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    • 14. 发明专利
    • Tungsten film forming method
    • TUNGSTEN膜形成方法
    • JP2013213274A
    • 2013-10-17
    • JP2012183934
    • 2012-08-23
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • SATO KOICHI
    • C23C16/14H01L21/285H01L21/3205H01L21/768H01L23/532
    • H01L21/4814H01L21/28556H01L21/28562H01L21/76876H01L21/76877H01L2221/1089
    • PROBLEM TO BE SOLVED: To form a low-resistance tungsten film without deteriorating adhesion with an underlying film or electrical characteristics.SOLUTION: When forming a tungsten film on a surface of a substrate while heating the substrate in a depressurized atmosphere, an initial tungsten film is formed on the surface of the substrate by alternately repeating the supply of a WFgas which is tungsten raw material and the supply of a Hgas which is a reducing gas, while conducting purge therebetween, a gas containing a material for nucleation is adsorbed onto a surface of the initial tungsten film, the WFgas which is the tungsten raw material and the Hgas which is the reducing gas are supplied, and a crystallinity blocking tungsten film for blocking crystallinity of the initial tungsten film is formed. Thereafter, after elevating a pressure inside a process container, a flow rate of the WFgas is increased, the WFgas and the Hgas are supplied, and a main tungsten film is formed.
    • 要解决的问题:形成低电阻钨膜,而不会劣化与下面的膜的粘合性或电特性。解决方案:在减压气氛中加热衬底的同时在衬底的表面上形成钨膜时,初始钨膜 通过交替地重复供给作为钨原料的WF气体和供给作为还原气体的H气,同时在其间进行吹扫而形成在基板的表面上,含有成核材料的气体被吸附到表面 的原始钨膜,作为钨原料的WF气体和作为还原气体的H气体被供给,并且形成用于阻挡初始钨膜的结晶性的结晶性阻挡钨膜。 此后,在处理容器内升压后,WF气体的流量增加,供给WF气体和H气,形成主钨膜。