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    • 13. 发明专利
    • Chip pickup apparatus and method, and chip peeling apparatus and method
    • 芯片拾取装置和方法,以及芯片剥离装置和方法
    • JP2007109936A
    • 2007-04-26
    • JP2005300044
    • 2005-10-14
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • HAJI HIROSHIOSONO MITSURUKASAI TERUAKINODA KAZUHIRO
    • H01L21/67H01L21/52
    • H01L21/67132H01L21/67092Y10S156/932Y10S156/943Y10S438/976Y10T156/1132Y10T156/1179Y10T156/1195Y10T156/1944Y10T156/1983Y10T156/1994
    • PROBLEM TO BE SOLVED: To provide chip pickup apparatus and method and chip peeling apparatus and method capable of picking up a chip at high speed without damaging it. SOLUTION: In the chip pickup apparatus for picking up the chip 6 stuck on a sheet 5 by sucking and holding it using a take-out nozzle 20, a sheet push-up member 24 with spherically formed flexible elastic body such as rubber is mounted on the abutting support surface on the top face of a peeling tool 22. In the moved down state of the take-out nozzle 20, the sheet push-up surface of the sheet push-up member 24 is made to abut the underside of the sheet 5 by becoming planar following the shape of the underside. In the moving up operation wherein the take-out nozzle 20 is moved up along with the chip 6, it pushes up the underside of the sheet 5 while deforming the push-up surface into an upwardly convex shaped curved surface. Thus, the sheet 5 and the chip 6 can be peeled off from each other starting from the outer edge side of the chip. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供能够高速拾取芯片而不损坏芯片的芯片拾取装置和方法以及芯片剥离装置和方法。 解决方案:在用于通过使用取出喷嘴20吸取和保持粘贴在片材5上的片6的拾取装置中,具有球形弹性体如橡胶的片状上推构件24 安装在剥离工具22的顶面上的抵接支撑面上。在取出喷嘴20的向下移动状态下,使片状上推构件24的片状上推面靠近下侧 通过根据下侧的形状变成平面的片材5。 在其中取出喷嘴20与芯片6一起向上移动的向上移动操作中,它向上推动片材5的下侧,同时将上推表面变形成向上凸形的曲面。 因此,片材5和芯片6可以从芯片的外边缘侧彼此剥离。 版权所有(C)2007,JPO&INPIT