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20. 发明专利

JPS61114139A Differential pressure sensor 失效
标题翻译：差压传感器
公开(公告)号：JPS61114139A
公开(公告)日：1986-05-31
申请号：JP23582484
申请日：1984-11-08
申请人： Yokogawa Hokushin Electric Corp
发明人： IKEDA KYOICHI , ISOZAKI KATSUMI , WATANABE TETSUYA
IPC分类号： G01L9/00 , G01L13/06
CPC分类号： G01L9/0019
摘要： PURPOSE:To improve sensitivity by joining the 2nd diaphragm which has the same material with the 1st diaphragm to the side of the 1st diaphragm where a hole is formed. CONSTITUTION:The part of the n diffused layer 2b in the 1st hole 3 is etched in a rod shape and a P layer as a substrate is under-etched to form the 2nd hole 5, thereby forming an oscillation beam 4 of the n layer. Then, a P layer 6 is formed by diffusion or epitaxial growth at the part which is most sensitive to the oscillation of the oscillation beam 4. This P layer is led out through an unshown lead wire, etc., while insulated from the P layer to form p-n junction on the oscillation beam 4 as the n diffused layer. The 2nd diaphragm and the 2nd diaphragm are anode-joined together under a vacuum to produce a vacuum in the 1st hole and the 2nd hole. Thus, differential pressure is dealt with and the sensitivity is improved.
摘要翻译：目的：通过将具有与第一隔膜相同材料的第二隔膜连接到形成孔的第一隔膜的一侧来提高灵敏度。构成：第一孔3中的n +扩散层2b的部分被蚀刻成棒状，并且作为基底的P层被低蚀刻以形成第二孔5，从而形成第二孔5的振荡波束4 n +层。然后，在对振荡光束4的振荡最敏感的部分，通过扩散或外延生长形成P + 6层。该P +层通过未示出的引线等引出，同时与P层绝缘，以在振荡波束4上形成作为n +扩散层的pn结。第二隔膜和第二隔膜在真空下阳极接合在一起，在第一孔和第二孔中产生真空。因此，处理差压并提高灵敏度。

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