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11. 发明专利

JP2004535604A Beam-forming element and a manufacturing method of the element for optical radiation. 审中-公开
公开(公告)号：JP2004535604A
公开(公告)日：2004-11-25
申请号：JP2003514666
申请日：2002-07-17
申请人：フラウンホーファ−ゲゼルシャフトツァーフォルデルングデアアンゲバンデンフォルシュンクエー. ファオ.Fraunhofer−Gesellschaft Zur Forderung Der Angewandten Forschung E. V.
发明人：ハンス−ヨアキムクウェンツェル， , ヴォルフガングラインネルト，
IPC分类号： G02B5/00 , A61B18/20 , A61F9/007 , A61F9/008 , A61F9/01 , G02B27/09
CPC分类号： G02B27/0927 , A61F9/00814 , G02B27/09 , G02B27/0938
摘要：本発明は、特にＵＶレーザーの光放射のためのビーム整形素子及び当該ビーム整形素子の製造方法に関連する。このビーム整形素子は、光放射のビームの整形のために構成された薄層金属配線がベアリングされたキャリア基板（１）を備え、薄層金属配線は、少なくとも２層の金属層（２，３）から構成され、光放射（４）が少なくとも所定の強度又は放射期間において行われた時点で、当該光放射（４）の衝撃に応じて永久的な色の変化を伴って互いに反応する。ビーム整形素子の実施形態によれば、使用により光学活性による視認可能な痕跡が残るので、偶発的に複数回使用されることがなくなる。

12. 发明专利

JP2004531760A Multi-functional element of symmetrical and uniformity of the beam of light 有权
公开(公告)号：JP2004531760A
公开(公告)日：2004-10-14
申请号：JP2002584060
申请日：2002-03-19
申请人：トムソンライセンシングソシエテアノニムThomson Licensing S.A.
发明人：カルル−ハインツブレンナー
IPC分类号： G02B5/18 , G02B5/32 , G02B27/09 , G11B7/135
CPC分类号： G02B27/0927 , G02B27/09 , G02B27/0938
摘要：【課題】本発明は、光線ビームの対称化及び均一化の複合機能素子、並びにこの種の素子の設計方法に関する。
本発明の１つの目的は、非均一な強度分布を有する光線ビームからいかなる所望の強度分布を有する光線ビームをも形成する素子及び対応する設計方法を提示することにある。特に、楕円形の強度分布を有する光線ビームをそれとは異なる楕円形の強度分布を有する光線ビームに変換することを意図するものである。
【解決手段】この目的のために、本発明は、電磁波の異方性強度を、同時に対称化及び均一化するための位相素子を提供する。
【選択図】図１

13. 发明专利

JP2018505782A レーザ放射による材料加工のための装置有权
公开(公告)号：JP2018505782A
公开(公告)日：2018-03-01
申请号：JP2017539636
申请日：2016-01-27
申请人：プレシテックゲーエムベーハーウントツェーオーカーゲー
发明人：ルドルフアンドレアス , シェーンレバーマルティン
IPC分类号： B23K26/064 , B23K26/00 , B23K26/073 , G02B26/02
CPC分类号： G02B27/0972 , B23K26/067 , B23K26/21 , B23K26/38 , B29C65/1635 , F21V5/02 , F21V7/05 , F21V13/04 , G02B27/0927 , G02B27/0938 , G02B27/4255 , H01L33/58
摘要：本発明は、レーザ放射によって材料を加工するための装置に関し、この装置は、レーザビームを加工物に集束させるための集束光学部品(15)と、少なくとも2個の板状光学素子(10)を備える、強度分布を調節するための調節光学部品(20)とを備え、これらの板状光学素子が、レーザビーム(14)のビーム経路に縦に並べて配列され、円周方向に相互に対して回転可能であり、そして、それぞれが、円周方向にそれぞれの平板平面に対して交互に傾斜している扇形ファセットの円形パターンを有する面を有する。

14. 发明专利

JP5074278B2 Lighting equipment and lighting imaging device 有权
公开(公告)号：JP5074278B2
公开(公告)日：2012-11-14
申请号：JP2008110758
申请日：2008-04-21
申请人：オリンパス株式会社
发明人：愼一今出
IPC分类号： F21S2/00 , A61B1/00 , F21Y101/02 , G02B27/00 , G02B27/18 , H04N5/225 , H04N5/238 , H04N9/04
CPC分类号： A61B1/0669 , A61B1/0638 , A61B1/0653 , A61B1/0684 , G02B6/3604 , G02B6/421 , G02B6/4298 , G02B23/2461 , G02B26/008 , G02B26/04 , G02B27/0933 , G02B27/0938 , H04N5/2256 , H04N2005/2255
摘要： To provide an illuminating apparatus that can control an illumination period in accordance with an image capturing exposure period without disturbing the color balance, and that can radiate bright illumination light possessing high directivity. The illuminating apparatus (3) includes: a light source (9) including a plurality of light emitting elements (13) aligned in a ring-like manner and emitting light in a radially inward direction; a light guide member (10) having an entering end faces to the radially inward direction of the light source (9) and an emitting end arranged on the center axis of the ring, and guiding light caused to enter the light guide member (10) from the entering end to the emitting end; and a rotary part rotating the light guide member (10) about the center axis of the ring. The light source is structured with a plurality of unit light source blocks P aligned in the circumferential direction. The unit light source blocks P are made up of a plurality of types of the light emitting elements (13) respectively producing light of different colors aligned in the circumferential direction.

15. 发明专利

JP2012199552A Optical unit, illumination optical device, exposure device, and manufacturing method of device 有权
标题翻译：光学单元，照明光学装置，曝光装置和装置的制造方法
公开(公告)号：JP2012199552A
公开(公告)日：2012-10-18
申请号：JP2012080374
申请日：2012-03-30
申请人： Nikon Corp , 株式会社ニコン
发明人： TANITSU OSAMU
IPC分类号： H01L21/027 , G02B3/00 , G02B5/04 , G02B19/00 , G03F7/20
CPC分类号： G02B27/0927 , F21V9/14 , F21V13/02 , F21V14/003 , G02B27/0938 , G02B27/1086 , G02B27/126 , G02B27/286 , G03F7/70058 , G03F7/70116 , G03F7/70566
摘要： PROBLEM TO BE SOLVED: To provide an illumination optical device capable of achieving the lighting conditions that are rich in diversity for the shape, size and polarization state of illumination pupil luminance distribution.SOLUTION: The illumination optical device comprises an optical unit 3. The optical unit 3 includes a light beam splitter 35 which splits an incident light beam into two light beams, a first spatial light modulator 33 which can be arranged in the optical path of a first light beam, a second spatial light modulator 34 which can be arranged in the optical path of a second light beam, and a photosynthesizer 36 which synthesizes a light beam passed through the first spatial light modulator and a light beam passed through the second spatial light modulator. The first spatial light modulator and the second spatial light modulator have multiple optical elements 33a, 34a arranged two-dimensionally and controlled individually.
摘要翻译：解决的问题：提供一种照明光学装置，其能够实现对于照明光瞳亮度分布的形状，大小和偏振态的分集丰富的照明条件。解决方案：照明光学装置包括光学单元3.光学单元3包括将入射光束分成两个光束的光束分离器35，可以布置在光路中的第一空间光调制器33 可以布置在第二光束的光路中的第二空间光调制器34和合成通过第一空间光调制器的光束的光合作用器36和通过第二光束的光束空间光调制器。第一空间光调制器和第二空间光调制器具有二维排列并分别控制的多个光学元件33a，34a。版权所有（C）2013，JPO＆INPIT

16. 发明专利

JP4974206B2 Multi-functional element of symmetrical and uniformity of the beam of light 有权
公开(公告)号：JP4974206B2
公开(公告)日：2012-07-11
申请号：JP2002584060
申请日：2002-03-19
申请人：トムソンライセンシングThomson Licensing
发明人：カルル−ハインツブレンナー
IPC分类号： G02B5/18 , G02B27/09 , G02B5/32 , G11B7/135
CPC分类号： G02B27/0927 , G02B27/09 , G02B27/0938
摘要： The invention relates to an element for the combined symmetrization and homogenization of a beam of rays and to a method for designing an element of this type. One object of this invention is to propose an element and a corresponding design method by means of which a beam of rays with any desired intensity distribution is shaped from a beam of rays with an inhomogeneous intensity distribution. In particular, the intention is to transform a beam of rays with an elliptical intensity distribution into one with a different elliptical intensity distribution. For this purpose, the invention provides a phase element for the simultaneous circularization and homogenization of anisotropic intensities of electromagnetic waves.

17. 发明专利

JP2011507042A Optics and optical methods 审中-公开
公开(公告)号：JP2011507042A
公开(公告)日：2011-03-03
申请号：JP2010538470
申请日：2008-12-18
申请人：オプティカ・リミテッド
发明人：スカリオマー , デスチャーメスニコラス , パトリックシェブリンファーガル
IPC分类号： G02B27/48 , G02B19/00 , G02B26/00
CPC分类号： G02B27/48 , G02B5/02 , G02B26/0825 , G02B26/0833 , G02B26/0858 , G02B27/0938 , H04N9/3111 , H04N9/3161 , H04N9/3164
摘要： An optical system (100) comprises a coherent light source (101) and optical elements for directing light from the source to a target (1001). The optical elements include at least one diffusing element (141, 161) arranged to reduce a coherence volume of light from the source and a variable optical property element (151). A control system (1021) controls the variable optical property element such that different speckle patterns are formed over time at the target (1001) with a temporal frequency greater than a temporal resolution of an illumination sensor or an eye (1011) of an observer so that speckle contrast ratio in the observed illumination is reduced. The variable optical property element (151) may be a deformable mirror with a vibrating thin plate or film.

18. 发明专利

JP2009266390A Lighting system and lighting image-pickup apparatus 有权
标题翻译：照明系统和照明图像摄像机
公开(公告)号：JP2009266390A
公开(公告)日：2009-11-12
申请号：JP2008110758
申请日：2008-04-21
申请人： Olympus Corp , オリンパス株式会社
发明人： IMAIDE SHINICHI
IPC分类号： F21S2/00 , A61B1/00 , F21V5/00 , F21V13/00 , F21V14/00 , F21Y101/02 , G02B27/00 , G02B27/18 , H04N5/225 , H04N5/238 , H04N9/04
CPC分类号： A61B1/0669 , A61B1/0638 , A61B1/0653 , A61B1/0684 , G02B6/3604 , G02B6/421 , G02B6/4298 , G02B23/2461 , G02B26/008 , G02B26/04 , G02B27/0933 , G02B27/0938 , H04N5/2256 , H04N2005/2255
摘要： PROBLEM TO BE SOLVED: To provide a lighting system capable of controlling a lighting period according to an image-pickup exposure period and emitting high-directivity bright illumination light without losing the color balance.
SOLUTION: The lighting system 3 comprises a light source 9 containing a plurality of light-emitting elements 13 disposed in a circular ring manner to emit light radially inward, a light guide member 10 having an incident end opposite radially inward to the light source 9 and a light emitting end disposed on the central axis of the circular ring and guiding light from the incident end to the light emitting end, and a rotary means for rotating the light guide member 10 around the central axis of the circular ring. In the light source, a plurality of unit light source blocks P is disposed in the peripheral direction. Each of the unit light source block comprises some kinds of light-emitting elements 13 of different colors disposed in the peripheral direction.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够根据摄像曝光时段控制照明周期并发射高指向性亮照明光而不失去色彩平衡的照明系统。解决方案：照明系统3包括光源9，光源9包含多个以圆环方式设置的发光元件13，以径向向内发射光;导光构件10，具有与光线径向向内相对的入射端光源9和设置在圆环的中心轴上并将光从入射端引导到发光端的发光端，以及用于使导光构件10围绕圆环的中心轴线旋转的旋转装置。在光源中，沿圆周方向设置多个单位光源块P. 每个单位光源块包括沿圆周方向布置的一些种类不同颜色的发光元件13。版权所有（C）2010，JPO＆INPIT

19. 发明专利

JP2008164991A Light beam scanner 有权
标题翻译：光束扫描仪
公开(公告)号：JP2008164991A
公开(公告)日：2008-07-17
申请号：JP2006355159
申请日：2006-12-28
申请人： Canon Inc , キヤノン株式会社
发明人： NAGASE TETSUYA
IPC分类号： G02B26/10 , G02B26/12 , H04N1/113
CPC分类号： G03G15/326 , B41J2/471 , G02B19/0014 , G02B19/0052 , G02B26/128 , G02B27/0938 , G02F1/13306 , G02F2203/28 , G03G15/0435 , G03G2215/0404
摘要： PROBLEM TO BE SOLVED: To provide a light beam scanner in which a stable and high speed adjustment of beam waist position is performed with a simple lens configuration without varying the light quantity profile of the spot on an image surface. SOLUTION: The light beam scanner 12 deflects a light beam from a light source 8 with a deflection means 15, and scans the surface of a photoreceptor 30 with a focused light beam, and a first electrooptic element 1 is disposed on the optical axis of the light beam between the light source 8 and the deflection means 15. The first electrooptic element 1 includes an electrooptic crystal 2 and transparent electrodes 3 which are respectively disposed on the faces which face to each other in the optical axis direction of the electrooptic crystal 2. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种光束扫描器，其中以简单的透镜配置执行光束腰部位置的稳定和高速度调节，而不改变图像表面上的光斑的光量分布。解决方案：光束扫描器12用偏转装置15使来自光源8的光束偏转，并用聚焦光束扫描感光体30的表面，并且第一电光元件1设置在光学光源8和偏转装置15之间的光束的轴线。第一电光元件1包括电光晶体2和透明电极3，其分别设置在电光学的光轴方向上彼此相对的面上水晶2.版权所有（C）2008，JPO＆INPIT

20. 发明专利

JP2004133456A Method for manufacturing photomask, photomask by the same, and exposure method utilizing same 有权
公开(公告)号：JP2004133456A
公开(公告)日：2004-04-30
申请号：JP2003347887
申请日：2003-10-07
申请人： Samsung Electronics Co Ltd , 三星電子株式会社
发明人： PARK JONG-RAK , RO KISEI , SAI SEIUN , JANG SUNG-HOON
IPC分类号： G02B5/18 , G02B27/09 , G02B27/46 , G03F1/26 , G03F1/60 , G03F1/68 , H01L21/027 , G03F1/08 , G03F1/14
CPC分类号： G02B27/0927 , G02B5/1871 , G02B27/09 , G02B27/0938 , G02B27/46 , G03F1/50 , G03F7/70191
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a photomask capable of controlling a CD on a wafer, a photomask by the same, and an exposure method utilizing the same. SOLUTION: The manufacturing method comprises the step of: introducing a photomask substrate 100 having main patterns 150 to be transferred onto the wafer through an exposure process provided on the front surface; and introducing, onto the back of the photomask substrate, the distribution layer of patterns 200 for transmittance regulation including the patterns for transmittance regulation having the pattern density values varying with regions in order to change the distributions of the luminance of incident light on the main patterns. COPYRIGHT: (C)2004,JPO

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