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    • 95. 发明专利
    • Measuring apparatus and method, and program
    • JP5311143B2
    • 2013-10-09
    • JP2009548956
    • 2009-01-09
    • 株式会社ニコン
    • 勇雄 木村淳 竹内
    • G01B11/02
    • G01B11/02G01B21/02G02B21/365G06T7/60G06T2207/10056
    • The present invention relates to a measuring apparatus, method and program with which a distance between two points that are not within one photographing range can be easily measured. In an image in which a start point is set, a specified position address calculation circuit 43 stores the coordinates of the start point, and a representative point setting circuit 44 sets a representative point, and stores the coordinates thereof, and characteristic quantity of the neighborhood image. Hereafter in each image until an image in which an end point is set, a representative point searching circuit 45 searches a representative point of the most recent image and stores the coordinates thereof, and the representative point setting circuit 44 sets a new representative point, and stores the coordinates thereof and the characteristic quantity of the neighborhood image. The specified position address calculation circuit 43 stores the coordinates of the end point in the image in which the end point is set. A vector calculation unit 61 calculates a vector between the respective two points connecting the start point, representative points and the end point in the sequence of setting, and a distance calculation unit calculates the distance between the start point and the end point based on the magnitude of the vector from the start point to the end point. The present invention can be applied to, for example, a measuring system using a microscope.
    • 96. 发明专利
    • Presumably defective portion determination apparatus, presumably defective portion determination method, fabrication method for semiconductor device and program
    • 预处理部分确定装置,预处理部分确定方法,半导体器件和程序的制造方法
    • JP2013157472A
    • 2013-08-15
    • JP2012017041
    • 2012-01-30
    • Sony Corpソニー株式会社
    • DEWA KYOKOHIRATA TATSUJIROSHIBUKI SHUNICHI
    • H01L21/66H01L21/304
    • G01B21/02H01L22/10H01L22/12H01L2924/0002H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a presumably defective portion determination apparatus which can determine a presumably defective portion in consideration of not only the value of a level difference but the shape of the level difference.SOLUTION: A level difference included in level difference data which indicates a level difference distribution on the surface of a semiconductor device is divided into two or more unit level differences in the depth direction. For each of the unit level differences obtained by the division, a relationship between the height of a contour line at a level difference position of an upper face and the area of an opening surrounded by the contour line is determined to determine the presence or absence of a presumably defective portion. For example, for each of the unit level differences obtained by the division of the level difference, the height from the deepest portion of the level difference of a contour line at the level difference position of the upper face and the area of an opening surrounded by the contour line are applied to a conditional expression, and the presence or absence of a presumably defective portion is determined based on whether or not the conditional expression is satisfied.
    • 要解决的问题:提供一种可能的故障部分确定装置,其可以不仅考虑电平差的值而且考虑电平差的形状来确定可能的缺陷部分。解决方案:包括在电平差数据中的电平差 表示半导体器件的表面上的电平差分布被划分为深度方向上的两个或更多个单位电平差。 对于通过分割获得的每个单位水平差,确定上面的水平差位置处的轮廓线的高度与由轮廓线包围的开口的面积之间的关系,以确定是否存在 大概是缺陷部分。 例如,对于通过分割水平差获得的每个单位水平差,从上表面的水平差位置处的轮廓线的水平差的最深部分的高度和由 将轮廓线应用于条件表达式,并且基于条件表达式是否被满足来确定是否存在可能有缺陷的部分。