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1. 发明专利

JP2012088111A Threshold photoelectron spectroscopic apparatus and threshold photoelectron spectroscopic method 审中-公开
标题翻译：光电子光谱仪和阈值光电子光谱法
公开(公告)号：JP2012088111A
公开(公告)日：2012-05-10
申请号：JP2010233678
申请日：2010-10-18
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： OBA AKIRA , MOCHIZUKI TAKAHIRO , SATOZONO HIROSHI
IPC分类号： G01N23/227
摘要： PROBLEM TO BE SOLVED: To provide an apparatus and a method capable of efficiently performing threshold photoelectron spectroscopy.SOLUTION: A threshold photoelectron spectroscopic apparatus 1 includes a first light source 10, a second light source 20, an irradiating optical system 30, a vacuum vessel 40, a molecular beam generation part 50, an imaging part 60, and a detection part 70. On a preparation stage, the first pulse light output timing of the first light source relative to the molecular beam generation timing of the molecular generation part is set to respective values to perform molecular beam generation by the molecular beam generation part, first pulse light output by the first light source and fluorescent imaging by the imaging part. On a succeeding measurement stage, the second pulse light output timing of the second light source relative to the molecular beam generation timing of the molecular beam generation part is set and an irradiation position of second pulse light to a molecular beam is set so as to be set to timing and an irradiation position determined based on a fluorescent image obtained by the fluorescent imaging of the imaging part on the preparation stage.
摘要翻译：要解决的问题：提供能够有效执行阈值光电子能谱的装置和方法。
解决方案：阈值光电子分光装置1包括第一光源10，第二光源20，照射光学系统30，真空容器40，分子束产生部分50，成像部分60和检测在准备阶段，将第一光源相对于分子生成部分的分子束产生定时的第一脉冲光输出定时设定为各自的值，以通过分子束产生部分进行分子束产生，第一脉冲由第一光源输出的光和由成像部进行的荧光成像。在接下来的测量阶段，设置第二光源相对于分子束产生部分的分子束产生定时的第二脉冲光输出定时，并将第二脉冲光的照射位置设定为分子束设定为基于通过在准备台上的成像部件的荧光成像获得的荧光图像确定的定时和照射位置。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2013170880A X-ray analyzer 审中-公开
标题翻译： X射线分析仪
公开(公告)号：JP2013170880A
公开(公告)日：2013-09-02
申请号：JP2012034030
申请日：2012-02-20
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： NAKANO TOMOYASU , OBA AKIRA , ONODA SHINOBU , OSUGA SHINJI
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of performing high-efficiency X-ray analysis.SOLUTION: An X-ray analyzer 1 comprises an X-ray source 10, a slit 20, a condenser 30, a holder 40, a detector 50, a scanner 60, a scintillator 70, an imager 80 and a controller 90 and analyzes contained components of a sample S held by the holder 40. The condenser 30 emits from an X-ray emitting terminal an X-ray outputted from the X-ray source 10 and made incident through an opening of the slit 20 to an X-ray incident terminal and converges the X-ray into linear shape that is long in an x direction and short in a y direction. In the case where the sample S is linear, the holder 40 holds the sample S in such a manner that a length direction (x direction) in the case where the X-ray emitted from the X-ray emitting terminal of the condenser 30 is converged into linear shape, is matched with a length direction of the sample S.
摘要翻译：要解决的问题：提供能够进行高效X射线分析的X射线分析装置。解决方案：X射线分析装置1包括X射线源10，狭缝20，冷凝器30，保持器40 ，检测器50，扫描器60，闪烁体70，成像器80和控制器90，并且分析由保持器40保持的样本S的包含分量。冷凝器30从X射线发射端发射X射线从X射线源10通过狭缝20的开口入射到X射线入射端子，并将X射线收敛成x方向长且在ay方向短的线状。在样品S是线性的情况下，保持器40保持样品S，使得从冷凝器30的X射线发射端射出的X射线的长度方向（x方向）为收敛成线状，与样品S的长度方向一致。

3. 发明专利

JP2012242165A X-ray device 有权
标题翻译： X射线装置
公开(公告)号：JP2012242165A
公开(公告)日：2012-12-10
申请号：JP2011110387
申请日：2011-05-17
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： OBA AKIRA , OSUGA SHINJI , NAKANO TOMOYASU , ONODA SHINOBU
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide an x-ray device capable of generating stable pulse x-rays by a simple configuration.SOLUTION: An x-ray device 1 includes an x-ray source 10, an irradiation part 20, an imaging part 30, a detection part 40, a vacuum container 50, and a control part 60. The x-ray source 10 continuously outputs x-rays. The irradiation part 20 has an input end 21 and an output end 22, and when an x-ray reaches the input end 21 along a certain specific azimuth, the x-ray can be outputted from the output terminal 22 to a sample 90. The imaging part 30 forms an image of a secondary x-ray generated from the sample 90 on a light receiving surface of the detection part 40. The detection part 40 inputs the secondary x-ray (fluorescent x-ray or scattered x-ray) generated from the sample 90 when the x-ray outputted from the output end 22 of the irradiation part 20 is applied to the sample 90, generates and accumulates an electric charge in accordance with the input of the secondary x-ray and reads out the accumulated electric charge.
摘要翻译：要解决的问题：提供能够通过简单的构造产生稳定的脉冲X射线的X射线装置。解决方案：X射线装置1包括x射线源10，照射部20，成像部30，检测部40，真空容器50和控制部60.X射线源 10个连续输出x射线。照射部20具有输入端21和输出端22，并且当X射线沿着特定的方位到达输入端21时，x射线可以从输出端22输出到样本90。成像部分30在检测部分40的光接收表面上形成从样本90产生的次级x射线的图像。检测部分40输入产生的次级x射线（荧光X射线或散射的x射线）当从照射部20的输出端22输出的x射线被施加到样本90时，从样本90产生并根据次级X射线的输入累积电荷，并且读出积累的电收费。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2007033207A Fluorescence x-ray three-dimensional analyzer 有权
标题翻译：荧光X射线三维分析仪
公开(公告)号：JP2007033207A
公开(公告)日：2007-02-08
申请号：JP2005216204
申请日：2005-07-26
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： NAKANO TOMOYASU , OBA AKIRA , ONODA SHINOBU
IPC分类号： G01N23/223 , G21K1/06
摘要： PROBLEM TO BE SOLVED: To provide a fluorescence X-ray three-dimensional analyzer capable of highly-accurate fluorescence X-ray three-dimensional analysis with high three-dimensional position resolution.
SOLUTION: This analyzer is equipped with an X-ray irradiation condensing means having a moving stage for placing a sample thereon, an X-ray source, and an irradiation side condensing optical part for condensing X-rays irradiated from the X-ray source onto a condensing point inside the sample; a fluorescence X-ray detection means having a detection side condensing optical part for condensing fluorescence X-rays generated from the sample placed on the moving stage, and a detector for receiving and detecting the fluorescence X-rays condensed by the detection side condensing optical part; a driving means for moving the moving stage three-dimensionally; and an adjusting means for allowing a focal point of the detection side condensing optical part to agree inside the sample with the condensing point of the irradiation side condensing optical part.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有高三维位置分辨率的高精度荧光X射线三维分析的荧光X射线三维分析仪。解决方案：该分析仪配备有具有用于放置样品的移动台的X射线照射聚光装置，X射线源和用于聚集从X射线照射的X射线的照射侧聚光光学部件，射线源到样品内的凝结点; 荧光X射线检测装置，具有用于聚集由置于移动台上的样品产生的荧光X射线的检测侧聚光光学部件和用于接收和检测被检测侧聚光光学部件冷凝的荧光X射线的检测器 ; 用于三维移动移动台的驱动装置; 以及用于允许检测侧聚光光学部件的焦点在样品内部与照射侧聚光光学部件的聚光点一致的调节装置。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2003279693A X-ray image magnifying device 有权
标题翻译： X射线图像放大器
公开(公告)号：JP2003279693A
公开(公告)日：2003-10-02
申请号：JP2002080947
申请日：2002-03-22
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： OBA AKIRA , SUGIYAMA MASARU , ONODA SHINOBU
IPC分类号： G01N23/04 , G21K1/06 , G21K7/00
CPC分类号： G21K1/06 , G01N23/04 , G21K7/00
摘要： PROBLEM TO BE SOLVED: To provide an X-ray image magnifying device capable of changing an imaging magnification by using an oblique incidence mirror having no wavelength selectivity. SOLUTION: This X-ray image magnifying device is characterized by being provided with an illumination optical system 3 for irradiating the X-ray emitted from an X-ray source to a sample 4, an objective lens 5 configurated by an oblique incidence mirror composed of a rotary hyperboloidal face and a rotary ellipsoidal face for magnifying and focusing the X-ray penetrating through the sample 4 onto a predetermined position, an X-ray image detecting means 6 for detecting the focused X-ray image, and a focusing magnification adjusting means for adjusting the focusing magnification of the X-ray image by axially moving at least one of the X-ray image detecting means 6, the sample 4 and the illumination optical system 3. Thereby, in the device using the oblique incidence mirror as the objective lens, the imaging magnification can be changed without exchanging the oblique incidence mirror in the X-ray image magnifying device. COPYRIGHT: (C)2004,JPO
摘要翻译：解决的问题：提供能够通过使用不具有波长选择性的倾斜入射镜来改变成像倍率的X射线图像放大装置。解决方案：该X射线图像放大装置的特征在于设置有用于将从X射线源发射的X射线照射到样品4的照明光学系统3，由斜入射构成的物镜5 用于将穿透样品4的X射线放大并聚焦到预定位置的旋转双曲面和旋转椭圆面构成的反射镜，用于检测聚焦的X射线图像的X射线图像检测装置6和聚焦用于通过轴向移动X射线图像检测装置6，样本4和照明光学系统3中的至少一个来调节X射线图像的聚焦倍率的倍率调节装置。因此，在使用倾斜入射镜的装置作为物镜，可以在X射线图像放大装置中不更换倾斜入射镜来改变成像倍率。版权所有（C）2004，JPO

6. 发明专利

JP2003057400A X-ray image magnifying device 审中-公开
标题翻译： X射线图像放大器
公开(公告)号：JP2003057400A
公开(公告)日：2003-02-26
申请号：JP2001245579
申请日：2001-08-13
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： OBA AKIRA , SUGIYAMA MASARU , ONODA SHINOBU
IPC分类号： G01N23/04 , G02B21/00 , G21K1/06 , G21K5/00 , G21K5/02 , G21K7/00
摘要： PROBLEM TO BE SOLVED: To provide an X-ray image magnifying device capable of making an efficient survey of the observation part of a sample and observing the sample with high magnification.
SOLUTION: This X-ray image magnifying device, wherein an X-ray image of the sample 5 is magnified by oblique incidence reflecting mirrors 7, 8 and detected by an X-ray detecting means 11, is provided with a magnification changing means for selectively intercepting the incident or reflected X-ray of the oblique incidence reflecting mirror 7 and the incident or reflected X-rays of the oblique incidence reflecting mirror 8 to change the magnification of the X-ray image detected by the X-ray detecting means 11. This constitution permits the efficient survey of the observation part of the sample based on a wide view by the reflected X-rays from the oblique incidence reflecting mirror 8, and the minute observation of the sample based on the image of high magnification by the reflected X-rays from the oblique incidence reflecting mirror 7.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供能够对样品的观察部分进行有效测量并以高倍率观察样品的X射线图像放大装置。解决方案：该X射线图像放大装置，其中样品5的X射线图像被倾斜入射反射镜7,8放大并由X射线检测装置11检测，设置有用于选择性地截取斜入射反射镜7的入射或反射X射线以及倾斜入射反射镜8的入射或反射X射线，以改变由X射线检测装置11检测的X射线图像的放大倍数。这种结构允许基于来自倾斜入射反射镜8的反射X射线的宽视角对样本的观察部分进行有效的测量，并且基于通过反射X的高倍率的图像的样本的微观观察从倾斜入射反射镜7射出。

7. 发明专利

JP2012073153A X-ray analyzer 有权
标题翻译： X射线分析仪
公开(公告)号：JP2012073153A
公开(公告)日：2012-04-12
申请号：JP2010218980
申请日：2010-09-29
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： NAKANO TOMOYASU , OBA AKIRA
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide an X-ray analyzer which enhances detection intensity and resolution of a fluorescent X-ray.SOLUTION: The X-ray analyzer includes an X-ray tube 3 for irradiating a sample S with an X-ray; a capillary tube assembly 4 including a plurality of capillary tubes 5 each for propagating, from its one end 5a to the other end 5b, the fluorescent X-ray emitted from the sample S due to the irradiation with the X-ray; and an X-ray detector 6 for detecting the fluorescent X-ray emitted from the other end 5b of the capillary tube 5. The capillary tube assembly 4 has one end face 4a formed by the assembly of the one ends 5a of the capillary tubes 5. The one end face 4a serves as a sample placing surface for arranging the sample S in a film state.
摘要翻译：要解决的问题：提供一种提高荧光X射线检测强度和分辨率的X射线分析仪。解决方案：X射线分析仪包括用于用X射线照射样品S的X射线管3; 毛细管组件4，其包括多个毛细管5，每个毛细管5用于从其一端5a到另一端5b传播由于X射线照射而从样品S发射的荧光X射线; 以及用于检测从毛细管5的另一端5b发射的荧光X射线的X射线检测器6.毛细管组件4具有通过毛细管5的一端5a的组装而形成的一个端面4a 一端面4a用作用于将样品S布置成膜状态的样品放置表面。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2009180598A Photoelectric spectroscopy 有权
标题翻译：光电光谱
公开(公告)号：JP2009180598A
公开(公告)日：2009-08-13
申请号：JP2008019426
申请日：2008-01-30
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： SATOZONO HIROSHI , OBA AKIRA , KAWAKAMI TOMONORI
IPC分类号： G01N23/227
摘要： PROBLEM TO BE SOLVED: To provide photoelectric spectroscopy capable of obtaining accurate spectra. SOLUTION: The photoelectric spectroscopy is constituted of the fine particle supporting process for supporting fine particles 9 of gold on a membrane sample 5 to be analyzed, the spectrum measuring process for measuring the photoelectric spectrum of the membrane sample 5 on which the fine particles 9 of gold are supported in the fine particle supporting process, and the spectrum correction process for correcting the photoelectric spectrum, which is obtained in the spectrum measuring process, on the basis of the shift quantity of the spectrum of the fine particles of gold. In the fine particle support process, the fine particles 9 of gold are mutually supported on the membrane sample 5 in an electrically insulated state. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够获得准确光谱的光电光谱。解决方案：光电光谱法由用于支持待分析的膜样品5上的金的细颗粒9的微粒支持工艺，用于测量其上细微的膜样品5的光电谱的光谱测量过程基于金的微粒的光谱的偏移量，在微粒子支撑工序中支撑金的粒子9，以及在光谱测定处理中得到的用于校正光电谱的光谱校正处理。在微粒子支持工序中，金的微粒9以电绝缘的状态相互支撑在膜试样5上。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2003075600A X-ray image expansion apparatus 审中-公开
标题翻译： X-RAY图像扩展装置
公开(公告)号：JP2003075600A
公开(公告)日：2003-03-12
申请号：JP2001270761
申请日：2001-09-06
申请人： Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
发明人： OBA AKIRA , SUGIYAMA MASARU , ONODA SHINOBU
IPC分类号： G01N23/04 , G02B5/08 , G02B17/00 , G21K1/06 , G21K7/00
摘要： PROBLEM TO BE SOLVED: To provide an X-ray image expansion apparatus allowing the efficient search of the observation site of a sample and the observation of the sample to be performed at a high magnification. SOLUTION: This X-ray image expansion apparatus for expanding the X-ray image of the sample 5 by oblique incident reflector mirrors 7 and 8 to perform a detection by an X-ray detecting means 11 is characterized in that it is provided with a branch means 10 for branching the reflected X-ray by the oblique incident reflector mirror 7 from the reflected X-ray by the oblique incident reflector mirror 8. According to such a structure, the effective search of the observation site of the sample based on an image with wide visual field by the reflected X-ray from the reflector mirror 8 and the minute observation of the sample based on an image of high magnification by the reflected X-ray from the reflector mirror 7 can be simultaneously performed.
摘要翻译：要解决的问题：提供一种X射线图像扩展装置，其能够有效地搜索样品的观察部位，并且以高倍率进行样品的观察。解决方案：用于通过倾斜入射反射镜7和8扩展样品5的X射线图像以执行X射线检测装置11的检测的该X射线图像扩展装置的特征在于，其设有分支用于通过倾斜入射反射镜8从反射X射线将倾斜入射反射镜7反射的X射线分支的装置10.根据这种结构，基于图像对样本的观察部位的有效搜索通过来自反射镜8的反射X射线具有宽视野，并且可以同时执行基于来自反射镜7的反射X射线的基于高倍率的图像的样本的微小观察。

10. 发明专利

JP2015090311A Ｘ線計測装置审中-公开
公开(公告)号：JP2015090311A
公开(公告)日：2015-05-11
申请号：JP2013229908
申请日：2013-11-06
申请人： HAMAMATSU PHOTONICS KK
发明人： OBA AKIRA , OSUGA SHINJI
IPC分类号： G01N23/04 , G01N23/223
摘要：【課題】軟X線のような低エネルギー領域のX線を用いる場合であっても、十分なX線の検出特性及び検出感度を得ることができるX線計測装置を提供する。【解決手段】X線計測装置1Aは、電子線E1を出射する電子線源11と、電子線源11から出射された電子線E1が照射され電子線励起によってX線L1を出射するターゲット12Aと、ターゲット12Aから出射されたX線L1が照射される試料17を支持する試料支持部14と、電子線源11、ターゲット12A及び試料支持部14を収容する真空筐体10とを備える。ターゲット12Aのターゲット面12aは、ターゲット12Aから出射されたX線L1と、電子線源11から放出された可視光V1とを分離するように配置されている。【選択図】図1

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