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    • 6. 发明专利
    • Single crystal pulling apparatus for metal fluoride
    • 金属氟化物单晶拉丝装置
    • JP2004155624A
    • 2004-06-03
    • JP2002324772
    • 2002-11-08
    • Daiichi Kiden:KkTokuyama Corp株式会社トクヤマ株式会社第一機電
    • NAWATA TERUHIKOKUDO MASAMIYANAGI HIROYUKIITO HARUMASA
    • C30B29/12
    • PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus in which local solidification of the melted source material is prevented in the bottom part of the crucible during pulling a single crystal, a single crystal having a large diameter with respect to the diameter of the crucible can be stably grown, and the yield of growing a single crystal from the melt source material in the crucible can be significantly increased.
      SOLUTION: The crucible in the chamber of the single crystal pulling apparatus for a metal fluoride is attached in such a manner that the periphery of the crucible bottom is directly or indirectly supported by the receptacle provided at the upper end of a supporting shaft and at least a part of the bottom center of the crucible and the upper center of the receptacle are apart from each other, preferably at ≥3 mm distance.
      COPYRIGHT: (C)2004,JPO
    • 解决问题的方案:提供一种在拉晶单晶时在坩埚底部防止熔融源材料的局部凝固的单晶拉制装置,具有大直径的单晶相对于 可以稳定地生长坩埚的直径,并且可以显着提高坩埚中的熔体源材料生长单晶的产率。 解决方案:用于金属氟化物的单晶拉制装置的腔室中的坩埚以这样的方式被安装,使得坩埚底部的周边由设置在支撑轴的上端处的容器直接或间接地支撑 并且坩埚的底部中心的至少一部分和容器的上部中心彼此分开,优选地在≥3mm的距离处。 版权所有(C)2004,JPO
    • 7. 发明专利
    • High frequency induction heating device
    • 高频感应加热装置
    • JP2003031348A
    • 2003-01-31
    • JP2001216784
    • 2001-07-17
    • Daiichi Kiden:Kk株式会社第一機電
    • DOBASHI AKIRA
    • H05B6/26C23C16/46H05B6/10
    • PROBLEM TO BE SOLVED: To improve a structure for cooling a quartz tube which forms a reaction chamber in a high frequency induction heating device.
      SOLUTION: The device is comprising: a water passage constitutive body 21 provided at the outer periphery of the reaction chamber constitutive body 1, and fixing members 22, 37 provided respectively at the both side of the reaction chamber constitutive body, 21 water supply member 25 for holding the lower end of water passage constitutive body wherein the supply member 25 having a plurality of water supply pipes 26 screwed in the fixing member 22 and attached in radial directions, an O ring- pressing member 34 screwed in the water supply member and engaged with the outer peripheral surface of the lower end of water passage constitutive body, a drain member 40 for holding the upper end of water passage constitutive body, wherein the drain member 40 having a plurality of drain pipes 41 screwed in the fixing member 37 and attached in radial directions, an O ring-pressing member 49 screwed in the drain member and engaged with the outer peripheral surface of the upper end of water passage constitutive body, and O rings 32, 33, 47 and 48 provided between the fixing member and the water supply member, and between the water supply member and O ring-pressing member, and between the fixing member and the drain member, and between the drain member and the O ring-pressing member, respectively.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提高用于冷却在高频感应加热装置中形成反应室的石英管的结构。 解决方案:该装置包括:设置在反应室主体1的外周的水通道构成体21和分别设置在反应室构成体两侧的固定构件22,37,21供水构件25 用于保持水通道本体的下端,其中供给构件25具有螺纹固定在固定构件22中并沿径向安装的多个供水管26,螺旋在供水构件中的O形圈构件34接合 与水通道构成体的下端的外周面相对应设置有用于保持水通道本体的上端的排水构件40,其中,排水构件40具有多个排出管41,螺纹连接在固定构件37中并附接 在径向方向上,螺旋在排放构件中并与水通道上端的外周表面接合的O形圈按压构件49 设置在固定构件和供水构件之间,以及设置在供水构件和O形环压构件之间以及固定构件和排出构件之间以及位于第二构件之间的O形环32,33,47和48之间 排水构件和O形圈按压构件。