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    • 11. 发明专利
    • FILM THICKNESS MONITORING CONTROL METHOD
    • JPH0882517A
    • 1996-03-26
    • JP21752494
    • 1994-09-12
    • ULVAC CORP
    • ITO ATSUSHI
    • G01B17/02C23C14/54
    • PURPOSE: To determine a parameter accurately while reducing time and labor in the determining of the parameter by preserving the frequency of a piezo-electric crystal at the starting point into a film monitoring device at each formation of a film. CONSTITUTION: An evaporation source 2, a substrate 3 desired to form a film, a microbalance sensor 4 comprising a piezo-electric crystal and a film thickness inspection instrument 5 are arranged in a vacuum chamber 1. The evaporation source 2 is connected to a heating power source 6. A film thickness monitoring device 7 preserves the frequency of the piezo-electric crystal of the sensor 4 at the starting point and the frequency of the piezo-electric crystal at the ending point at each formation of a film. On the other hand, an identification number is attached at each formation of a film to measure a film thickness on the substrate 3 actually with the device 5 at a plurality of time points while the frequency of the piezo-electric crystal shifts to a low position from a high position as the formation of films are repeated and actually measured values thereof are inputted into the device 7 corresponding to the film identification number. The device 7 determines an acoustic impedance ratio in the optimum shearing mode and a correction factor in the geometrical position of a quartz crystal and the substrate by the least square.
    • 13. 发明专利
    • ANALYSIS DEVICE
    • JP2002243609A
    • 2002-08-28
    • JP2001039453
    • 2001-02-16
    • ULVAC CORP
    • ITO ATSUSHIMAEHIRA KENFUWA KOYUYAMA JUNPEI
    • G01N29/02G01N5/02
    • PROBLEM TO BE SOLVED: To provide an analysis device, capable of accurately measuring changes in the oscillation frequencies of a plurality of oscillators capable of solving the problems of the difficulty in preventing interference among the oscillators by only arranging the oscillators in different containers, since it is caused by electrical interference inside a frequency measuring device and that it is difficult to accurately measure the oscillation frequencies of the oscillators since the amount of change in the oscillation frequencies with the progress of reaction being very small, even if it is possible to prevent the interference. SOLUTION: Oscillators 61-64 are immersed in liquids 211-214 and connected to and oscillating circuit 4 at a prescribed period one by one by a switching circuit 5 to oscillate the oscillating circuit 4. Difference in frequency is created from the oscillation frequency of the oscillating circuit 4 and the oscillation frequency of a reference frequency creating circuit 12 and measured by a low-frequency measuring circuit 15, to obtain the oscillation frequency of the oscillating circuit 4. By measuring the approximate value of the oscillation frequency of the oscillating circuit 4 using a high-frequency measuring circuit 11 and setting the oscillation frequency of the reference frequency creating circuit 12, on the basis of the approximate value, obtain the frequency of the oscillating circuit 4 of which the oscillation frequency varies can be obtained accurately.
    • 16. 发明专利
    • OSCILLATION CIRCUIT FOR PIEZOELECTRIC CRYSTAL OSCILLATION TYPE FILM THICKNESS METER
    • JPH08261743A
    • 1996-10-11
    • JP6095695
    • 1995-03-20
    • ULVAC CORP
    • ITO ATSUSHIMIYAJIMA TAKAAKI
    • G01B21/08G01B7/06G01B17/02G01D5/243H01L41/09
    • PURPOSE: To enable a piezoelectric crystal to oscillate to lower frequency and reduce the frequency of exchanging the piezoelectric oscillator by connecting the piezoelectric oscillator inserted in an oscillation circuit and variable impedance circuit in parallel. CONSTITUTION: A variable impedance circuit 9 connected to a piezoelectric oscillator 8 in parallel consists of a resistor, a capacitor and a varicap. If the voltage impressing to the varicap in the connected state of the piezoelectric oscillator 8 to the oscillation circuit 1 is scanned from a high value to zero, the capacitance of the varicap varies from large value to small value and the oscillation frequency varies from small value to large value. When the oscillation frequency comes close to the basic frequency, the piezoelectric crystal start to oscillate with the basic frequency. As the film adhered on the piezoelectric crystal becomes thick, the oscillation frequency varies in accordance with the film thickness and at a certain thickness, the circuit 1 terminates oscillation or oscillates in different oscillation mode. If the voltage impressing to the varicap of the circuit 9 is raised, it again start to oscillate with the basic frequency corresponding to the film thickness.