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    • 12. 发明专利
    • PRODUCTION OF THIN FILM MAGNETIC HEAD
    • JPS628321A
    • 1987-01-16
    • JP14570285
    • 1985-07-04
    • FUJI PHOTO FILM CO LTD
    • YOSHIDA SATOSHIKAMIOKA SHIGERUKATO YOSHIAKI
    • G11B5/31
    • PURPOSE:To improve recording efficiency without allowing a decrease of film thickness in the rear gap part after the formation of an upper magnetic layer by forming a photomask in the rear gap part into an ellitical shape or the shape having rounded angles. CONSTITUTION:The part of the photomask 20 corresponding to a juncture B is formed to the elliptical shape or as a through-hole 21 having the rounded angles, then the photoresist 6 is patterned to the ellitical shape or the shape having the rounded angles by the straight transfer of the shape of the photomask 20. The photoresist is thermally hence uniformly softened in the juncture B after the heat treatment and is not steepened only at the angles of the photoresist side wall in the angle parts. The angle of the photoresist side wall in this stage is approximately 40 deg.. Insulating layers 3, 5 are provided to the shape having the gentle taper of about 40 deg. taper angle theta3 in the front cap part and taper angle theta4 in the juncture if the photoresist 6 formed in such a manner is subjected to ion milling at 40 deg. incident angle of the ion beam by using, for example, Ar ions.
    • 13. 发明专利
    • FLATTENING METHOD
    • JPS61227183A
    • 1986-10-09
    • JP6621185
    • 1985-03-29
    • FUJI PHOTO FILM CO LTD
    • YOSHIDA SATOSHIKAMIOKA SHIGERUKATO YOSHIAKI
    • G11B5/31C23F1/00C23F4/00
    • PURPOSE:To flatten the surface of an SiO2 insulator in the stage of producing a thin film magnetic head by forming a photoresist on the surface of an SiO2 insulating film on a coil conductor layer on an insulator and subjecting the same to ion milling at a specific ion incident angle. CONSTITUTION:A lower magnetic layer 3 and the 1st insulating layer 2 are successively laminated on a substrate 4 and a multi-layer coil conductor layer 1 is provided thereon. The 2nd insulating layer 5 consisting of SiO2 is formed thereon by sputtering, etc. The SiO2 insulating layer 5 constitutes the surface having the ruggedness of the coil conductor layer 1 as it is and therefore the upper magnetic material 7 itself has the ruggedness in the stage of forming the upper magnetic layer 7 consisting of 'Sendust(R)', etc., thereon. The magnetic permeability of the magnetic material is thereby decreased. The photoresist 6 is thickly coated on such rugged SiO2 insulating layer 5 and is heat-treated at 130 deg.C and thereafter the resist is subjected to ion etching in such a manner that the ion incident angle is 30-50 deg., then 75 deg. to flatten the surface of the layer 5. The generation of the raggedness to the above-mentioned magnetic material 7 is thus prevented and the magnetic head having excellent magnetic characteristic is produced.
    • 14. 发明专利
    • Thin film magnetic head and its production
    • 薄膜磁头及其生产
    • JPS6187213A
    • 1986-05-02
    • JP20906784
    • 1984-10-05
    • Fuji Photo Film Co Ltd
    • KATO YOSHIAKIKAMIOKA SHIGERUYOSHIDA SATOSHI
    • G11B5/17G11B5/31
    • G11B5/31
    • PURPOSE: To make gentle a step and to form a thin film magnetic head having good magnetic efficiency by forming the sectional shape of coil conductors into an approximately trapezoidal shape having the skirt part expanding out ward at the bottom end on both sides.
      CONSTITUTION: The sectional shape of the coil conductors of the thin film magnetic head for magnetic recording and reproduction formed by laminating a lower magnetic layer 2, the 1st insulating layer 3, the coil conductors 4, the 2nd insulating layer 5 and an upper magnetic layer 6 in this order is made into the approximately trapezoidal shape having the skirt part expanding out ward at the size meeting the incident angle of an ion beam and the coating thickness of a photoresist at the bottom ends on both sides. The 2nd insulating layer 5 consisting of SiO
      2 , Al
      2 O
      3 or BeO is formed by vapor deposition or sputtering after the formation of the conductors 4 and since the step by the conductors 4 is made gentle, the generation of a V-groove on the surface of the layer 5 is obviated. The layer 5 is thus formed to a substantially flat sur face.
      COPYRIGHT: (C)1986,JPO&Japio
    • 目的:通过将线圈导体的截面形状形成为具有在两侧的底端处的裙部伸出的大致梯形的形状来形成具有良好磁效率的薄膜磁头。 构成:通过层叠下磁性层2,第一绝缘层3,线圈导体4,第二绝缘层5和上磁性层形成的用于磁记录和再现的薄膜磁头的线圈导体的截面形状 6以这种顺序被制成大致梯形形状,其具有以满足离子束的入射角的尺寸和两侧底端的光致抗蚀剂的涂层厚度的外围部分向外扩张的形状。 在形成导体4之后,通过气相沉积或溅射形成由SiO 2,Al 2 O 3或BeO组成的第二绝缘层5,并且由于导体4的步骤变得平缓,所以在V形槽的表面上产生V形槽 第5层被消除。 因此,层5形成为基本上平坦的表面。
    • 18. 发明专利
    • PHOTOGRAPHIC FILM
    • JPH0659385A
    • 1994-03-04
    • JP21286092
    • 1992-08-10
    • FUJI PHOTO FILM CO LTD
    • KATO YOSHIAKI
    • G03B17/24G03C1/00G03C1/765
    • PURPOSE:To prevent the flawing of the surface of a magnetic head by the front end of the film. CONSTITUTION:A magnetic layer is formed on the counter photosensitive surface 28 of the photographic film 10 and various kinds of information are recorded on the magnetic layer by the magnetic head. The already recorded information s reproduced. The slope at which the front end of the film is thinner from the magnetic layer surface is formed on the front end face 20 of the film by sharpening the front end 34 of the film at the front end 32 of the film. The front end face 20 of the film is opposed to the surface of the magnetic head 22 at the time the front end 32 of the film passes the magnetic head 22. Then, the front end 32 of the film is curved toward the magnetic head 22 by the permanent set of curling, etc., at the time the front end 32 of the film drawn out of a cartridge advances to the surface of the magnetic head 22. The excessive rubbing of the surface of the magnetic head 22 by the front end face 20 of the film is thus obviated even if the front end face 20 of the film slides on the surface of the magnetic head 22 in contact therewith.