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11. 发明专利

JP2014200135A ケーブルガイド及びこれを用いた装置审中-公开
标题翻译：电缆指南及使用该设备的设备
公开(公告)号：JP2014200135A
公开(公告)日：2014-10-23
申请号：JP2013074222
申请日：2013-03-29
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： SHIRAISHI TOSHIMITSU , SHIZAWA NORITAKE , NAGAKURA TSUTOMU
IPC分类号： H02G11/00 , F16G13/12 , F16G13/16
摘要：【課題】クリーンルーム内などで使用するケーブル等案内機構が接触することによって発生する摩耗、発塵、騒音などを大幅に低減する技術を提供する。【解決手段】隣接するケーブルガイドリンクと連結するための連結構造を形成した一対の内側側板と、他方に隣接するケーブルガイドリンクの連結構造を嵌め込むための構造を形成した一対の外側側板と、前記一対の外側側板を連結して上面に永久磁石を嵌め込む穴を形成した上板とを有するケーブルガイドリンクが樹脂一体成型され、前記ケーブルガイドリンクの上板に統一して指定された磁極性が上向きとなるように永久磁石が嵌め込まれて固定され、前記永久磁石が嵌め込まれた複数のケーブルガイドリンクが連結されてダクト状に構成されたことを特徴とするケーブルガイド。【選択図】図1
摘要翻译：要解决的问题：提供一种用于显着减少由于在洁净室中使用的电缆引导机构等而导致的磨损，灰尘排放，噪声等的技术。解决方案：电缆引导链接具有一对内侧板，形成用于与相邻的缆索引导件连接的联接结构，一对外侧板，其形成用于装配在另一个相邻的联接结构中的结构;以及上板，将所述一对外侧并且在上表面具有要装配永磁体的孔的树脂是一体模制的。永久磁铁安装在电缆引导连杆的上表面并固定在适当的位置，以便向上指定一个单一的磁极性，并且每个装有永久磁铁的多个电缆导向连接件被连接并构造成像导管在电缆指南中。

12. 发明专利

JP2014069339A Stamper, stamper production apparatus and production method of the same, and fine structure transfer method 审中-公开
标题翻译：冲压机，冲压机生产设备及其生产方法及精细结构转移方法
公开(公告)号：JP2014069339A
公开(公告)日：2014-04-21
申请号：JP2012214875
申请日：2012-09-27
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMASHITA HISAAKI , SHIZAWA NORITAKE , SHIRAISHI TOSHIMITSU , NAGAKURA TSUTOMU
IPC分类号： B29C33/38 , B29C59/02 , G11B5/84 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a stamper in which intrusion of an air bubble is reduced, and a fine structure can be transferred to a transfer object body by a comparably compact apparatus; a stamper production apparatus that can produce the stamper or a production method of the same; and a fine structure transfer method to a transfer object body in which the stamper is used and through-put is high.SOLUTION: A stamper includes: a stamper base material; and a fine structure pattern that is formed on a surface of the stamper base material by a pattern formation resin and is along a curved surface of a convex. A production method of a stamper comprises: deforming a master disk to a curved surface shape of a convex in an opposite side with a single side in which a fine structure pattern is formed; pressing the master disk that has the curved surface shape of a convex to a stamper base material in which a pattern formation resin is applied to transfer the fine structure pattern to the pattern formation resin that is applied; returning the master disk to an original state in a state of the transferred state; after returning, performing exposure of the transfer fine structure pattern to produce a stamper having a transfer fine structure pattern that is along a curved surface shape of a convex in a stamper base material.
摘要翻译：要解决的问题：提供一种减小气泡入侵的压模，并且通过相当紧凑的装置将精细结构转移到转印体上; 可以制造压模的压模制造装置或其制造方法; 以及将精细的结构转印方法应用于使用压模和放入的转印体的转印体上。解决方案：压模包括：压模基材; 以及精细结构图案，其通过图案形成树脂形成在压模基材的表面上并沿着凸形的弯曲表面。压模的制造方法包括：将主盘变形为具有形成精细结构图案的单面的相对侧的凸形的曲面形状; 将具有凸形弯曲表面形状的母盘按压到其上施加图案形成树脂的压模基材以将精细结构图案转印到所施加的图案形成树脂上; 在传送状态的状态下将主盘恢复到原始状态; 在返回之后，进行转印精细结构图案的曝光，以产生具有在压模基材中凸起的弯曲表面形状的转印精细结构图案的压模。

13. 发明专利

JP2013118233A Microstructure transfer device 审中-公开
标题翻译：微结构传输器件
公开(公告)号：JP2013118233A
公开(公告)日：2013-06-13
申请号：JP2011264163
申请日：2011-12-02
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIRAISHI TOSHIMITSU , YAMASHITA HISAAKI , SHIZAWA NORITAKE , NAGAKURA TSUTOMU
IPC分类号： H01L21/027 , B29C59/02
CPC分类号： B29C59/022 , B29C2035/0827 , B29C2059/023 , G03F7/0002
摘要： PROBLEM TO BE SOLVED: To provide a microstructure transfer device capable of suitably varying curvature of a spherical shape of a stamper surface in transfer.SOLUTION: There is provided the microstructure transfer device that transfers a fine ruggedness pattern to an object body of transfer, the microstructure transfer device including a stamper having a fine rugged pattern on a surface, and a stamper holding part for holding the stamper. The stamper holding part includes a light-transmissive backup member, a stamper backup elastic body fitted covering a center part of the backup member, a space in which negative pressure for sucking and holding the stamper is introduced, and a member which is formed surrounding the stamper holding part and comes into contact with an outer peripheral part of the stamper. Further, the abutting member is movable to and away from the backup member so as to thereby vary the curvature of a curved surface of the stamper pressed against the stamper backup elastic body.
摘要翻译：要解决的问题：提供一种能够适当地改变转印中压模表面的球形的曲率的微结构转印装置。解决方案：提供了将精细坚固型图案转印到物体转移的微结构转印装置，该微结构转印装置包括在表面上具有精细凹凸图案的压模以及用于保持压模的压模保持部分。压模保持部分包括透光支撑构件，装配在支撑构件的中心部分上的压模支撑弹性体，其中引入用于吸住和保持压模的负压的空间，以及围绕压模保持部件与压模的外周部分接触。此外，抵接构件能够移动到远离支撑构件并且远离支撑构件，从而改变按压在压模支撑弹性体上的压模的曲面的曲率。版权所有（C）2013，JPO＆INPIT

14. 发明专利

JP2012089190A Method for preventing position shift of uncured resist coated disk from lower surface-side stamper device 审中-公开
标题翻译：防止来自下表面冲击器装置的耐腐蚀涂层的位置移位的方法
公开(公告)号：JP2012089190A
公开(公告)日：2012-05-10
申请号：JP2010233726
申请日：2010-10-18
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIZAWA NORITAKE , MORI KYOICHI , SHIRAISHI TOSHIMITSU , YAMASHITA HISAAKI
IPC分类号： G11B5/855 , B29C59/02 , G11B5/84 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a method for preventing an uncured resist coated disk, positioned and placed on a lower stamper of a lower surface-side stamper device, from shifting in position when the lower surface-side stamper device moves, in a double-sided imprint device.SOLUTION: The method includes the steps of: (a) positioning and placing the disk having both surfaces coated with uncured resist on an upper surface of a lower stamper mounted on the lower surface-side stamper device and having a fine transfer pattern; (b) partly irradiating at least a part, not corresponding to the fine transfer pattern of the stamper, of the resist present at a boundary surface between the lower stamper and the disk lower surface side with UV light; and (c) curing the resist at the UV-light irradiated part to temporarily and partly fix the disk to the upper surface of the lower stamper.
摘要翻译：要解决的问题：为了提供一种防止未表面侧的压模装置移动的位置并放置在下表面侧压模装置的下压模上的未固化的抗蚀剂涂布盘的方法，在双面打印设备中。解决方案：该方法包括以下步骤：（a）将具有涂有未固化抗蚀剂的两个表面的盘定位和放置在安装在下表面侧压模装置上的下压模的上表面上，并具有精细的转印图案 ; （b）使用紫外光部分照射存在于下压模和盘下表面侧之间的边界面处的抗蚀剂的至少一部分，不对应于压模的细转印图案; 和（c）在紫外线照射部分固化抗蚀剂，以将该盘暂时地和部分地固定在下压模的上表面上。版权所有（C）2012，JPO＆INPIT

15. 发明专利

JP2010280065A Fine structure transfer device 有权
标题翻译：精细结构传输设备
公开(公告)号：JP2010280065A
公开(公告)日：2010-12-16
申请号：JP2009132804
申请日：2009-06-02
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MORI KYOICHI , SHIZAWA NORITAKE , YAMASHITA HISAAKI , TSUSHIMA TAKESHI , SHIRAISHI TOSHIMITSU
IPC分类号： B29C59/02 , H01L21/027
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： PROBLEM TO BE SOLVED: To provide a fine structure transfer device which does not use a press mechanism, causes no generation of a transfer defect due to an air bubble, and facilitates the separation of a stamper. SOLUTION: In the fine structure transfer device, a first strut 9 and a second strut are erected on the upper surface of a base plate 3; one end of a long stamper 7 is fixed to the upper end of the first strut; another end of the long stamper is vertically ascendably descendably supported by an elevator arranged on the second strut; a stage for placing a transfer item is arranged at a position corresponding to the position where a fine pattern on the downward surface side of the long stamper exists that is on the upper surface of the base plate between the first strut and the second strut; and a pressing device reciprocatively moving in the lengthwise direction of the long stamper is arranged on the upper surface side of the long stamper. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供不使用压力机构的精细结构转移装置，不会由于气泡而产生转印缺陷，并且有利于压模的分离。解决方案：在精细结构转移装置中，第一支柱9和第二支柱竖立在基板3的上表面上; 长压模7的一端固定在第一支柱的上端; 长压模的另一端由布置在第二支柱上的电梯竖直上升地下降地支撑; 在第一支柱和第二支柱之间的位于上述基板的上表面的长压模的下表面侧的精细图案的位置对应的位置，并且在长压模的上表面侧配置有在长压模的长度方向上往复移动的按压装置。版权所有（C）2011，JPO＆INPIT

16. 发明专利

JP2007105624A Apparatus for washing disk 有权
标题翻译：洗衣盘装置
公开(公告)号：JP2007105624A
公开(公告)日：2007-04-26
申请号：JP2005298774
申请日：2005-10-13
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHIZAWA NORITAKE , SHIRAISHI TOSHIMITSU
IPC分类号： B08B1/04 , G11B5/84 , G11B7/26 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for washing disks, in which a plurality of disks can be scrubbed simultaneously by a batch operation system, the throughput of which can be improved when disks are scrubbed and which can be miniaturized suitably. SOLUTION: The apparatus for washing disks is provided with: a rotary brush unit which has a rotary shaft, to which a plurality of rotary brushes having a predetermined length and a cylindrical or disk-like shape are fit, in which each of disks is inserted into the space between the brushing surfaces of the adjacent rotary brushes and held and which is used for rotating rotary brushes; and a disk revolution preventing stopper for preventing each of held disks from being revolved around the rotary shaft by the rotation of rotary brushes and allowing each of held disks to rotate its own axis. The plurality of disks are chucked to be rotated by using the side of the rotary shaft as one point of a three-point chuck and arranging other two points of the three-point chuck in the positions opposed to the rotary shaft. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于清洗盘的装置，其中可以通过批量操作系统同时擦洗多个盘，当盘被擦洗并且可适当地小型化时，可以提高其吞吐量。解决方案：用于清洗盘的装置设置有：旋转刷单元，其具有旋转轴，多个旋转刷具有预定长度和圆柱形或盘状形状，其中每个盘被插入到相邻的旋转刷的刷洗表面之间的空间中并被保持并用于旋转刷子的旋转; 以及用于防止每个保持的盘通过旋转刷的旋转而围绕旋转轴旋转并允许每个保持的盘旋转自己的轴的盘旋转防止止动件。通过使用旋转轴的侧面将多个盘夹持在三点卡盘的一个点上并将三点卡盘的其他两个点布置在与旋转轴相对的位置。版权所有（C）2007，JPO＆INPIT

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