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    • 11. 发明专利
    • ION BEAM MEASURING APPARATUS
    • JPS61273839A
    • 1986-12-04
    • JP11411785
    • 1985-05-29
    • HITACHI LTD
    • FUKUDA SHINJIMIURA YOSHIO
    • G01T1/29H01J37/08H01J37/317
    • PURPOSE:To enable measurement while connecting the ion source and the measuring apparatus by reciprocally arranging a drive shaft fixed with a measuring chip at the tip through bellows in measuring container which can be coupled air-tightly with the ion source. CONSTITUTION:Measuring container 1 to be coupled air-tightly with an ion source through a flange 1 is provided. A chip 6 for measuring various characteristics of ion beam fixed to the base 7, a hollow drive shaft 13 reciprocal in axial direction through an external motor, a bellows 15 for holding the air-tightness of the container 1 while following the motion of the drive shaft 13, etc. are contained in said container 1. The lead 8 from the measuring chip 6 is taken out through an air-tight terminal provided on a board 9 while penetrating the interior of shaft 13 thus to constitute an ion beam measuring apparatus. Consequently, it can be measured continuously in short time by varying the distance between the measuring chip and the ion source while coupling to the ion source.