专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

21. 发明专利

JP2002134441A METHOD OF MANUFACTURING POWER SEMICONDUCTOR ELEMENT 失效
公开(公告)号：JP2002134441A
公开(公告)日：2002-05-10
申请号：JP2000330029
申请日：2000-10-30
申请人： FUJI ELECTRIC CO LTD
发明人： NOZAWA MASANOBU , NAKAZAWA HARUO
IPC分类号： H01L21/301 , H01L21/336 , H01L29/739 , H01L29/78
摘要： PROBLEM TO BE SOLVED: To reduce stresses applied on a wafer in a backside manufacturing process of power semiconductor elements. SOLUTION: The manufacturing method comprises the steps of (1) sticking a surface protective tape 20 for protecting a processed surface of the wafer 10, after processing the surface of the wafer 10 for power semiconductor substrate elements, (2) grinding the backside, (3) dicing (first) the backside of the wafer 10 along dicing lines, (4) implanting ions into the backside, (5) heat- treating it, (6) depositing a metal film on the backside, (7) removing the tape thereafter, (8) dicing (second) along the dicing lines, thereby manufacturing chips.

22. 发明专利

JPH10123172A METHOD AND DEVICE FOR CALIBRATING PHYSICAL QUANTITY SENSOR 失效
公开(公告)号：JPH10123172A
公开(公告)日：1998-05-15
申请号：JP27777496
申请日：1996-10-21
申请人： FUJI ELECTRIC CO LTD , FUJITSU TEN LTD
发明人： KAMIYANAGI KATSUMICHI , NISHIKAWA MUTSUO , NAKAZAWA HARUO , FUNO HIDEKAZU
IPC分类号： G01P21/00 , G01L27/00
摘要： PROBLEM TO BE SOLVED: To calibrate a physical quantity sensor, especially one regarding force easily. SOLUTION: When a small physical quantity sensor is calibrated, an additional mass 300 whose mass (m) is confirmed in advance is placed on a thick- walled part 103, thus enabling the thin-walled part to be deformed as if an acceleration or a pressure is generated and a physical quantity sensor to detect a physical quantity such as acceleration and pressure being equivalent to the mass (m) of the additional mass 300. An output for the mass (m) and the expression of a calibration straight line when an intrinsic physical quantity is applied are obtained in advance. A sensitivity equivalent to the sensor in the intrinsic physical quantity can be obtained from the output by the addition mass 300 using the calibration straight line expression. The sensitivity equivalent to the sensor in the intrinsic physical quantity due to the calibration straight line can be automatically calculated by a calibration device.

23. 发明专利

JPH09269081A SELF-RETAINING TYPE CUT-OFF VALVE 失效
公开(公告)号：JPH09269081A
公开(公告)日：1997-10-14
申请号：JP7859896
申请日：1996-04-01
申请人： TOKYO GAS CO LTD , FUJI ELECTRIC CO LTD
发明人： NUKUI KAZUMITSU , NAKAMURA MITSUHIRO , SATOU SOUBUN , FUJISAWA KAZUYA , NAKAZAWA HARUO , SUGIURA MASARU
IPC分类号： F16K31/06 , F16K31/08
摘要： PROBLEM TO BE SOLVED: To prevent fluid from being penetrated into a part beyond the bottom of a cylindrical guide body, by forming the cylindrical guide body having an electromagnet to have a bottom, and arranging the bottom of the cylindrical guide body at near the other end of a plunger. SOLUTION: A guide body 21 is formed into a bottomed cylindrical shape by using a non-magnetic material such as brass, the opening side one end of the guide body 21 is retained to a frame body 64, the other end thereof is closed by a bottom 211, and a magnetic pole 62 is oppose to a permanent magnet 22 sandwiching the bottom 211 of the guide body 21, and fixed on the inner surface side of the bottom 211. A minor protective film in such an extent that prevents weak oxidation by atmosphere, is used for a protective film applied to the permanent magnet 22. Fluid 9a is prevented from being penetrated into a part beyond the bottom 211 of the guide body 21 by the bottom 211 of the guide body 21, a seal body mounted at near an end which becomes the opposite side of a valve element 71 in the conventional case is no more required, and metal whose material characteristics are stable for a long time is used for sealing the fluid 9a in the end instead of the conventional rubber seal and so on, thereby the long reliability of the performance of a seal can be remarkably improved.

24. 发明专利

JPH0921973A PRODUCTION OF POLYGON MIRROR TYPE SCANNER 失效
公开(公告)号：JPH0921973A
公开(公告)日：1997-01-21
申请号：JP17175295
申请日：1995-07-07
申请人： FUJI ELECTRIC CO LTD
发明人： IKEDA YOSHINARI , NAKAZAWA HARUO
IPC分类号： B41J2/44 , G02B5/08 , G02B26/10 , G02B26/12 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To easily produce a scanner of a microminiature size by molding mirror parts of a regular polygonal shape of a photosetting resin by a photomolding method in the peripheral areas of the rotor yoke of a scanner motor and forming the films of mirror finished surfaces on its peripheral surfaces. SOLUTION: The rotor yoke 3 of the scanner motor is placed on a work stage 14 and is set in such a position where the rear surface of the rotor yoke 3 is slightly immersed into the liquid surface of the photosetting resin 12 filled in a resin liquid vessel 13. While the liquid surface of the resin 12 is scanned with the laser beam from a laser beam source 16 in a Y-Y-axis direction in accordance with the CAD data on the shape of the polygon mirror 1, the liquid surface is irradiated with the laser beam and the cured resin is bonded to the peripheral surfaces of the rotor yoke 3. The next cured layers are successively deposited on the previously molded and cured layers by irradiation with the laser beam while the work stage 14 is lowered little by little. As a result, the mirror parts 1a of the polygonal shape are integrally molded on the peripheral areas of the rotor yoke 3 and thereafter, the films of the mirror finished surfaces 1b are formed on the peripheral surfaces of the mirror parts 1a.

25. 发明专利

JPH07264832A SPINDLE MOTOR 失效
公开(公告)号：JPH07264832A
公开(公告)日：1995-10-13
申请号：JP5238494
申请日：1994-03-24
申请人： FUJI ELECTRIC CO LTD
发明人： NAKAZAWA HARUO
IPC分类号： H02K29/00 , H02K21/24
摘要： PURPOSE:To unify a disc with a motor while a problem that the thickness of a whole structure is too large when a disc is mounted is solved. CONSTITUTION:A shaft 18 is inserted into a stator side housing 19 and a stator yoke 17 on which armature coils 16 are arranged is put onto the shaft 18. A rotor consists of a disc 13, a shielding plate 12, an axial type field permanent magnet 14 which is so magnetized as to have multiple poles, a rotor yoke 11 and a boss 10 for attaching the disc 13. The rotor yoke 11 is put on the permanent magnet 14 and the permanent magnet 14 is placed inside the disc 13 with the shielding plate 12 made of magnetic material such as iron therebetween so as to protect the disc 13 from the influence of the flux of the permanent magnet 14. Then the rotor is connected to the stator with bearings 15.

26. 发明专利

JPH0538122A MOVABLE FIELD-TYPE LINEAR MOTOR 失效
公开(公告)号：JPH0538122A
公开(公告)日：1993-02-12
申请号：JP18494291
申请日：1991-07-25
申请人： FUJI ELECTRIC CO LTD
发明人： NAKAZAWA HARUO
IPC分类号： H02K41/03
摘要： PURPOSE:To provide a movable field-type linear motor by making a stable operation control possible through appropriately opening and closing lead switches arranged on the stator side in the manner of coinciding with the movement of a movable element. CONSTITUTION:In a movable field-type linear motor, in which a movable element 1 mounting a field permanent magnet 3, armature coils 5 arranged along the moving path of the movable element and a stator equipped with feeding lead switches 7 connected individually with respective armature coils are combined with each other and the lead switches 7 are opened and closed in the manner of coinciding with the movement of the movable element to conduct a feeding control to the armature coils 5, a magnetic shielding plate 12 is laid on the stator side so as to divide the lead switches 7 from the field permanent magnet 3. Then, a lead switch-opening and closing permanent magnet 13 having the same length as the overall length of the field permanent magnet 3 and mounted on the movable element is arranged on the side opposite to the field permanent magnet 3 with the magnetic shielding plate 12 in between.

27. 发明专利

JP2001044034A PLANAR TYPE MAGNETIC ELEMENT 失效
公开(公告)号：JP2001044034A
公开(公告)日：2001-02-16
申请号：JP21206099
申请日：1999-07-27
申请人： FUJI ELECTRIC CO LTD
发明人： NAKAZAWA HARUO , EDO MASAHARU , YONEZAWA EIICHI
IPC分类号： H01F17/00 , H01F17/04
摘要： PROBLEM TO BE SOLVED: To reduce the number of the manufacturing processes of a planar type magnetic element and make its frequency characteristic satisfactory and DC-current superimposing characteristic, by using a ferrite substrate as its lower magnetic body, and by forming thereon by means of semiconductor manufacturing methods its spiral planer coil and upper magnetic body. SOLUTION: A polyimide which is to become an insulation film 2 between a ferrite substrate 11 and a coil conductor 3 is applied to the ferrite substrate 11. Platinum which becomes the nucleus of an electroless plating is formed thereon by a sputtering method. Furthermore, by applying thereto a photosensitive polyimide, the patterning aligned with the pattern of the coil conductor 3 is performed to form the plating mold of the coil conductor 3. By using this mold, the coil conductor 3 is formed through the electroless plating or an electrolytic plating. By applying thereto a polyimide, an interlayer insulating film 2 for an upper magnetic film 1 is formed. By forming thereon the upper magnetic film 1 by means of a sputtering method, a planar type inductor using the ferrite substrate 11 is formed. Thereby, the obtained planar type magnetic element has a reduced number of manufacturing processes, satisfactory frequency characteristic, and good DC-current superimposing characteristic.

28. 发明专利

JP2000306731A PLANAR MAGNETIC ELEMENT 失效
公开(公告)号：JP2000306731A
公开(公告)日：2000-11-02
申请号：JP11347799
申请日：1999-04-21
申请人： FUJI ELECTRIC CO LTD
发明人： NAKAZAWA HARUO , EDO MASAHARU
IPC分类号： H01F10/06 , H01F10/12 , H01F10/13 , H01F17/00 , H01L21/822 , H01L27/04
摘要： PROBLEM TO BE SOLVED: To obtain a planar magnetic element, in which magnetic saturation is retarded and DC superposition characteristics are made satisfactory, while facilitating miniaturization and shortening the manufacturing time by composing a thin film of a magnetic material to have a sponge-like structure. SOLUTION: Magnetic films 11, 12 have a sponge-like structure, having a plurality of fine voids 10, and an amorphous soft magnetic film is employed as the magnetic film 11, 12, for example. The magnetic film 11, 12 is formed by depositing CoHfTaPd under conditions of high-frequency power of about 400 W and Ar gas pressure of about 1 Pa. The magnetic film 11, 12 is heat treated at 350-400 deg.C in a rotational field of about 600 Oe or higher and imparted with monoaxial anisotropy in the direction orthogonal to the direction of the field generated from a planar coil in order to retard magnetic saturation. According to the method, a planar magnetic element having superior DC superposition characteristics in the large current region can be produced at a high rate with good reproducibility, while keeping a small element area.

29. 发明专利

JP2000306730A PLANAR MAGNETIC ELEMENT 失效
公开(公告)号：JP2000306730A
公开(公告)日：2000-11-02
申请号：JP11347599
申请日：1999-04-21
申请人： FUJI ELECTRIC CO LTD
发明人： NAKAZAWA HARUO , EDO MASAHARU
IPC分类号： H01L21/822 , H01F17/00 , H01L27/04 , H05K1/16
摘要： PROBLEM TO BE SOLVED: To easily suppress warpage of the substrate of the planar magnetic element. SOLUTION: This planar magnetic element is constituted by stacking a plane coil 3 and magnetic body thin films 1 and 4, between which insulating films 2 and the plane coil 3 are sandwiched on a substrate 4, is provided with a thin film 6 which is different in the direction of stress to the substrate on the reverse surface of the substrate to cancel the tensile stress that the substrate has. Consequently, the productivity of even a substrate of large size can be increased.

30. 发明专利

JP2000114043A PLANE THIN-FILM INDUCTOR 失效
公开(公告)号：JP2000114043A
公开(公告)日：2000-04-21
申请号：JP28231698
申请日：1998-10-05
申请人： FUJI ELECTRIC CO LTD
发明人： NAKAZAWA HARUO
IPC分类号： H01F17/00
摘要： PROBLEM TO BE SOLVED: To provide a plane thin-film inductor in which the figure of merit is large, the iron loss of magnetic body is low, and its high frequency characteristic is excellent. SOLUTION: This plane thin-film inductor is formed by laminating a spiral coil an insulator and a soft magnetic body thin film sandwiching them, and its external size is several milimeters and it operates in MHz frequency band. The plane thin-film inductor is also formed as to satisfy a formula, 1.05

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式