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    • 22. 发明专利
    • CLEAN ROOM
    • JPH11166757A
    • 1999-06-22
    • JP33433297
    • 1997-12-04
    • HITACHI LTD
    • KAIHO MASAYUKIHAMAMOTO MASAHIRO
    • F24F7/06B01D46/52F24F13/08
    • PROBLEM TO BE SOLVED: To make air flows in a clean room uniform even when the number of filters is remarkably reduced by providing wind vanes immediately below fan filter units and making part of the air discharged vertically downward from the fan filter units to flow to the outsides of area below the fan filter units. SOLUTION: When wind vanes 10 are installed to fan filter units 4 having a width D, L=αD, and H=βD, where, α=3, and β=1/3 θ=45 deg., the air flows in the area below the ceiling between the fan filter units 4 become eddy-free smooth flows. In addition, the uniformity of the air flows in the areas immediately below the units 4 are also improved and a nearly uniform flow velocity distribution is obtained. When the installed angle θof the wind vanes 10 are set about 40 deg.-60 deg., the uniformity of the flow velocity distribution at a height of 2.5 D from a grating floor can be improved effectively. Since the air flows can be made uniform throughout a clean room without using any partition wall, etc., the layout change of a semiconductor manufacturing device can be carried out easily.
    • 23. 发明专利
    • DETECTOR FOR ELECTROMAGNETIC FLOWMETER
    • JPH04175613A
    • 1992-06-23
    • JP30242790
    • 1990-11-09
    • HITACHI LTD
    • KAIHO MASAYUKIIKEGAWA MASAHIROFUKUNAGA MASAO
    • G01F1/58
    • PURPOSE:To make it possible to attach one kind of electromagnetic flowmeter to various diameters of piping arrangement by dividing a magnetic pole into the section to be included in a magnetic field generating device and the section to be included in a measurement tube section so that magnetic field generating device. CONSTITUTION:A measurement tube section comprises a measurement tube 6 with its inner surface lined with an insulation lining 7 and provided with a pair of electrodes 8, auxiliary magnetic poles 5a and 5b attached to plat springs 11a and 11b, and a signal takeout connector 12 attached to the electrodes 8. These components are secured with a measurement section casing 9 of a nonmagnetic material. A magnetic field generating section comprises a measurement tube section holding member 10 of a nonmagnetic material to be in contact with the measurement tube section, magnetic poles 3a and 3b, exciter coils 4a and 4b, and a core 2 attached to the magnetic poles, and they are secured with a casing 1. Constituting the measurement tube section as described above, the measurement tube section having a measurement tube of different bores is made possible.
    • 25. 发明专利
    • DETECTOR OF ELECTROMAGNETIC FLOWMETER
    • JPH0341318A
    • 1991-02-21
    • JP17549389
    • 1989-07-10
    • HITACHI LTD
    • KAIHO MASAYUKIIKEGAWA MASAHIROFUKUNAGA MASAOUEMATSU IKUO
    • G01F1/58
    • PURPOSE:To facilitate fitting to a piping system and also to shorten a length of insertion into the piping system by separating a measuring tube element fitted with electrodes from a magnetic field generating device and by separating the magnetic field generating device vertically so that each part of the separated device contains an exciting coil. CONSTITUTION:A detector is constructed of a measuring tube 5 having an insulative lining 6 provided inside, two sets of magnetic filed generating devices provided vertically and having exciting coils 4a and 4b and magnetic poles 3a and 3b generating a magnetic field in the radial direction of the measuring tube 5, a pair of electrodes 7a and 7b positioned on a straight line intersecting the direction of the magnetic field and the direction of the axis of the tube perpendicularly and fitted inside the measuring tube 5, and casings 1a and 1b housing the whole. The coils 4a and 4b and the magnetic poles 3a and 3b are fitted to cores 2a and 2b provided so that the magnetic field may not leak outside, and further the cores 2a and 2b are fitted to the casings 1a and 1b. By separating the magnetic field generating device in two vertically and further by separating the magnetic field generating devices from the measuring tube 5, in this way, an operation for fitting can be facilitated.
    • 27. 发明专利
    • FINE FILTER UNIT
    • JP2000296306A
    • 2000-10-24
    • JP10622099
    • 1999-04-14
    • HITACHI LTD
    • ABE YASUOKAIHO MASAYUKITAKADA YOSHIHIROTOYAMA YUJIISHIKAWA TOMINORI
    • B01D46/00F24F7/00
    • PROBLEM TO BE SOLVED: To minimize the depth and height of the whole unit and to easily uniformize the wind-speed distribution at an air filter outlet by forming a unit top board in the blow-off direction of a centrifugal fan so that the unit top board has a shape having inclination approaching to the filter surface with an increase in the distance from a blow-off port of the centrifugal fan. SOLUTION: When the fan 106 rotates, external air is taken in from an air intake disposed at the upper side of a fan casing 102 and blown off to an air filter casing part 103 from an external air blow-off port 109. The air enters into an air regulating part 105 and is purified through an air filter 104 and then is blown off into a clean room. At this time, in the air regulating part 105, the inclination approaching to the filter surface with an increase in the distance from the blow-off port of the fan 106 is imparted to a casing top board in the blow-off direction of the fan 106. In this way, the sectional area in the air regulating part 105 is narrowed gradually and the blow-off from the air filter 104 is controlled and the deviation of the wind-speed distribution is eliminated.
    • 29. 发明专利
    • PARALLEL NUMERICAL ANALYSIS METHOD
    • JPH08320897A
    • 1996-12-03
    • JP12774695
    • 1995-05-26
    • HITACHI LTD
    • KAIHO MASAYUKIIKEGAWA MASAHIRO
    • G06F15/16G06F17/50
    • PURPOSE: To provide the numerical analysis method which is short in calculation time and can take a large-scale analysis and uses plural meshes by assigning processors to the respective meshes and performing calculation, and separately providing a processor which generates data for receiving and passing calculation results between the processors. CONSTITUTION: The meshes includes three kinds of mesh, i.e., a mesh 1 for the calculation of the whole analytic area, a circular mesh 2, and a square mesh 3. A processor 1, a processor 2, and a processor 3 are put in charge of the calculation of the respective meshes. A processor 0 generates the data for receiving and passing the calculation results. The calculating processes of the meshes are performed in parallel and then the processor 0 generates the data for receiving and passing the calculation results. After the data for receiving and passing the results are generated, the calculation results are transferred between the processors. Convergence is decided at the point of time and when the convergence is obtained, the calculation is ended, but when not the said flow is repeated by making a return to the calculation of the respective meshes.
    • 30. 发明专利
    • METHOD FOR CREATING ANALYTIC LATTICE
    • JPH08193912A
    • 1996-07-30
    • JP470995
    • 1995-01-17
    • HITACHI LTD
    • SHIMIZU ISATOKATO CHIYUKIKAIHO MASAYUKIIKEGAWA MASAHIRO
    • G01M9/00G06F17/50
    • PURPOSE: To save the memory capacity and the amount of calculation while keeping high accuracy by dividing an overlapping lattice in the analytic region of finite element method finely by octant method. CONSTITUTION: A lattice overlapping a finite mesh 105 stretched around an analytic object 101 is divided finely by octant method. In other words, a differential lattice 102 at a division level 1 is subjected to octantal division to obtain a differential lattice 103 at division level 2 which is further divided into a differential lattice 104 at division level 3. The element division is carried out by selecting a lattice point 706 (707) of a concerned element 705 on the negative (positive) side plane in the direction 3 for all lattice points (m) with reference to an element lattice point reference table. A lattice point 708 located between the lattice points 706, 707 an another lattice point 709 linked therewith are then determined with reference to a lattice point linking table. Subsequently, unlinked lattice points 708 are linked 710 to obtain a new element 711 (global number m+ 1). Since the density of lattice can be regulated around the analytic region of finite element method and other part, memory capacity and the amount of computation can be saved.