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21. 发明专利

JP2879343B2 失效
公开(公告)号：JP2879343B2
公开(公告)日：1999-04-05
申请号：JP7751989
申请日：1989-03-29
申请人： RIKAGAKU KENKYUSHO
发明人： HARA TAMIO , ANDO GOZO , AOYANAGI KATSUNOBU
IPC分类号： H01S3/094 , H01S4/00

22. 发明专利

JP2860253B2 失效
公开(公告)号：JP2860253B2
公开(公告)日：1999-02-24
申请号：JP16575094
申请日：1994-06-27
申请人： RIKAGAKU KENKYUSHO , KAWASAKI JUKOGYO KK
发明人： HARA TAMIO , HAMAGAKI MANABU , AOYANAGI KATSUNOBU , RYUJI MAKOTO , TOKAI MASAKUNI
IPC分类号： H05H1/24 , C23F4/00 , H01L21/027 , H01L21/302 , H01L21/3065

23. 发明专利

JPH1012860A FORMATION OF MICRO TUNNEL JOINT AND MICRO TUNNEL JOINT ELEMENT 失效
公开(公告)号：JPH1012860A
公开(公告)日：1998-01-16
申请号：JP15807896
申请日：1996-06-19
申请人： RIKAGAKU KENKYUSHO
发明人： SUGANO TAKUO , ISSHIKI HIDEO , AOYANAGI KATSUNOBU
IPC分类号： H01L29/06 , H01L29/66 , H01L29/88 , H01L49/00
摘要： PROBLEM TO BE SOLVED: To provide a method for forming micro tunnel joints with extremely high dimensional accuracy and a micro tunnel joint element having such a structure to facilitate integration. SOLUTION: Thin films of different kinds are grown and laminated laterally in the inplane direction of a substrate, so as to form micro tunnel joints 13 and 14. The lateral growth of thin film in crystal plane direction can be performed by introducing a step 11 having specified orientation and height on the crystal plane by means of step bunching, etc., and selectively growing an atomic layer on the crystal plane of the step.

24. 发明专利

JPH09295891A RARE EARTH ELEMENT-DOPED-SILICON MATERIAL AND ITS PRODUCTION 失效
公开(公告)号：JPH09295891A
公开(公告)日：1997-11-18
申请号：JP13284696
申请日：1996-04-30
申请人： RIKAGAKU KENKYUSHO
发明人： CHIYOU SHINI , KOMURO SHUJI , AOYANAGI KATSUNOBU , SUGANO TAKUO
IPC分类号： C30B28/00 , C30B29/06
摘要： PROBLEM TO BE SOLVED: To produce a rare earth element-doped Si material, having a high luminous efficiency and applicable to an optical device and provide a method for producing the Si material. SOLUTION: This rare earth element-doped Si material is prepared by doping an Si material formed of an ultramicro-crystal with a rare earth element and is capable of manifesting the visible light emission of the Si material formed of the ultramicro-crystal and the infrared and visible light emissions of the rare earth element. The ion implantation of the rare earth element into a high- purity amorphous Si thin film can be carried out to produce the rare earth element doped Si material by using atoms of the rare earth element as nuclei or the laser ablation can directly be used to produce the rare earth element- doped Si material from an Si target containing the rare earth element added thereto.

25. 发明专利

JP2587629B2 失效
公开(公告)号：JP2587629B2
公开(公告)日：1997-03-05
申请号：JP2130387
申请日：1987-01-31
申请人： TOKYO EREKUTORON KK , RIKAGAKU KENKYUSHO
发明人： ISHII NOBUO , TAKAYAMA NAOKI , KAWAMURA GOHEI , HARA TAMIO , HAMAGAKI MANABU , NANBA SUSUMU , AOYANAGI KATSUNOBU
IPC分类号： H05H1/24 , H01J37/32 , H01L21/302

26. 发明专利

JPH08194100A X-RAY MICROSCOPE AND X-RAY GENERATING APPARATUS 失效
公开(公告)号：JPH08194100A
公开(公告)日：1996-07-30
申请号：JP547795
申请日：1995-01-18
申请人： SHIMADZU CORP , RIKAGAKU KENKYUSHO
发明人： HIROSE HIDEO , HARA TAMIO , ANDO KOZO , AOYANAGI KATSUNOBU
IPC分类号： G21K5/02 , G21K7/00 , H05G1/26
摘要： PURPOSE: To provide an x-ray generating apparatus which can prevent scattered particulates from being emitted by keeping a distance in one side of a target material and forming an x-ray transmissive film with just enough thickneess to prevent damage by effects following an x-ray generating process. CONSTITUTION: Plasma generated by laser beam irradiation is closed in a space 14 surrounded with an x-ray generating target 11 and an x-ray transmissive film 12 and efficient x-ray generation is performed. In this case, a hole as small as 0.1μm diameter is opened in the x-ray generating target 11 by laser beam 30. The generated x-ray is emitted to a specimen side after being transmitted through the x-ray transmissive film 12 and at the same time radiates the laser source side through the hole. On the other hand, the particulates generated from plasma come into collision against the x-ray transmissive film 12 and the kinetic energy of the particles are absorbed and the particulates are retarded, do not pass the x-ray transmissive film 12, and are captured by the x-ray transmissive film 12. Consequently, scattered particulates adhere to the x-ray transmissive film 12 and emission of the scattered particulates are inhibited.

27. 发明专利

JPH0813144A PLASMA SPUTTERING METHOD BY EXCITATION WITH ELECTRON BEAM 失效
公开(公告)号：JPH0813144A
公开(公告)日：1996-01-16
申请号：JP16575294
申请日：1994-06-27
申请人： RIKAGAKU KENKYUSHO , KAWASAKI HEAVY IND LTD
发明人： HARA TAMIO , HAMAGAKI MANABU , AOYANAGI KATSUNOBU , RIYUUJI MAKOTO , HASEGAWA TAKESHI , BAN MASAHITO , TOKAI MASAKUNI
IPC分类号： H05H1/48 , C23C14/34 , H01L21/027 , H01L21/203
摘要： PURPOSE:To make it possible to execute coating of a substrate with films as designed by impressing a DC or RF voltage on a target. CONSTITUTION:The substrate 6 is held to face the target 21 in a reaction chamber 16. Plasma 38 is formed by irradiation with an electron beam 39 and the ions 40 in the plasma 38 are withdrawn to the substrate 6 to form the film thereon. The DC or RF voltage is, thereupon, impressed on the target 21 by using a power source 23 for biasing. The DC or RF voltage for biasing is independently impressed on the substrate 6 by using this power source 23 for biasing. The plural targets may be arranged and may be concentrically arranged as well. As a result, flux, energy and plasma forming conditions (gaseous pressure, etc.) of the ions flowing into the target are mutually and independently controllable.

28. 发明专利

JPH07311181A METHOD AND APPARATUS FOR DETECTING SURFACE STATE OF SUBSTRATE USING SOUND WAVE 失效
公开(公告)号：JPH07311181A
公开(公告)日：1995-11-28
申请号：JP12975394
申请日：1994-05-19
申请人： RIKAGAKU KENKYUSHO
发明人： RIKU EIFUU , AOYANAGI KATSUNOBU
IPC分类号： G01B17/00 , G01N29/00
摘要： PURPOSE:To detect variation in the surface state of a substrate, including a cleaning state or a state where transparent matters are adhering, by detecting a sound wave generated through interaction of a laser pulse and the surface of the substrate simultaneously with the cleaning on the surface of the substrate through irradiation with pulse laser. CONSTITUTION:A pulse beam from an KrF excimer laser oscillator 10 is fed to an optical system 12 where the energy density is made uniform and a substrate 18 on a stage 16 is irradiated with the pulse beam from the optical system 12 through a mirror 14. A sound wave generated through the irradiation is detected by means of a microphone 24, amplified through a preamplifier 26, and A/D converted 28 before being fed through an interface 20 to a RAM 22C at a control section 22 to be stored therein. A controller 30 delivers a pulse signal to the oscillator 10 and actuates a trigger 32 to cause the control section to deliver the digital sound wave signal to an oscilloscope 34. the oscilloscope 34 detects variation on the surface of the substrate 18 based on the amplitude, frequency spectrum, etc., of the detected sound wave.

29. 发明专利

JPH07192897A METHOD AND DEVICE FOR GENERATING HIGH SPEED MOLECULAR BEAM 失效
公开(公告)号：JPH07192897A
公开(公告)日：1995-07-28
申请号：JP32915793
申请日：1993-12-27
申请人： RIKAGAKU KENKYUSHO
发明人： CHIYOU ZUIAN , AOYANAGI KATSUNOBU
IPC分类号： H05H3/02
摘要： PURPOSE:To provide a method and a device for generating a high speed molecular beam, which can generate the high speed molecular beam having high energy even in the case where the gas at a low vapor pressure is used. CONSTITUTION:A solenoid coil 7 is electrified to jet the raw material gas from a jetting nozzled 3, and thereafter, a solenoid coil 12 is electrified after a delay of several micro - several milli-seconds, and the accelerated gas is jetted from an inside jetting nozzle 8 arranged concentrically with the jetting nozzle 3. The former jetted raw material gas is accelerated inside of a supersonic nozzle 17 or near the outlet generate a high speed molecular beam having high energy.

30. 发明专利

JPH06174660A FORMING APPARATUS OF X-RAY IMAGE 失效
公开(公告)号：JPH06174660A
公开(公告)日：1994-06-24
申请号：JP1019693
申请日：1993-01-25
申请人： RIKAGAKU KENKYUSHO
发明人： HARA TAMIO , ANDO KOZO , AOYANAGI KATSUNOBU
IPC分类号： G01N23/04
摘要： PURPOSE:To furnish a small-sized and highly practical forming apparatus of an X-ray image by obtaining a practical X-ray strength by using an excitation laser device being smaller in size and having a lower output than a usual one. CONSTITUTION:A titanium target 2 is provided in a vacuum vessel 1, and an Al filter 3 for cutting a long wave light, a sample 4 and a base plate 6 on the surface of which an X-ray resist layer 5 is formed as an X-ray detecting means are provided below the titanium target 2. Outside the vacuum vessel 1, a pulse train YAG laser (Nd-YAG laser) 7 and a lens 9 for converging a laser light 8 are provided. A pulse waveform of the laser light 8 is formed of sixteen pulse trains in which the width of discrete pulses is about 100ps and the interval of the pulses is about 300ps.

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