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1. 发明公开

EP4361560A1 MICROELECTROMECHANICAL GYROSCOPE WITH DETECTION OF ANGULAR VELOCITY ALONG A VERTICAL AXIS 审中-公开
公开(公告)号：EP4361560A1
公开(公告)日：2024-05-01
申请号：EP23202344.0
申请日：2023-10-09
申请人： STMicroelectronics S.r.l.
发明人： CARULLI, Paola , FALORNI, Luca Giuseppe , FEDELI, Patrick , GUERINONI, Luca
IPC分类号： G01C19/5762 , G01C19/5747
CPC分类号： G01C19/5762 , G01C19/5747
摘要： A microelectromechanical gyroscope (10) with detection along a vertical axis is provided with a detection structure (10) having a movable structure (12), suspended above a substrate (13) so as to perform, as a function of an angular velocity (Ωz) around the vertical axis a sense movement along a first horizontal axis (x). The movable structure has at least one drive mass (14) internally defining a window (16), elastically coupled to a rotor anchor (20'), at an anchoring region (A), through elastic anchoring elements (21); at least one bridge element (18), rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes (23), carried integrally by the bridge element with extension along a second horizontal axis (y). The detection structure (10) also has stator electrodes (28, 29), arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element (18), which extends longitudinally above the same stator electrodes and the movable electrodes.

2. 发明授权

EP3256813B1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 有权
公开(公告)号：EP3256813B1
公开(公告)日：2019-04-10
申请号：EP16704706.7
申请日：2016-02-08
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5712 , G01C19/5747

3. 发明授权

EP1472506B1 MIKROMECHANISCHER DREHRATENSENSOR 有权
公开(公告)号：EP1472506B1
公开(公告)日：2018-11-28
申请号：EP02781106.6
申请日：2002-09-23
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , THOMAE, Andreas , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , GOETZ, Siegbert , DOERING, Christian , FEHRENBACH, Michael , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , FUNK, Karsten , LUTZ, Markus , WUCHER, Gerhard , FRANZ, Jochen
IPC分类号： G01C19/5747
CPC分类号： G01C19/5747

4. 发明授权

EP2960625B1 CAPTEUR INERTIEL ANGULAIRE MEMS FONCTIONNANT EN MODE DIAPASON 有权
公开(公告)号：EP2960625B1
公开(公告)日：2018-11-14
申请号：EP15173393.8
申请日：2015-06-23
申请人： THALES
发明人： Chaumet, Bernard , Filhol, Fabien , Rougeot, Claude , Leverrier, Bertrand
IPC分类号： G01C19/5747
CPC分类号： G01C19/5747 , G01C19/574

5. 发明公开

EP3385668A1 MICRO-MECHANICAL SENSOR ELEMENT OF ANGULAR VELOCITY 审中-公开
公开(公告)号：EP3385668A1
公开(公告)日：2018-10-10
申请号：EP18164446.9
申请日：2018-03-28
申请人： Murata Manufacturing Co., Ltd.
发明人： KATO, Yoshitaka
IPC分类号： G01C19/5747
CPC分类号： G01C19/5747 , G01C19/5712 , G01C19/5769
摘要： A sensor element for detecting angular velocity about a detection axis perpendicular to a plane of the sensor element is disclosed. The essentially planar sensor element comprises two primary masses and two Coriolis masses, and two sensing cells. The sensor element further comprises two coupling levers each coupled to the two primary masses by first springs and to one of the two Coriolis masses by second springs, the coupling levers enabling the two primary masses and the two Coriolis masses to be excited into a combined primary motion occurring in the plane of the essentially planar sensor element. In the combined primary motion, the direction of the angular momenta of linear primary oscillation motions of the primary masses and angular momenta of rotational primary motions of the coupling levers with respect to the geometrical centroid of the sensor element is opposite to the direction of the angular momenta of linear primary oscillation motions of the Coriolis masses with respect to the geometrical centroid of the sensor element.

6. 发明授权

EP3158292B1 MIKROMECHANISCHES SENSORBAUTEIL FÜR EINEN DREHRATENSENSOR 有权
公开(公告)号：EP3158292B1
公开(公告)日：2018-09-19
申请号：EP15721229.1
申请日：2015-05-07
申请人： Robert Bosch GmbH
发明人： OHMS, Torsten , MAUL, Robert , HATTASS, Mirko , HOEPPNER, Christian , SCHMIDT, Benjamin , SCHEBEN, Rolf
IPC分类号： G01C19/5733 , G01C19/5747
CPC分类号： G01C19/5747 , G01C19/5733

7. 发明公开

EP3270106A1 VIBRATION AND SHOCK ROBUST GYROSCOPE 有权
标题翻译：振动和冲击强化陀螺仪
公开(公告)号：EP3270106A1
公开(公告)日：2018-01-17
申请号：EP17170728.4
申请日：2017-05-11
申请人： NXP USA, Inc.
发明人： NAUMANN, Michael
IPC分类号： G01C19/5747
CPC分类号： G01C19/5719 , B81B7/0016 , B81B2201/0242 , B81B2203/0163 , G01C19/5747
摘要： A MEMS device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to each of the rigid links. A first drive spring is coupled to the first spring head and to the movable mass, and a second drive spring is coupled to the second spring head and to the movable mass. The movable mass is resiliently suspended above the surface of the substrate via the suspension structure and the spring system. The spring system enables drive motion of the movable mass in the drive direction and sense motion of the movable mass in a sense direction perpendicular to the surface of the substrate.
摘要翻译： MEMS器件包括具有覆盖感测电极的中心区域和悬置结构和弹簧系统位于其中的开口的可移动块。该悬架结构包括连接到基板的锚固件和从锚固件的相对侧延伸的刚性连接件。弹簧系统包括连接到每个刚性连杆的第一和第二弹簧头。第一驱动弹簧联接到第一弹簧头和可移动质量块，并且第二驱动弹簧联接到第二弹簧头和可移动质量块。可移动块经由悬架结构和弹簧系统弹性地悬挂在衬底的表面上方。弹簧系统使得可动质量块在驱动方向上能够进行驱动运动并且感测可动质量块在垂直于衬底表面的感测方向上的运动。

8. 发明授权

EP2600104B1 Micro-capteur inertiel de mouvements de rotation 有权
标题翻译：微型惯性旋转运动
公开(公告)号：EP2600104B1
公开(公告)日：2017-08-23
申请号：EP12194966.3
申请日：2012-11-30
申请人： COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
发明人： Deimerly, Yannick , Jourdan, Guillaume
IPC分类号： G01C19/5762 , G01C19/5747 , G01C19/5712
CPC分类号： G01C19/5712 , G01C19/5747 , G01C19/5762

9. 发明授权

EP2749841B1 DISPLACEMENT MONITORING ELECTRODE STRUCTURE 失效
标题翻译：带位移监控用电结构
公开(公告)号：EP2749841B1
公开(公告)日：2016-12-28
申请号：EP11847885.8
申请日：2011-08-26
申请人： TOYOTA JIDOSHA KABUSHIKI KAISHA
发明人： NARITA, Katsutoshi
IPC分类号： G01C19/56 , G01B7/00 , G01C19/5747 , G01P15/125
CPC分类号： G01P15/125 , G01C19/5747

10. 发明授权

EP2269001B1 VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 有权转让
标题翻译：振动角速度的微机械传感器
公开(公告)号：EP2269001B1
公开(公告)日：2016-11-30
申请号：EP09732877.7
申请日：2009-04-08
申请人： Murata Electronics Oy
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/56 , G01P3/44 , B81B3/00 , G01C19/5712 , G01C19/5747 , G01C19/5762
CPC分类号： G01C19/5762 , G01C19/5712 , G01C19/5747

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