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    • 1. 发明公开
    • Electron beam columns
    • Elektronenstrahlsäule
    • EP1102303A2
    • 2001-05-23
    • EP00310038.5
    • 2000-11-10
    • Etec Systems, Inc.
    • Veneklasen, Lee H.
    • H01J37/06H01J3/02
    • H01J37/063H01J3/029
    • A tetrode (four electrode) gun (202) is described which allows the adjustment of both variable high brightness and illumination uniformity in the profile of the electron beam. This is achieved by providing an electrostatic focusing electrode (18) between the cathode (2) and the anode (8) within the electron gun. The focusing electrode is positively biased to a few keV and allows the image of the cathode to be focused at infinity. The addition of a focusing electrode enables both variable brightness and illumination uniformity by adjustment of the bias of a grid (4) which is mounted below the cathode to maintain constant emission, while adjusting the bias of the focusing electrode to obtain the optimal beam cross-sectional uniformity.
    • 描述了四极(四电极)枪(202),其允许调整电子束轮廓中的可变高亮度和照明均匀性两者。 这通过在电子枪内的阴极(2)和阳极(8)之间设置静电聚焦电极(18)来实现。 聚焦电极被正偏压到几keV,并允许阴极的图像被无限远地聚焦。 通过调整安装在阴极下方的栅极(4)的偏置来保持恒定的发射,同时调节聚焦电极的偏压以获得最佳的光束横截面,添加聚焦电极使得能够实现可变亮度和照明均匀性, 截面均匀性。
    • 3. 发明授权
    • ZERO-BIAS GRIDDED GUN
    • EP0018402B1
    • 1988-09-14
    • EP79900835.4
    • 1979-06-27
    • VARIAN ASSOCIATES, INC.
    • MIRAM, George ValentineKUEHNE, Gerhard Berthold
    • H01J23/065
    • H01J23/065H01J1/46H01J3/029
    • A gun for a linear-beam electron tube has a control grid (40) for modulating the beam current which consists of an array of conductive web elements (50, 52) whose spacing from each other is much larger than their spacing from the concave emissive surface (31) of the cathode (30). It was found that when this condition is met, the grid (40) can be operated at cathode potential while beam current is being drawn without distorting the electric accelerating field enough to ruin the focusing of the beam. Thus, when the grid (40) is used to pulse the beam current on and off, it can have zero bias in the "on" condition, whereby the pulse modulator can be greatly simplified.
    • 用于线性束电子管的枪具有用于调制射束电流的控制栅格(40),该控制栅格由导电纤维网元件(50,52)的阵列组成,所述导电纤维网元件(50,52)的距离远大于它们与凹面发射 (30)的表面(31)。 已经发现,当满足这个条件时,可以在阴极电势下操作栅极(40),同时汲取电子束电流而不扭曲电加速场足以破坏光束的聚焦。 因此,当电网(40)用于脉冲打开和关闭射束电流时,它可以在“开启”状态下具有零偏压,由此可以大大简化脉冲调制器。