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1. 发明专利

JP2007110004A Chemical supply system 有权
标题翻译：化学供应系统
公开(公告)号：JP2007110004A
公开(公告)日：2007-04-26
申请号：JP2005301439
申请日：2005-10-17
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , TOYODA TETSUYA , ITO TOMOHIRO , MURAKUMO HIKARI , SAKAI ATSUYUKI
IPC分类号： H01L21/027 , B05C11/10
CPC分类号： F04B49/08
摘要： PROBLEM TO BE SOLVED: To always properly perform pressure feedback control even if a set value of a working pressure differs according to a change in a type of a chemical or the like, and as a result to accurately control the flow rate of the discharged chemical.
SOLUTION: A pump 11 has a pump chamber 13 and a working chamber 14 partitioned by a diaphragm 12 made of a flexible film, for sucking and discharging the chemical depending on a change in pressure in the working chamber 14. An electro-pneumatic regulator 32 supplies working air to the working chamber 14. In addition, this system is equipped with a plurality of pressure sensors 51 and 63 different in a pressure detection range as pressure detecting means for detecting the pressure of the working air. A controller 40 selectively employs either of detection results of the plurality of sensors 51 and 63 depending on a set pressure value of the working air which is specified each time, for performing the pressure feedback control.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：即使工作压力的设定值根据化学品的类型的变化等而不同，也可以始终适当地执行压力反馈控制，并且因此精确地控制流量排出的化学物质。解决方案：泵11具有由柔性膜制成的隔膜12隔开的泵室13和工作室14，用于根据工作室14内的压力变化来抽吸和排出化学品。气动调节器32将工作空气供给到工作室14.此外，该系统配备有多个压力检测范围不同的压力传感器51,63，作为用于检测工作空气的压力的压力检测单元。控制器40根据每次指定的工作空气的设定压力值选择性地使用多个传感器51和63的检测结果中的任一个，以执行压力反馈控制。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2007152208A Liquid supplying system 有权
标题翻译：液体供应系统
公开(公告)号：JP2007152208A
公开(公告)日：2007-06-21
申请号：JP2005349611
申请日：2005-12-02
申请人： Ckd Corp , シーケーディ株式会社
发明人： ITO TOMOHIRO , NABEI TATSUMI , TOMITA HIROSHI
IPC分类号： B05C11/10 , B05C11/00
摘要： PROBLEM TO BE SOLVED: To properly control a liquid pressure as desired without complicating configuration in a liquid supplying system capable of distributing/supplying a liquid to a plurality of use points.
SOLUTION: The system is provided with a supplying line 12 that allows a liquid to flow, a pump 13 provided halfway the line 12, and a plurality of branched lines LN1 to LNn provided by branching them from the line 12, the flow of the liquid in each line is allowed or inhibited by individually opening/closing each branched line LN1 to LNn by an opening/closing valve 21, and a pressure feedback control is executed by operating a pressure adjusting actuator relief valve 31 and an electropneumatic regulator 32 so as to allow the liquid pressure detected downstream a branched point of each branched line LN1 to LNn to match with a target value. Particularly, a controller 35 monitors the number of opened branched lines, and changes a controlling form in a pressure feedback control, based on the monitoring results.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了能够在能够向多个使用点分配/供给液体的液体供给系统中使得不需要使配置复杂化的情况下适当地控制液体压力。解决方案：系统设置有允许液体流动的供应管线12，设置在管线12中途的泵13以及通过从管线12分流而提供的多条分支管线LN1至LNn，流体通过开/关阀21单独打开/关闭各分支线路LN1〜LNn来允许或禁止每条线路中的液体，并且通过操作压力调节致动器安全阀31和电动气动调节器32来执行压力反馈控制以便允许在每条分支线LN1至LNn的分支点下游检测到的液体压力与目标值相匹配。特别地，控制器35基于监视结果监视打开的分支线的数量，并且改变压力反馈控制中的控制形式。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2004353784A Vacuum proportional opening and closing valve 有权
公开(公告)号：JP2004353784A
公开(公告)日：2004-12-16
申请号：JP2003153148
申请日：2003-05-29
申请人： Ckd Corp , シーケーディ株式会社
发明人： ITOU TAKEHIRO , NITTA SHINICHI , ITO TOMOHIRO , TOYODA TETSUYA
IPC分类号： F16K1/36 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a vacuum proportional opening/closing valve capable of enlarging valve conductance while stabilizing fluid pressure.
SOLUTION: In the vacuum proportional opening/closing valve, a valve hole 23 is provided on an input port 21 side, and an O-ring 27 provided on a valve body 25 contacts to/separates from a valve seat 24 around the valve hole 23 to carry out opening/closing the valve. The valve body 25 comprises an insertion part 25a for being inserted into the valve hole 23 and a flange part 25b for holding the O-ring 27. A space of a predetermined interval m is formed between the insertion part 25a and the wall surface of the valve hole 23.
COPYRIGHT: (C)2005,JPO&NCIPI

4. 发明专利

JP2009024749A Diaphragm type fluid equipment 有权
标题翻译：膜片式流体设备
公开(公告)号：JP2009024749A
公开(公告)日：2009-02-05
申请号：JP2007187070
申请日：2007-07-18
申请人： Ckd Corp , シーケーディ株式会社
发明人： HIRAKO TAMOTSU , ITO TOMOHIRO , SUGATA KAZUHIRO
IPC分类号： F16K7/12
摘要： PROBLEM TO BE SOLVED: To inhibit pollution of a fluid passage and the like and suitably inhibit dielectric breakdown of a diaphragm caused by electrostatic charging.
SOLUTION: In a liquid control valve 10, a diaphragm valve element 26 made of synthetic resin (insulating material) such as fluororesin is connected to a lower end portion of a piston rod 16. The diaphragm valve element 26 has a boss portion 26a connected to the piston rod 16, a peripheral portion 26b caught by a cylinder body 12 and a flow passage body 14, and a diaphragm membrane portion 26c formed between the boss portion 26a and the peripheral portion 26b. A conductive layer 41 is formed on a side of the diaphragm valve element 26 not contacting with liquid over its entire surface. The conductive layer 41 is composed by laminating a high resistance layer of a relatively high resistance and a low resistance layer of a resistance lower than the high resistance layer.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：抑制流体通道等的污染，并适当地抑制由静电充电引起的隔膜的电介质击穿。解决方案：在液体控制阀10中，由氟树脂等合成树脂（绝缘材料）制成的隔膜阀元件26连接到活塞杆16的下端部。隔膜阀元件26具有凸起部 26a连接到活塞杆16，被缸体12和流路主体14卡住的周边部分26b，以及形成在凸台部分26a和周边部分26b之间的隔膜部分26c。导电层41形成在隔膜阀元件26的不与液体在其整个表面上接触的一侧。导电层41通过层压比较高电阻的电阻高的电阻层和低于高电阻层的电阻的低电阻层而构成。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2007299344A Flow rate controller 有权
标题翻译：流量控制器
公开(公告)号：JP2007299344A
公开(公告)日：2007-11-15
申请号：JP2006128850
申请日：2006-05-08
申请人： Ckd Corp , シーケーディ株式会社
发明人： ITO TOMOHIRO
IPC分类号： G05D7/06 , F16K31/128
CPC分类号： G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide flow rate control which is strong against disturbance while simplifying a configuration.
SOLUTION: A fluid control valve 10 has a valve member 31 for adjusting a flow passage area for opening an inlet passage 23 and an outlet passage 24, and a diaphragm member 38 connected to the valve member 31 to operate by pressure balance between secondary side pressure and pilot pressure. A controller 50 displaces the valve member 31 by adjusting pilot pressure by an electropneumatic regulator 45 to control a fluid flow rate. The controller 50 also estimates the secondary side pressure on the basis of an adjusted value of the pilot pressure by the electropneumatic regulator 45 and calculates a fluid flow rate on the basis of pressure difference between primary side pressure and the secondary side pressure.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供对干扰强的流量控制，同时简化配置。解决方案：流体控制阀10具有用于调节用于打开入口通道23和出口通道24的流动通道面积的阀构件31和连接到阀构件31的隔膜构件38，以通过压力平衡来操作二次侧压力和先导压力。控制器50通过由电动气动调节器45调节先导压力来使阀构件31移位，以控制流体流速。控制器50还基于电动气动调节器45的先导压力的调整值来估计二次侧压力，并且基于一次侧压力和次级侧压力之间的压差来计算流体流量。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2007278514A Control method for flow control valve 审中-公开
标题翻译：流量控制阀的控制方法
公开(公告)号：JP2007278514A
公开(公告)日：2007-10-25
申请号：JP2007150286
申请日：2007-06-06
申请人： Ckd Corp , シーケーディ株式会社
发明人： KAGOHASHI HIROSHI , SUGATA KAZUHIRO , ITO TOMOHIRO , TOYODA TETSUYA , KATO TAKASHI
IPC分类号： F16K31/42 , F16K7/17 , F16K31/124 , F16K35/00 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To provide a control method for a flow control valve attaining flow control of high accuracy by reducing the individual difference of valve opening caused by the mounting accuracy of a detecting means. SOLUTION: In this control method for the flow control valve 1, a detecting means 25 is provided for detecting the arrival of a piston 22 to close the valve from the state of the detecting means being turned OFF from ON or turned ON from OFF, and the difference between an operation signal when the detecting means 25 is turned OFF from ON or turned ON from OFF, and an operation signal value corresponding to the reference origin is set as an individual difference value to compensate a reference curve with the individual difference value. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种流量控制阀的控制方法，通过减小由检测装置的安装精度引起的阀开度的个体差异，从而实现高精度的流量控制。解决方案：在这种流量控制阀1的控制方法中，设置检测装置25，用于检测活塞22的到来，以便从检测装置的ON状态或ON状态关闭阀 OFF，并且当检测装置25从OFF断开或从OFF导通时的操作信号与对应于基准原点的操作信号值之间的差被设置为个体差值，以补偿与个体的参考曲线差值。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2009150422A Fluid device 有权
标题翻译：流体装置
公开(公告)号：JP2009150422A
公开(公告)日：2009-07-09
申请号：JP2007326544
申请日：2007-12-18
申请人： Ckd Corp , シーケーディ株式会社
发明人： ITO TOMOHIRO , KITAGAWA AKIICHI
IPC分类号： F16K7/12 , F16K27/00
摘要： PROBLEM TO BE SOLVED: To inhibit electric breakdown due to charge of a film part while inhibiting contamination of a fluid passage.
SOLUTION: In a fluid control valve 10, the fluid passages 33, 34 in which fluid flows are formed on a channel body 14 made of fluororesin. Parts of a circumference of the fluid passages 33, 34 are formed of a shell part 38. The shell part 38 is exposed to an outside by a thinned part 37 provided on the channel body 14 for prevention of sinkage. A conductive layer 41 is provided on an outer surface of the shell part 38 exposed to the outside by the thinned part 37 in such a manner. An earth line E1 and an earth member E2 are connected to the conductive layer 41, and electrons charged on an inner surface of the passage are discharged through the same.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：抑制由于膜部件的电荷导致的电击穿，同时抑制流体通道的污染。解决方案：在流体控制阀10中，流体流动的流体通道33,34形成在由氟树脂制成的通道体14上。流体通道33,34的圆周的一部分由外壳部分38形成。外壳部分38通过设置在通道体14上的减薄部分37暴露于外部，以防止下沉。导电层41以这样的方式设置在外壳部分38的外表面上，该外壳部分38被薄化部分37暴露于外部。接地线E1和接地构件E2连接到导电层41，并且充电在通道的内表面上的电子通过该导体层41排出。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2008223954A Liquid discharge valve 有权
标题翻译：液体排放阀
公开(公告)号：JP2008223954A
公开(公告)日：2008-09-25
申请号：JP2007065744
申请日：2007-03-14
申请人： Ckd Corp , シーケーディ株式会社
发明人： KAJITA AKIRA , ITO TOMOHIRO
IPC分类号： F16K31/122 , F16K1/00
摘要： PROBLEM TO BE SOLVED: To provide a liquid discharge valve capable of slow leak for avoiding the residual washing liquid when replaced with pure water.
SOLUTION: The liquid discharge valve 11 comprises a valve seat 12a formed in an input port 12b, a cylindrical valve element member 15 having a valve element portion 15a for abutting on or separating from the valve seat 12a to control the discharge of the washing liquid A, and a throttle member 17 having an inner peripheral portion 17a for holding a predetermined distance and gap from a cylindrical outer peripheral portion of the valve element member 15.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够缓慢泄漏的液体排出阀，以便在用纯水替代时避免残留的洗涤液体。解决方案：液体排出阀11包括形成在输入端口12b中的阀座12a，圆柱形阀元件15，其具有用于抵接或离开阀座12a的阀元件部分15a，以控制排出阀洗涤液A和具有内周部分17a的节流部件17，用于与阀元件15的圆柱形外周部分保持预定的距离和间隙。（C）2008年，JPO＆INPIT

9. 发明专利

JP2003049778A Liquid feeder 有权
标题翻译：液体饲料
公开(公告)号：JP2003049778A
公开(公告)日：2003-02-21
申请号：JP2001238931
申请日：2001-08-07
申请人： Ckd Corp , シーケーディ株式会社
发明人： ITO TOMOHIRO , OSUGI SHIGERU , KAGOHASHI HIROSHI
IPC分类号： F04B13/00 , B05C11/10 , F04B43/02 , F04B43/06 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a liquid feeder that can quantitatively discharge a trace quantity of liquid with more accuracy by using a pressure sensor with high corrosion resistance, responsiveness and heat resistance.
SOLUTION: The liquid feeder 50 changes the volume of a pump chamber 55 by driving a diaphragm 52 to suction a chemical from an input port 81 and discharge the chemical to an output port 82. A wall surface of the pump chamber 55 is partly formed by a sensor surface 72 of the pressure sensor 70, and the sensor surface 72 is provided with a fluorine resin 71 by thermo- compression bonding. The pressure sensor 70 measures a back pressure generated by, for example, an orifice arranged outside the output port 82, and passes feedback to a controller 64. According to the measured value, the controller 64 controls a solenoid-operated proportioning valve 65 for driving the diaphragm 52.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：通过使用具有高耐腐蚀性，响应性和耐热性的压力传感器，提供可以更精确地定量排出痕量液体的液体给料器。解决方案：液体供给器50通过驱动隔膜52从输入口81抽吸化学物质并将化学物质排出到输出端口82来改变泵室55的体积。泵室55的壁表面部分地由压力传感器70的传感器表面72和传感器表面72通过热压粘结设置有氟树脂71。压力传感器70测量由例如布置在输出端口82外部的孔产生的背压，并将反馈传递给控制器64.根据测量值，控制器64控制用于驱动的电磁操作配比阀65 隔膜52。

10. 发明专利

JP2005351308A Control method of flow control valve 审中-公开
标题翻译：流量控制阀控制方法
公开(公告)号：JP2005351308A
公开(公告)日：2005-12-22
申请号：JP2004170354
申请日：2004-06-08
申请人： Ckd Corp , シーケーディ株式会社
发明人： ITO TOMOHIRO , KATO TAKASHI
IPC分类号： F16K31/04 , F16K37/00 , H02P8/38
摘要： PROBLEM TO BE SOLVED: To propose the control method that enables the control of a minute flow regarding a compact flow control valve of excellent durability while intending the cost reduction. SOLUTION: The position of full opening and full closing of the valve is decided by detecting the step-out phenomenon of a stepping motor 15 from the waveform change of the drive voltage of the stepping motor 15, in the control method of the fluid control valve that opens and closes a valve by driving the stepping motor 15. And (1) an AD converter or (2) the detection circuit of the pulse time changes is used for detecting the step-out phenomenon of the stepping motor 15. COPYRIGHT: (C)2006,JPO&NCIPI

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