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21. 发明专利

JPH0338651B2 失效
公开(公告)号：JPH0338651B2
公开(公告)日：1991-06-11
申请号：JP18283784
申请日：1984-09-03
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OOTA YOSHIFUMI , MOMONO TAKESHI
IPC分类号： C23C14/00 , C09D163/00 , C23C14/12 , G11B5/64 , G11B5/66 , G11B5/84 , G11B5/842

22. 发明专利

JPH0322646B2 失效
公开(公告)号：JPH0322646B2
公开(公告)日：1991-03-27
申请号：JP2081185
申请日：1985-02-07
申请人： ULVAC CORP
发明人： ISHIKAWA MICHIO , NAKAMURA KYUZO , OOTA YOSHIFUMI , YAMADA HIROKI , TANI NORIAKI
IPC分类号： G11B5/66 , G11B5/64 , G11B5/65 , G11B5/667 , G11B5/73 , G11B5/78 , G11B5/82

23. 发明专利

JPH0313573A FORMATION OF DIELECTRIC FILM BY REACTIVE SPUTTERING 失效
公开(公告)号：JPH0313573A
公开(公告)日：1991-01-22
申请号：JP14734689
申请日：1989-06-10
申请人： ULVAC CORP
发明人： ASARI SHIN , NAKAMURA KYUZO , MIYAMOTO TAKASHI , OTA YOSHIFUMI
IPC分类号： C23C14/34
摘要： PURPOSE:To inhibit the rise of the temp. of a substrate at a high rate of film formation and to form a film by reactive sputtering without causing abnormal discharge by supplying electric current obtd. by superposing RF on DC in a specified power ratio to a target. CONSTITUTION:A DC power source 2 and an RF power source 3 are connected to a target 1 so as to prevent RF from returning to the source 2 by interposing a coil 4 and capacitor 5 to the power source circuit of the DC power source 2. When a dielectric film is formed by reactive sputtering, electric current obtd. by superposing RF on DC in >=30% output ratio is supplied to the target 1. Charge-up on the target 1 is electrically neutralized, abnormal discharge is prevented and a high quality dielectric film is obtd.

24. 发明专利

JPH0262889B2 失效
公开(公告)号：JPH0262889B2
公开(公告)日：1990-12-26
申请号：JP11910886
申请日：1986-05-26
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OOTA YOSHIFUMI , YAMADA HIROOKI , TANI NORIAKI , ISHIKAWA MICHIO
IPC分类号： G11B5/66 , C10M105/52 , C10N40/18 , G06K19/00 , G06K19/06 , G11B5/64 , G11B5/72 , G11B5/725 , G11B5/73 , G11B5/738

25. 发明专利

JPH02232366A SPUTTERING DEVICE 失效
公开(公告)号：JPH02232366A
公开(公告)日：1990-09-14
申请号：JP5214389
申请日：1989-03-06
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OTA YOSHIFUMI , ASARI SHIN , MIYAMOTO TAKASHI
IPC分类号： C23C14/34 , C23C14/54
摘要： PURPOSE:To continuously obtain multilayered laminated films and composition-modified films with a simple mechanism by providing targets of plural sputtering cathodes toward one film forming region, connecting respectively independent sputtering power sources to the above-mentioned respective cathodes and providing a means for controlling the output waveforms of the respective power sources in synchronization. CONSTITUTION:The respectively independent sputtering power sources 7a, 7b are used for the respective cathodes 2a, 2b and are connected to arbitrary waveform transmitters 8a, 8b in the case of using the target 3a consisting of an Fe-Co alloy for the above-mentioned cathode 2a and the target 3b consisting of Tb for the target 2b. The multilayered laminated films consisting of Fe-Co/Tb are formed or substrates 4 while the film thicknesses of the respective layers are controlled when square waves, etc., are impressed to the cathodes 2 by controlling the speed at which the substrates 4 pass one film forming region 6, the outputs of the respective power sources 7a, 7b and the time of the outputs thereof by the above-mentioned oscillators 8a, 8b. Further, the compsn. modulated films consisting of Fe-Co/Tb are obtd. when the output waveforms of the power sources 7a, 7b are made into sine waves, etc., by the control of the transmitters 8a, 8b.

26. 发明专利

JPH0157416B2 失效
公开(公告)号：JPH0157416B2
公开(公告)日：1989-12-05
申请号：JP741183
申请日：1983-01-21
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OOTA YOSHIFUMI
IPC分类号： G11B5/66 , C10M105/24 , C10N20/00 , C10N40/18 , G11B5/64 , G11B5/72 , G11B5/725

27. 发明专利

JPH01159830A FORMATION OF PROTECTIVE FILM OF MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPH01159830A
公开(公告)日：1989-06-22
申请号：JP31759687
申请日：1987-12-17
申请人： SHINKU ZAIRYO KK , ULVAC CORP
发明人： YOSHINAGA YASUNOBU , ABE KAZUO , IIJIMA MASAYUKI , TAKAHASHI YOSHIKAZU , NAKAMURA KYUZO
IPC分类号： G11B5/84
摘要： PURPOSE:To improve the corrosion resistance of a magnetic film by exposing a magnetic recording medium on which a protective film consisting of carbon is formed to the vapor of a high-molecular monomer in a vacuum chamber to stick and polymerize the monomer in the recesses, etc., on the surface of the protective film. CONSTITUTION:The magnetic recording medium 1 constituted by forming the thin film consisting of the carbon as the protective film 4 on the surface of the magnetic film 3 is placed in the vacuum chamber and the vapor of the high-molecular monomer evaporated in the vacuum chamber is applied onto this medium. The high-molecular monomer 7 is polymerized in the recesses on the surface of the protective film 4 consisting of the carbon and the pinholes and cracks of the protective film 4 and the magnetic film 3. The carbon particles 5 are thereby confined and the lubricity with the magnetic head is maintained by the exposed carbon film; in addition, the pinholes, etc., are embedded and the infiltration of corrosive gases into the magnetic film 3 at the time of using the magnetic recording medium is obviated. The corrosion resistance of the magnetic film 3 is thus improved.

28. 发明专利

JPH01147063A MAGNETRON SPUTTERING DEVICE 失效
公开(公告)号：JPH01147063A
公开(公告)日：1989-06-08
申请号：JP30614387
申请日：1987-12-03
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OTA YOSHIFUMI , HIGUCHI YASUSHI , ISHIBASHI AKIRA
IPC分类号： C23C14/36 , C23C14/35
摘要： PURPOSE:To improve the utilization efficiency of a target by providing a plate- like magnetic member between a magnetic field generator and a target and forming plural voids or parts having high magnetic resistance in the magnetic field generator. CONSTITUTION:A target-supporting plate 10 is provided while leaving voids among magnetic poles 2a, 2b, 3 of a magnetic field generator consisting of permanent magnets. Magnetic sheets 11 are buried in the target-supporting plate 10. The magnetic sheets 11 are constituted of concentrically formed central part 11a, intermediate parts 11b, and outside peripheral parts 11c, and spaces 12a, 12b are formed among the above. The lines H' of magnetic force flown out of the magnetic pole 3 are allowed to flow mostly into the intermediate magnetic sheet part 11a and then flown via the outside peripheral parts 11c into the outward magnetic poles 2a, 2b, and, they are partially allowed to flow from the magnetic pole 3 to the outward magnetic poles 2a, 2b. By this method, a target can be uniformly eroded and the utilization efficiency of the target can be improved.

29. 发明专利

JPH0126355B2 失效
公开(公告)号：JPH0126355B2
公开(公告)日：1989-05-23
申请号：JP58782
申请日：1982-01-07
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OOTA YOSHIFUMI , ITO AKIO
IPC分类号： G11C17/00 , B41M5/26 , G11B7/24 , G11B7/243 , G11B7/244 , G11C13/04

30. 发明专利

JPS62183022A WEAR RESISTANT MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPS62183022A
公开(公告)日：1987-08-11
申请号：JP2297986
申请日：1986-02-06
申请人： ULVAC CORP
发明人： NAKAMURA KYUZO , OOTA YOSHIFUMI , YAMADA HIROKI , ISHIKAWA MICHIO , TANI NORIAKI
IPC分类号： G11B5/66 , G11B5/64 , G11B5/72 , G11B5/73 , G11B5/738
摘要： PURPOSE:To decrease the coefft. of friction for a long period of time by constituting a film for protecting the top surface of a magnetic film of a front layer consisting of plasma CVD carbonaceous film and rear layer consisting of a sputtered carbon film. CONSTITUTION:The carbonaceous surface protective film consisting of two layers is laminated directly or via an interposing layer on the thin magnetic film on a nonmagnetic base material. The protective film is obtd. by first forming the carbon film which is the rear layer by a sputtering method using a graphite target then forming the carbonaceous film which is the front layer, consists essentially of C and is bound with H, F atoms, etc. therewith by a plasma CVD method, etc. thereon. The magnetic recording medium of which the coefft. of friction is small and is stable for a long period of time is obtd. according to the above-mentioned constitution.

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