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    • 123. 发明专利
    • Piezoelectric actuator manufacturing method and liquid ejection head
    • 压电致动器制造方法和液体喷射头
    • JP2009239208A
    • 2009-10-15
    • JP2008086713
    • 2008-03-28
    • Fujifilm Corp富士フイルム株式会社
    • MITA TAKESHI
    • H01L41/09B41J2/045B41J2/055B41J2/135B41J2/14B41J2/145B41J2/16H01L41/18H01L41/22H01L41/29H01L41/39
    • B41J2/161B41J2/14233B41J2/1628B41J2/1629B41J2/1642B41J2/1643B41J2/1646B41J2002/14266B41J2002/14411B41J2202/21H01L41/0973H01L41/319Y10T29/42Y10T29/49155
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator that has a piezoelectric body film provided between two layers of electrode films, and that is capable of maintaining reliability of the electric actuator and of simultaneously reducing electric resistance of a wiring portion for supplying current to an electrode film, and to provide a liquid ejection head. SOLUTION: The piezoelectric actuator 12 has a structure (upper address structure) in which a lower electrode film 110 serves as a common electrode and an upper electrode film 121 serves as an individual electrode. The upper electrode film 121 is connected to an upper wiring 122. The upper wiring 122 is connected to an external wiring (e.g., a flexible cable). In contrast, the lower electrode film 110 corresponding to each pressure chamber 130 is connected to lower wirings 124 formed on the upper surface of the piezoelectric body film 112. The lower wirings 124 are mutually electrically connected and grounded. The upper wiring 122 and lower wirings 124 are formed by electrolytic plating to have a thickness of, for example, 2 to 3 μm, greater than the upper electrode film 121 and lower electrode film 110. COPYRIGHT: (C)2010,JPO&INPIT
    • 解决的问题:提供一种制造压电致动器的方法,该压电致动器具有设置在两层电极膜之间的压电体膜,并且能够保持电致动器的可靠性并同时降低电致动器的电阻 用于向电极膜提供电流的布线部分,以及提供液体喷射头。 解决方案:压电致动器12具有下电极膜110用作公共电极并且上电极膜121用作单独电极的结构(上地址结构)。 上电极膜121连接到上布线122.上布线122连接到外部布线(例如,柔性电缆)。 相反,对应于每个压力室130的下电极膜110连接到形成在压电体膜112的上表面上的下布线124.下布线124相互电连接并接地。 上布线122和下布线124通过电解镀形成比例如上电极膜121和下电极膜110的厚度例如2至3μm。(C)2010, JPO和INPIT
    • 128. 发明专利
    • Nozzle plate and its manufacturing method
    • 喷嘴板及其制造方法
    • JP2008307694A
    • 2008-12-25
    • JP2007154875
    • 2007-06-12
    • Brother Ind Ltdブラザー工業株式会社
    • NAKAMOTO HIKARI
    • B41J2/135
    • B41J2/1606B41J2/1433B41J2/162B41J2/1625B41J2/1643
    • PROBLEM TO BE SOLVED: To prevent discharge of a droplet from being hindered due to adhesion of foreign matter to a water-repellent film or damage of the water-repellent film in wiping operation. SOLUTION: The nozzle plate P has a substrate 1 where a nozzle hole 2 is formed, a nickel film 6 formed on a discharge surface 1a where a discharge opening 2c is formed on the substrate 1, and the water-repellent film 3 formed by electrolytic plating on the nickel film 6. By adjusting current density in the electrolytic plating in a water-repellent film forming stage, a through-hole 3a constituted of a straight part 3c succeeding to the nozzle hole 2 and having the same diameter as the discharge opening 2c, and an enlarged-diameter part 3b located on an opposite side to the nozzle hole 2 while putting the straight part 3c in between and having a diameter getting larger as it is separated from the straight part 3c, is formed on the water-repellent film 3. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了防止由于异物粘附到防水膜上而使液滴的排出受到阻碍,或者在擦拭操作中损坏了防水膜。 解决方案:喷嘴板P具有形成喷嘴孔2的基板1,形成在基板1上形成有排出口2c的排出面1a上的镍膜6和防水膜3 通过在镍膜6上进行电解电镀而形成。通过在防水膜形成阶段中调整电解电镀中的电流密度,形成由喷嘴孔2之后的直线部分3c构成的直通孔3a, 排出口2c和位于喷嘴孔2的相反侧的扩大直径部分3b,同时将直线部分3c放置在其间并且具有与直线部分3c分离的直径变大的直径部分3b 防水膜3.版权所有(C)2009,JPO&INPIT