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    • 5. 发明公开
    • ELECTRODES FOR FLUORINE GAS DISCHARGE LASERS
    • 垫FLUOR气体放电激光器
    • EP1661216A2
    • 2006-05-31
    • EP04778353.5
    • 2004-07-16
    • Cymer, Inc.
    • MORTON, Richard, G.MOOSMAN, BryanDYER, TimothyCARMICHAEL, James, A.ZHANG, Jiping
    • H01S1/00
    • H01S3/0385H01S3/036H01S3/038H01S3/0381H01S3/0382H01S3/0384H01S3/0388H01S3/097H01S3/09702H01S3/0971H01S3/225H01S3/2251
    • Fluorine gas discharge laser electrodes and electrode systems are disclosed that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition disclosed are electrodes that may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. This may also comprise at least one of the first and second gas discharge electrodes has imbedded therein a first and a second auxiliary field creating magnet. Also disclosed is an electrode that may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material. Also disclosed are electrodes that may comprise a first insert in the electrode body comprising an electrically conductive material having a different coefficient of thermal conductivity than the electrode body. Also disclosed are electrodes that may have a thin film of semi-conductive material coating at least the discharge footprint of the gas discharge electrode, or at least a portion of the discharge region covered with a pre-formed reef having generally uniform pore size and distribution, and methods of making such coatings or reef. Also disclosed is a method of forming an electrode by diffusion bonding a first piece of a first material to a second piece of a second material utilizing a diffusion bonding catalyst between the first piece of material and the second piece of material during the diffusion bonding step and machining the bonded pieces to form an electrode.