会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 96. 发明专利
    • Power source device for sputtering apparatus and power source device
    • 电源装置和电源装置的电源装置
    • JP2003073826A
    • 2003-03-12
    • JP2001256243
    • 2001-08-27
    • Shibaura Mechatronics Corp芝浦メカトロニクス株式会社
    • IMAGAWA KAZUHIKOKURIYAMA NOBORU
    • C23C14/34G05F1/00G05F1/02
    • PROBLEM TO BE SOLVED: To provide a power supply device for a sputtering apparatus, which can connect several power sources not in a master-slave manner but in parallel.
      SOLUTION: The power source device for the sputtering apparatus, having a negative output terminal and a positive output terminal, comprises arc discharge detecting means r1 and r2 for detecting an arc discharge, direct voltage generating parts 22, 23, and 34, diodes D1 and D2 which are connected between the direct voltage generating part and the negative output terminal and are connected in a direction of blocking current from the direct voltage generating part to the negative output terminal, and arc intercepting means Q1 and C1 which are triggered by the arc discharge detecting means.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提供一种用于溅射装置的电源装置,其可以以主从方式但并联连接多个电源。 解决方案:具有负输出端和正输出端的用于溅射装置的电源装置包括用于检测电弧放电的电弧放电检测装置r1和r2,直流电压产生部分22,23和34,二极管D1和 D2,其连接在直流电压产生部分和负输出端子之间,并且在阻抗电流方向从直流电压产生部分连接到负极输出端子;以及电弧截止装置Q1和C1,由电弧放电触发 检测装置。
    • 100. 发明专利
    • ELECTRIC CURRENT CONTROLLING DEVICE FOR ARC FURNACE
    • JPH08273827A
    • 1996-10-18
    • JP7291695
    • 1995-03-30
    • FUJI ELECTRIC CO LTD
    • NAKAI KOJIKASUGA TOSHIAKI
    • H05B7/148F27B3/08F27B3/28G05F1/02G05F1/10
    • PURPOSE: To control electric current with proper responds independently of arc resistance which fluctuates based on the arc generating situation by providing a specified function regarding an electric current controlling device for arc furnace having a prescribed system to melt scraps by generating arc discharge. CONSTITUTION: An electric current controlling device for an arc furnace is one composed of an arc furnace 1, a d.c. reactor 3, an electric power transformer 4, an ignition angle controlling apparatus 5 to control the ignition angle of the electric power transformer 4, a current detector 6, and a current adjusting apparatus 7 to give a set instruction to the ignition angle controlling apparatus 5 based on an electric current signal from the current detector 6 as a feedback signal and the current controlling device is to melt scraps 11 by generating arc discharge. In the device, a voltage detector 8 and a computer 9 to carry out multiplication and division are installed, the current adjusting apparatus 7 is provided with an integration time changeable means for integration operation, and thus the current controlling device is provided with a function to compute a resistance value by the computer 9 based on the electric signals from the voltage detector 8 and the electric signals from the current detector 6 and to variably set the integration time by the integration time changeable means based on the value inversely proportional to the resistance value.