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    • 2. 发明公开
    • Improved mesh scan expansion CRT lens
    • 具有网状电极一种用于阴极射线管的电子束的偏转角的扩大透镜。
    • EP0277758A1
    • 1988-08-10
    • EP88300666.0
    • 1988-01-27
    • TEKTRONIX, INC.
    • McGlothlan, J. Kirk
    • H01J29/80H01J3/36H01J9/14
    • H01J9/14H01J29/806
    • Mesh lens (12) for PDA-type cathode-­ray tubes (10) is constructed in a manner that permits deformation into a concavo-convex shape with a substantially shorter radius of curvature than heretofore obtainable with prior art devices. The mesh lens (12) particularly comprises a multitude of interconnected webs (58) forming an array of apertures (60). Each web (58) has opposing ends and a midline (62) extending between those ends. The mesh (12) is configured so that an individual aperture (60) of the array is formed by a set of webs (58) interconnected at their ends. The midline (62) of each web in the undeformed mesh defines a bent line. The mesh can be deformed into a concavo-convex shape having a relatively short radius of curvature. This is so because the individual webs of the mesh respond to the application of deformation forces by initially straightening, thereby effectively delaying the development of tensile stresses in the webs.
    • 目为PDA型阴极射线管(10)以这样的方式被构造透镜(12)没有许可证变形为凹凸形状与现有技术的装置的曲率基本上比迄今可获得的短半径。 网状透镜(12),特别是包括相互连接的连接板中的孔径的阵列(60)形成的大量(58)。 每个腹板(58)具有相对的端部与这些端部之间延伸的中线(62)。 如在阵列的单个孔(60)没有通过相互连接在其端部的一组腹板(58)形成的网格(12)被配置。 在未变形的网格中的每个幅材的中线(62)定义的弯曲线。 网格可以变形为具有曲率的相对短的半径的凹凸形状。 这是因为网格的各个幅材通过最初矫直,从而有效地延缓拉伸应力的发展,在腹板响应变形力的应用。
    • 5. 发明公开
    • Ion implanter and a method of implanting ions
    • Ionenimplantierungsgerätund Verfahren zur Ionenimplantierung
    • EP1056113A2
    • 2000-11-29
    • EP00303209.1
    • 2000-04-17
    • APPLIED MATERIALS, INC.
    • Glavish, Hilton F.Gordon, John Stuart
    • H01J37/317H01J37/30H01J3/36
    • H01J37/3171H01J2237/04737
    • An ion implanter employs two three gap rf accelerator stages to boost the implant energy after mass selection. The electrodes of the accelerator stages have slit-shaped apertures that accommodate high beam current, when the accelerator is in drift mode. By particular choice of the parameters of the accelerator, each stage of the accelerator produces accelerated ions having a relatively small energy spread, even though the acceptance range of the accelerator stage extends over a substantial phase angle of the applied rf voltage. The resulting accelerator is flexible, permitting a wide variation of output energies with good beam dynamics. Ion bunches from the first three gap stage are caused to have the correct flight time to reach the second stage for acceleration by adjusting the speed of the ions while maintaining the rf phase of the fields in the two stages locked to fixed values.
    • 离子注入机采用两个三个间隙rf加速器级,以在质量选择之后增加植入能量。 当加速器处于漂移模式时,加速器级的电极具有适应远光束电流的狭缝形孔。 通过加速器的参数的特定选择,加速器的每个阶段产生具有相对小的能量扩展的加速离子,即使加速器级的接受范围在所施加的rf电压的基本相位角上延伸。 所产生的加速器是灵活的,允许具有良好的光束动力学的输出能量的广泛变化。 通过调整离子速度同时将两级中的场的rf相位锁定到固定值,使来自前三个间隙级的离子束具有到达第二阶段加速的正确飞行时间。