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    • 12. 发明专利
    • FORMATION OF CERAMIC COATING FILM ON INNER SURFACE OF TUBULAR MATERIAL
    • JPH01225775A
    • 1989-09-08
    • JP5079088
    • 1988-03-04
    • TOYO STAUFFER CHEM CO
    • YASUDA KAZUTO
    • C23C16/50
    • PURPOSE:To form a ceramic film generated by the decomposition of a raw gas on the inner surface of a tubular material at low temp. by introducing the raw gas into the material, and supplying a high-frequency power. CONSTITUTION:The gaseous mixture of TiCl4 and NH3, TiCl4 and CH4, AlCl3 and BCl3, SiH4 and N2O, SiH4 and NH3, (CH3)3Al and N2O, etc., is introduced into the tubular material 1-5 from a raw gas feeder 1-4 with H2, Ar, N2, etc., as the carrier gas. A high-frequency power is simultaneously supplied from a high-frequency generator 1-1 through a waveguide 1-8 to produce plasma in the material, hence the raw gas is decomposed, and the thin film of the TiN, TiC, AlB, SiO2, Si3N4, Al2O3, etc., as the ceramic material is formed on the inner surface of the tubular material 1-5. In this case, when the tubular material 1-5 is made of a material transmitting a high-frequency power such as quartz, the outside of the material 1-5 is coated with a metal to reflect the high-frequency power. In addition, a magnetic field generator is provided on the outside or inside of the material 1-5 to control the plasma state, and the quality and thickness of the ceramic film can be controlled.