EBARA CORP
发明人： MATSUO NAONORI , HIYAMA HIROKUNI , WADA TAKETAKA , HIROKAWA KAZUTO
IPC分类号： B24B21/04
摘要： PROBLEM TO BE SOLVED: To provide a polishing device to uniformly polish the whole surface of a substrate to be polished. SOLUTION: This polishing device comprises a substrate 100 to be polished held by a rotating substrate holder 12; a grinding wheel mechanism 13 be formed that a plurality of grinding wheels 14 are mounted on a rotating belt 15; and a linear movement mechanism to cause linear movement of the substrate holder 12. Simultaneously with rotation of the belt 15 with the substrate 100 to be polished brought into contact with the surface of the grinding wheel 14 of the grinding wheel mechanism 13, the substrate holder 12 is rotated and further, by effecting linear movement of the substrate holder 12, the substrate 100 to be polished is polished.

32. 发明专利

JPH11277411A Grinding device for substrate 失效
标题翻译：基板研磨装置
公开(公告)号：JPH11277411A
公开(公告)日：1999-10-12
申请号：JP9688398
申请日：1998-03-25
申请人： Ebara Corp , 株式会社荏原製作所
发明人： HIROKAWA KAZUTO , HIYAMA HIROKUNI , WADA TAKETAKA , MATSUO NAONORI
IPC分类号： B24B37/00
摘要： PROBLEM TO BE SOLVED: To provide a grinding device for substrates capable of continuously supplying a very small amount of water or solution instead of droplets of water to the grinding surface of a grinding wheel.
SOLUTION: In a grinding device for substrates, which grinds the surface to be ground of the substrate 4 flat and mirror-finished by sliding the grinding wheel 15 on the substrate 4, a nozzle 10 for supplying water or solution to the grinding surface of the grinding wheel 15 or the surface to be ground of the substrate, is provided. The tip position of the nozzle 10 is arranged close to the grinding surface of the grinding wheel to a degree that no liquid-drops cannot be formed between the tip of the nozzle 10 and the grinding surface of the grinding wheel 15 or the surface to be ground of the substrate 4.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：提供一种用于能够连续地将少量水或溶液代替水滴供给到研磨轮的研磨表面的基板的研磨装置。解决方案：在用于研磨基板4的被研磨表面的研磨装置中，通过将砂轮15滑动到基板4上而平坦地进行镜面抛光，用于将水或溶液供给到研磨表面的喷嘴10 提供了砂轮15或待研磨的基体的表面。喷嘴10的尖端位置配置在砂轮的研磨面附近，不能在喷嘴10的前端与砂轮15的研磨面或表面之间不形成液滴基板4的地面。

33. 发明专利

JPH10288220A TILTING PAD BEARING 失效
公开(公告)号：JPH10288220A
公开(公告)日：1998-10-27
申请号：JP11334897
申请日：1997-04-14
申请人： EBARA CORP
发明人： HIYAMA HIROKUNI , SUGIYAMA KENICHI , KANEMITSU YOICHI
IPC分类号： F16C17/03
摘要： PROBLEM TO BE SOLVED: To provide a tilting pad bearing capable or reducing a preload to a bearing pad as the number of revolutions is increased to heat lubricating oil, and the temperature of the oil rises. SOLUTION: In a tilting pad bearing of a structure in which plural bearing pads 3 tiltably supported by pivot 2 are arranged around a rotary shaft, the bearing pad 3 is formed into a constitution where the first member 3-1 on the rotary shaft side and the second member 3-2 on the pivot 2 side are joined to each other. As the material of the first member 3-1, a material, the coefficient of thermal expansion of which is smaller than that of the second member 3-2, is used, and a bearing metal layer 3b is provided on the surface of the first member 3-1 in contact with the rotary shaft.

34. 发明专利

JPH0929622A POLISHING DEVICE 失效
公开(公告)号：JPH0929622A
公开(公告)日：1997-02-04
申请号：JP20659195
申请日：1995-07-20
申请人： EBARA CORP
发明人： HIYAMA HIROKUNI , WADA TAKETAKA
IPC分类号： B24B37/12 , B24B41/047 , B24B49/16 , B24D13/14 , H01L21/304 , B24B37/04
摘要： PROBLEM TO BE SOLVED: To provide a polishing device capable of easily compensating unenveness in polishing and polishing only a specified portion on the surface of an object. SOLUTION: A turntable onto which a polishing cloth 4 is stuck and a top ring are positioned on the top of this device, between the cloth 4 and the top ring an object 2 is interposed in a condition where a specified pressure is applied thereto, and the surface of the object 2 is polished by making the turntable and the top ring move in relative positions. The turntable is formed to have a group of annular small tables T2 -T7 arranged coaxially, and the radial width thereof is made small than the dia. of the object 2 while determined based on the work range for the object 2.

35. 发明专利

JPH08219083A PUMPING DEVICE WITH SELF-CONTROL FUNCTION 失效
公开(公告)号：JPH08219083A
公开(公告)日：1996-08-27
申请号：JP5323095
申请日：1995-02-17
申请人： EBARA CORP
发明人： HIYAMA HIROKUNI , MIYAGAWA SHINPEI , HAYASHI TORU
IPC分类号： F04D15/00 , F04D1/00
摘要： PURPOSE: To provide a pumping device having self-control mechanism provided at a pump itself so as to control discharge pressure to be constant to load fluctuation. CONSTITUTION: A pumping device is provided with a vortex chamber 7 disposed at the suction port 6 of a centrifugal pump, and a contraflow pipeline communicated with the peripheral part of the vortex chamber 7 from the discharge port of the centrifugal pump. The outflow port 12a of the contraflow pipeline and the inflow port 10 of a transported fluid are so formed that a transported fluid flowing backward from the discharge port 11 of the pump collides with the transported fluid flowing into the peripheral part of the vortex chamber 7 so as to throttle the transported fluid and thereby to obtain a sharp diode characteristic, thus having the function of self-controlling the discharge pressure of the pump to be almost constant to the load fluctuation of the pump.

36. 发明专利

JPH01219400A VIBRATING PILLAR PUMP 失效
公开(公告)号：JPH01219400A
公开(公告)日：1989-09-01
申请号：JP4212388
申请日：1988-02-26
申请人： JAPAN RES DEV CORP , EBARA CORP , EBARA RES CO LTD , HASHIMOTO HIROYUKI
发明人： MORI SATOSHI , HIYAMA HIROKUNI , HASHIMOTO HIROYUKI
IPC分类号： F04F7/00 , B06B1/04
摘要： PURPOSE:To make the maximum vibrator force of a pump chageable by forming the pump such that plural units, which each comprise a stator consisting of an electromagnetic yoke and electromagnetic coils surrounding the exterior of an amarture consisting of a vibrating pipe, permanent magnets and spacers, align axially of a pipe. CONSTITUTION:Outside a vibrating pipe 1 of a magnetic material, permanent magnets 4 align by differing from one another directions of magnetic poles and are fixed axially via non-magnetic spacers 5 to thereby form an armature. As for a stator, a unit is formed by grooves 12 on inner perimeter of a U-shaped electromagnetic yoke 6 and stator coils 7 annularly surrounding the vibrating pipe, and several such units are joined axially of the pipe. In operating the above-mentioned mechanism, when alternating electric currents are passed to the electromagnetic coils 7 in opposite directions with each other coil, axial electromagnetic force generated by each of the stator magnetic poles 6 and 7 gives iterative thrust axially of the amarture to move the vibrating pipe 1 virtically, and, as a result, a pump function which is almost the same as the conventional one is effected. By multiplying the electromagnetic yokes axially, the maximum vibratory force becomes changeable and the maximum pumping up force can be easily changed.

37. 发明专利

JPS62184224A MAGNETIC BEARING DEVICE 失效
公开(公告)号：JPS62184224A
公开(公告)日：1987-08-12
申请号：JP2296486
申请日：1986-02-06
申请人： EBARA RES CO LTD , EBARA CORP
发明人： KANEMITSU YOICHI , HIYAMA HIROKUNI
IPC分类号： F16C32/04
摘要： PURPOSE:To improve stability of a magnetic bearing by supporting a cylindrical mass by springs in a cylindrical space disposed on the central part of a fixed body and filling a very small void between the mass and the wall of the space with a liquid of a designated viscosity. CONSTITUTION:A rotor 4 is supported out of contact on a fixed body by magnetic force and rotatably mounted in a casing 1 of a pump. A cylindrical space 17 for installing a resonance preventing mechanism is disposed at the central part of a fixed body 3, and a cylindrical mass 13 concentric with the fixed body 3 is supported by springs 14 with a very small void 15 between the peripheral surface of the mass 13 and the side of the space of the fixed body 3 in the space. In order to fill the void 5 with a liquid of a comparatively high viscosity, the space 17 is filled with a viscous liquid such as lubricating oil, grease or the like. Therefore, stability of a magnetic bearing for vibration caused by external force near the natural frequency of the fixed body can be increased to attain favorable operation.

38. 发明专利

JPS61275600A VIBRATION COLUMN PUMP 失效
公开(公告)号：JPS61275600A
公开(公告)日：1986-12-05
申请号：JP11783885
申请日：1985-05-30
申请人： EBARA CORP
发明人： IWATA MINORU , HASHIMOTO HIROYUKI , HIYAMA HIROKUNI , KUJI NOBUYUKI , MATAKE KOZO
IPC分类号： F04F7/00
摘要： PURPOSE:To increase the stroke of a vibration pipe, by providing an exciting means in that the one end of a leaf spring is secured to a vibration pipe, and electromagnets are securely mounted positioned facing each other with the leaf spring therebetween. CONSTITUTION:A leaf spring 6, having a plate surface extending at right angles with a vibration pipe 2, is secured to the vibration pipe 2. Annular electromagnets 11 and 12 are securely mounted with the leaf spring 6 therebetween. When the electromagnets 11 and 12 generate a magnetic force and the vibration pipe 2 is vertically moved, vertical movement of the vibration pipe 2 is increased in amplitude in resonance with frequency applied by the electromagnets 11 and 12 through proper selection of the spring constant of an arm 14 portion of the leaf spring 6, and the vibration pipe can be vertically widely moved even if the energizing amount of the leaf spring by means of the electromagnets is low.

39. 发明专利

JPS6155378A Vibration column pump 失效
标题翻译：振动柱泵
公开(公告)号：JPS6155378A
公开(公告)日：1986-03-19
申请号：JP17785984
申请日：1984-08-27
申请人： Ebara Corp
发明人： HIYAMA HIROKUNI
IPC分类号： F04B9/00 , F04F7/00
摘要： PURPOSE: To enhance the characteristics of a vibration column pump by furnishing a mechanism to control the motion of the pump valve, inserting this mechanism in the valve casing, and thereby controlling the phase difference of vibration between the valve plate and a vibration pipe.
CONSTITUTION: A vibration pipe 5 is coupled with a connector 4 in such a way as watertight in relation to a hydrostatic pipe 2 by means of a sealing device 6. This vibration pipe 5 is inserted into a valve casing 11. A vibration exciter 7 generates vibration in the vertical direction to move the valve element 14 up and down. Thus the optimum pumping condition is obtained in accordance with the excited frequency of the vibration pipe, that enables pumping even in the environment which has not permitted pumping with any conventional arrangement.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过提供一种控制泵阀运动的机构来增强振动柱泵的特性，将该机构插入阀壳中，从而控制阀板与振动管之间的振动相位差。构成：振动管5通过密封装置6以相对于静液管2的水密方式与连接器4联接。该振动管5插入阀壳体11.振动激励器7产生在垂直方向上振动以上下移动阀元件14。因此，根据振动管的激发频率获得最佳泵送条件，即使在不允许以任何常规布置泵送的环境中也能够泵送。

40. 发明专利

JP2011009601A Substrate drying method, and substrate drying apparatus 审中-公开
标题翻译：基板干燥方法和基板干燥装置
公开(公告)号：JP2011009601A
公开(公告)日：2011-01-13
申请号：JP2009153291
申请日：2009-06-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KODERA AKIRA , TAIMA YASUSHI , O CHIKAAKI , YAMAUCHI KAZUO , SUZUKI TSUKURU , HIYAMA HIROKUNI , SAITO TAKAYUKI
IPC分类号： H01L21/304
摘要： PROBLEM TO BE SOLVED: To achieve drying using HFE (hydrofluoroether) as a solvent for drying adaptively to spin drying which is widely employed for existent CMP apparatuses etc.SOLUTION: In a substrate drying method of drying a surface of a substrate W on which liquid sticks, the liquid on the surface of the substrate W is removed by blowing to the surface of the substrate W mixed vapor 22 of hydrofluoroether and water-soluble alcohol which is warmed at 120 to 160°C and pressurized to 0.5 to 1.0 MPa while the substrate W is rotated.
摘要翻译：要解决的问题：使用HFE（氢氟醚）作为自适应干燥的溶剂进行干燥，适用于现有CMP设备等广泛使用的旋转干燥。溶解性：在将基材W的表面干燥的基材干燥方法中，将基板W的表面上的液体吹入基板W的表面，并将其加热到120〜160℃并加压至0.5〜1.0MPa的氢氟醚和水溶性醇的混合蒸气22，同时衬底W旋转。

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