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1. 发明公开

EP4124827A1 MEMS GYROSCOPE HAVING AN IMPROVED REJECTION OF THE QUADRATURE ERROR 有权
公开(公告)号：EP4124827A1
公开(公告)日：2023-02-01
申请号：EP22184619.9
申请日：2022-07-13
申请人： STMicroelectronics S.r.l.
发明人： PRATI, Daniele , FALORNI, Luca Giuseppe , GUERINONI, Luca
IPC分类号： G01C19/5747 , G01C19/5762
摘要： The MEMS gyroscope (1) is formed by a substrate (5), a first mass (7) and a second mass (10), wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension (XY) defining a first direction (X) and a second direction (Y) transversal to the first direction. The MEMS gyroscope further has a drive structure (48) coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure (25), which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction (X) with a movement of the second mass in the second direction (Y). The elastic coupling structure has a first portion (27, 28, 30, 31, 36, 37) having a first stiffness and a second portion (26, 33, 34) having a second stiffness greater than the first stiffness. The first portion of the elastic coupling structure extends, at rest, in the first and the second directions, and the second portion extends, at rest, in a third direction (C), in the plane of extension, transversal to the first and the second directions.

2. 发明公开

EP3295124A1 VIBRATING MICRO-MECHANICAL ANGULAR VELOCITY SENSOR AND METHOD FOR OPERATING THE SAME 有权
公开(公告)号：EP3295124A1
公开(公告)日：2018-03-21
申请号：EP16724723
申请日：2016-05-12
申请人： MURATA MANUFACTURING CO
发明人： KATO YOSHITAKA
IPC分类号： G01C19/5712 , G01C19/5747 , G01C19/5762
CPC分类号： G01C19/5719 , G01C19/5712 , G01C19/5747 , G01C19/5762
摘要： A sensor structure and a method for operating a vibrating sensor of angular velocity comprising a rotor mass and two linearly moving masses is disclosed. The sensor structure and method comprises a rotor mass, two linearly moving masses, and two T-shaped levers each coupled with the two linearly moving masses and to the rotor mass. The T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, where the direction of angular momentum of the rotor mass is opposite to the direction of angular momenta of the linearly moving masses. Angular momenta of the rotor mass and the linearly moving masses cancel each other to a high extent, so that the total sum of angular momentum of the structure is very small. Nominal frequency of the anti-phase primary mode is distinctively low as compared to nominal frequencies of other possible primary modes, such as a parallel phase primary mode.

3. 发明公开

EP2936056A1 GYROSCOPE A CALIBRATION SIMPLIFIÉE ET PROCÉDÉ DE CALIBRATION SIMPLIFIÉ D'UN GYROSCOPE 有权
标题翻译： GYROSKOP MIT VEREINFACHTER KALIBRIERUNG UND VEREINFACHTES KALIBRIERVERFAHRENFÜREIN GYROSKOP
公开(公告)号：EP2936056A1
公开(公告)日：2015-10-28
申请号：EP13823955.3
申请日：2013-12-23
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： WALTHER, Arnaud
IPC分类号： G01C19/5726 , G01C19/5762 , G01C25/00
CPC分类号： G01C19/5726 , G01C19/5755 , G01C19/5762 , G01C25/005
摘要： The invention relates to a gyroscope comprising a mass capable of movement due to excitation and a mass capable of movement due to detection, means for applying an excitation signal to the excitation mass in a first direction, means for detecting the movement of the detection mass in a second direction orthogonal to the first direction, and means for detecting the movement of the excitation mass in the second direction, and processing means (I, II, II') for processing the detection signals emitted by the means for detecting movements of the detection mass and the means for detecting movements of the excitation mass in the second direction, so as to obtain the phase bias (B), the quadrature bias (Bq) and the amplification factor (A) of the gyroscope.
摘要翻译：一种陀螺仪，包括能够由于激发而能够移动的质量和由于检测而能够移动的质量的质量，在第一方向上向激励质量施加激励信号的机构，检测所述检测质量在第二方向上的运动的机构正交检测第一方向的机构，检测激励质量在第二方向上的运动的机构，以及处理器，通过机构发出的检测信号，检测检测质量的运动和检测激励质量在第二方向上的移动的机构，获得相位偏置，正交偏置和放大因子。

4. 发明公开

EP2805132A4 TIME DOMAIN SWITCHED GYROSCOPE 无效
标题翻译： ZEITDOMÄNENGESCHALTETES陀螺仪
公开(公告)号：EP2805132A4
公开(公告)日：2015-08-26
申请号：EP13739034
申请日：2013-01-15
申请人： LUMEDYNE TECHNOLOGIES INC , US NAVY
发明人： SWANSON PAUL D , WATERS RICHARD L
IPC分类号： G01C19/5762 , G01C19/5719
CPC分类号： G01C19/5762 , G01C19/5719

5. 发明公开

EP2805132A1 TIME DOMAIN SWITCHED GYROSCOPE 无效
标题翻译：时间轴方向上切换陀螺仪
公开(公告)号：EP2805132A1
公开(公告)日：2014-11-26
申请号：EP13739034.0
申请日：2013-01-15
申请人： Lumedyne Technologies Incorporated , United States of America as Represented by the Secretary of the Navy
发明人： SWANSON, Paul, D. , WATERS, Richard, L.
IPC分类号： G01C19/5762
CPC分类号： G01C19/5762 , G01C19/5719
摘要： A gyroscope comprising: a support structure: a drive mass springedly coupled to the support structure such that movement of the drive mass with respect to the support structure is substantially restricted to movement in a first direction; a driver configured to cause the drive mass to oscillate with respect to the support structure in the first direction; a sense mass springedty coupled to the drive mass such that movement of the sense mass with respect to the drive mass is substantially restricted to movement in a second direction, which is orthogonal to the first direction; and a digital trigger comprising a proximity switch coupled between the drive mass and the sense mass, wherein the switch is configured to switch from an open state to a closed state each time the sense mass is in a reference position with respect to the drive mass.

6. 发明公开

EP2006636A3 Angular velocity detecting device 有权转让
标题翻译：装置，用于检测角速度
公开(公告)号：EP2006636A3
公开(公告)日：2014-03-12
申请号：EP08010526.5
申请日：2008-06-10
申请人： Hitachi Ltd.
发明人： Jeong, Heewon , Goto, Yasushi
IPC分类号： G01C19/5762 , G01C19/5747
CPC分类号： G01P3/22 , G01C19/5747 , G01C19/5762
摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

7. 发明公开

EP2600104A2 Micro-capteur inertiel de mouvements de rotation 有权
标题翻译： Mikro惯性传感器fürDrehbewegungen
公开(公告)号：EP2600104A2
公开(公告)日：2013-06-05
申请号：EP12194966.3
申请日：2012-11-30
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人： Deimerly, Yannick , Jourdan, Guillaume
IPC分类号： G01C19/5762 , G01C19/5747
CPC分类号： G01C19/5712 , G01C19/5747 , G01C19/5762
摘要： La présente invention concerne un capteur inertiel de mouvements de rotation comprenant au moins une masse d'inertie (112, 1210) mobile dans un espace (x, y, z) ; un excitateur (131) configuré pour générer un premier mouvement vibratoire de la masse d'inertie suivant une première direction (X) incluse dans le plan (x, y) de sorte à générer une première force de Coriolis induite par un mouvement de rotation de la masse d'inertie (112, 1210) suivant une deuxième direction (Y) incluse dans le plan (x, y) et perpendiculaire à la première direction (X); un excitateur (131) configuré pour générer un deuxième mouvement vibratoire de la masse d'inertie suivant la deuxième direction (Y) de sorte à générer une deuxième force de Coriolis induite par un mouvement de rotation de la masse d'inertie (112, 1210) suivant la première direction (X) et des moyens de détection de la première force de Coriolis et de la deuxième force de Coriolis, caractérisé par le fait que les moyens de détection comprennent un détecteur commun pour la première force de Coriolis et de la deuxième force de Coriolis et configuré pour produire un signal électrique traité par un circuit de traitement de sorte à discriminer une première composante du signal électrique correspondant à la première force de Coriolis et une deuxième composante du signal électrique correspondant à la deuxième force de Coriolis.
摘要翻译：微传感器例如。双轴旋转器（100）具有用于沿着两个方向产生惯性质量即主质量（112）的振动运动的激励质量（131,132），以根据第三方向产生科里奥利力。检测单元检测力并且包括公共检测器以检测力并产生由处理电路处理的电信号，以区分与力相对应的信号的分量。检测质量（111）与惯性质量运动学连接，检测单元检测检测质量的力。

8. 发明授权

EP3295124B1 VIBRATING MICRO-MECHANICAL ANGULAR VELOCITY SENSOR AND METHOD FOR OPERATING THE SAME 有权
公开(公告)号：EP3295124B1
公开(公告)日：2021-11-24
申请号：EP16724723.8
申请日：2016-05-12
发明人： KATO, Yoshitaka
IPC分类号： G01C19/5712 , G01C19/5747 , G01C19/5762

9. 发明公开

EP3812705A1 MEMS SENSOR WITH CONFIGURATION TO REDUCE NON-LINEAR MOTION 审中-实审
公开(公告)号：EP3812705A1
公开(公告)日：2021-04-28
申请号：EP20209488.4
申请日：2015-01-21
申请人： InvenSense, Inc.
发明人： Anac, Ozan , Seeger, Joseph
IPC分类号： G01C19/5733 , G01C19/5747 , G01C19/5762 , G01P15/08 , B81B3/00
摘要： Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized. The electrical cancellation system uses combined signals from transducers used for detecting movement of travelling masses of the MEMS sensor subject to an input angular velocity.

10. 发明授权

EP2899503B1 MEMS sensor with configuration to reduce non-linear motion 有权
公开(公告)号：EP2899503B1
公开(公告)日：2020-11-25
申请号：EP15152031.9
申请日：2015-01-21
申请人： InvenSense, Inc.
发明人： Anac, Ozan , Seeger, Joseph
IPC分类号： G01C19/5733 , G01C19/5747 , G01C19/5762 , G01P15/08 , B81B3/00

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