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1. 发明公开

EP2036096A1 HIGH-SPEED MEASUREMENT, ANALYSIS AND IMAGING SYSTEMS AND METHODS FOR LENGTH SCALES FROM METER TO SUB-NANOMETER 审中-公开
标题翻译： HOCHGESCHWINDIGKEITSMESSUNGS-，分析和成像系统和长度测量仪给作者NM相关方法
公开(公告)号：EP2036096A1
公开(公告)日：2009-03-18
申请号：EP07875106.2
申请日：2007-06-04
申请人： Kley, Victor B.
发明人： Kley, Victor B.
IPC分类号： G12B21/00
CPC分类号： G01B11/002 , G01B11/303 , G01Q30/02 , G01Q30/04
摘要： An system for the measurement, analysis, and imaging of objects and surfaces in a variety of sizes is provided. In the most general terns, the invention relates to a device capable of measuring an object using a combination of low-resolution optical, high-resolution optical, SPM/AFM and/or material analysis techniques. The data gathered at various resolutions is correlated to absolute locations on the object's surface, allowing selected regions of the object's surface to be analyzed to any desired degree of precision (down to atomic scale). In a specific embodiment of the present invention, a system for collecting measurement data regarding an object of interest is disclosed. The system includes a sample stage adapted to hold the object of interest. The system further includes an optical lens assembly disposed above the sample stage. The optical lens assembly is configured to capture an optical image of the object of interest.

2. 发明公开

EP1523652A1 VERFAHREN ZUR ÖRTLICH HOCHAUFGELÖSTEN, MASSENSPEKTROSKOPISCHEN CHARAKTERISIERUNG VON OBERFLÄCHEN MITTELS EINER RASTERSONDENTECHNIK 有权
标题翻译： FOR当地的方法解决了，质谱表面特性通过网格探针技术手段
公开(公告)号：EP1523652A1
公开(公告)日：2005-04-20
申请号：EP03787732.1
申请日：2003-07-24
申请人： JPK Instruments AG
发明人： KNEBEL, Detlef , AMREIN, Matthias
IPC分类号： G01B7/34 , G12B21/00 , G01N27/00
CPC分类号： G01Q30/02 , G01Q60/22 , H01J49/04 , Y10S977/849 , Y10S977/86 , Y10S977/863
摘要： The invention relates to a combined method, according to which a high-resolution reproduction of a sample surface is registered using scanning force microscopy and a locally highly resolved chemical nature of the sample surface, said nature being correlated with the reproduction, is measured using mass spectroscopy. The chemical analysis of the surface takes place after the laser desorption of a limited surface area. To achieve said desorption, the surface is illuminated at each relevant point by pulses according to the optical near field principle. The optical near-field principle guarantees an analysis with a local resolution that provides unlimited diffraction. A hollow tip of the measuring probe that is used permits the unique allocation of the chemical analysis to a selected surface area. The highly symmetrical arrangement enables a high degree of transmission of the generated molecular ions.
摘要翻译：本发明涉及在样品表面的高分辨率图像通过扫描力显微镜的手段和局部高分辨率，化学性质（所有这一切都与此相关）样品表面的由装置测量记录组合的方法通过质谱测定。表面化学分析，受限制的表面积的激光解吸的基础上。为了这个目的，该表面以脉冲形式在每个兴趣点使用光学近场原理照亮。的位置分辨率的光学近场原理担保分析所有未衍射限制。测量探头的中空尖端没有被用于允许该化学分析和所选择的表面区域之间明确的关联。高度对称的布置允许该分子离子的良好的传输产生一样。

3. 发明授权

EP1523652B1 VERFAHREN ZUR ÖRTLICH HOCHAUFGELÖSTEN, MASSENSPEKTROSKOPISCHEN CHARAKTERISIERUNG VON OBERFLÄCHEN MITTELS EINER RASTERSONDENTECHNIK 有权
标题翻译： FOR当地的方法解决了，质谱表面特性通过网格探针技术手段
公开(公告)号：EP1523652B1
公开(公告)日：2009-04-01
申请号：EP03787732.1
申请日：2003-07-24
申请人： JPK Instruments AG
发明人： KNEBEL, Detlef , AMREIN, Matthias , DREISEWERD, Klaus
IPC分类号： G01B7/34 , G12B21/00 , G01N27/00
CPC分类号： G01Q30/02 , G01Q60/22 , H01J49/04 , Y10S977/849 , Y10S977/86 , Y10S977/863
摘要： The invention relates to a combined method, according to which a high-resolution reproduction of a sample surface is registered using scanning force microscopy and a locally highly resolved chemical nature of the sample surface, said nature being correlated with the reproduction, is measured using mass spectroscopy. The chemical analysis of the surface takes place after the laser desorption of a limited surface area. To achieve said desorption, the surface is illuminated at each relevant point by pulses according to the optical near field principle. The optical near-field principle guarantees an analysis with a local resolution that provides unlimited diffraction. A hollow tip of the measuring probe that is used permits the unique allocation of the chemical analysis to a selected surface area. The highly symmetrical arrangement enables a high degree of transmission of the generated molecular ions.

4. 发明公开

EP1797567A1 VORRICHTUNG UND VERFAHREN ZUR RASTERSONDENMIKROSKOPIE 审中-公开
标题翻译： DEVICE AND METHOD FOR扫描探针显微镜
公开(公告)号：EP1797567A1
公开(公告)日：2007-06-20
申请号：EP05796430.6
申请日：2005-09-30
申请人： nAmbition GmbH
发明人： STRUCKMEIER, Jens , SCHLAGENHAUF, Karl
IPC分类号： G12B21/20 , G12B21/00
CPC分类号： G01Q30/08 , G01Q20/02 , G01Q30/04 , G01Q30/10 , G01Q30/14 , G01Q60/42
摘要： The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.

5. 发明授权

EP0839311B1 INTER-ATOMIC MEASUREMENT TECHNIQUE 失效
标题翻译：原子间的测定方法
公开(公告)号：EP0839311B1
公开(公告)日：2006-08-09
申请号：EP97921980.5
申请日：1997-05-20
申请人： Ohara, Tetsuo
发明人： Ohara, Tetsuo
IPC分类号： G12B21/00 , G01B7/00 , G01N27/00 , G11B9/00
CPC分类号： G01Q10/06 , G11B9/1436 , Y10S977/851
摘要： A method of and apparatus for producing improved real-time continual nanometer scale positioning data of the location of sensing probe used with one of a scanning tunneling microscope, an atomic force microscope, or a capacitive or magnetic field-sensing system, for measuring the probe distance and the position relative to an atomic surface or other periodically undulating surface such as a grating or the like moving relatively with respect to the probe, and between which and the surface there exists a sensing field, through rapid oscillating of the probe under the control of sinusoidal voltages, and comparison of the phase and/or amplitude of the output sinusoidal voltages produce by current in the sensing field to provide positional signals indicative of the direction and distance off the apex of the nearest atom or undulation of the surface; and, where desired, feeding back such positional signals to control the relative movement of the probe and surface; and wherein improved operation is achieved through one or all of eliminating errors caused by phase delays between the sinusoidal voltage driving the probe and its actual oscillation position, particularly when near the probe natural frequency, thereby providing for increased speed, frequency response and reliability; preventing the possible crashing of the probe into the surface and other probe-to-surface gap control problems; providing for absolute positioning; and providing for improved single and multi-probe micromachined probe design particularly of monolithic crystal wafer construction.

6. 发明公开

EP1329686A2 Integrated measuring instrument 审中-公开
标题翻译： IntegriertesMessgerät
公开(公告)号：EP1329686A2
公开(公告)日：2003-07-23
申请号：EP03075156.4
申请日：2003-01-20
申请人： FEI COMPANY
发明人： Muckenhirn, Sylvain G.
IPC分类号： G01B7/34 , G12B21/00
CPC分类号： G01Q30/02 , G01N21/4788 , G01Q40/02 , H01J37/244
摘要： A surface analyzing system including in one system both an integrating optical instrument, such as a scatterometer, and individual-feature-measuring instrument, such as a scanning probe microscope or a beam imaging system, for example, a scanning electron microscope. In a preferred embodiment, the two instruments are capable of characterizing a wafer held on a common stage. The stage may be movable over a predetermined displacement to allow the same area of the wafer to be characterized by a scatterometer at one position of the stage and to be characterized by the scanning probe microscope or beam imaging system. The scatterometer can rapidly measure wafers to indicate whether a problem exists, and the scanning probe microscope can perform detailed measurements on wafers flagged by the scatterometer.
摘要翻译：一种表面分析系统，包括一个系统，诸如散射仪的积分光学仪器和诸如扫描探针显微镜或束成像系统的单独特征测量仪器，例如扫描电子显微镜。在优选实施例中，两个仪器能够表征保持在公共平台上的晶片。舞台可以在预定的位移上移动，以允许晶片的相同面积由阶段的一个位置处的散射仪表征，并且由扫描探针显微镜或束成像系统表征。散射仪可以快速测量晶片以指示是否存在问题，扫描探针显微镜可以对通过散射仪标记的晶片进行详细测量。

7. 发明公开

EP1774389A1 VORRICHTUNG ZUM AUFNEHMEN EINER MESSPROBE 有权转让
标题翻译：设备，用于取得的测量探头
公开(公告)号：EP1774389A1
公开(公告)日：2007-04-18
申请号：EP05775864.1
申请日：2005-08-04
申请人： JPK Instruments AG
发明人： SÜNWOLDT, Olaf , KNEBEL, Detlef
IPC分类号： G02B21/34 , G12B21/00 , G01N21/03
CPC分类号： G01Q30/14 , G01N21/03 , G01N21/0303 , G01N21/0332
摘要： The invention relates to a device for receiving a test sample, particularly sample holders for combined examination of the test sample by a test procedure combined with another test procedure, which differs from the first test procedure, with a planar preparation component (1) in a transparent material with a preparation surface on which the test sample can be prepared, wherein a test path for the introduction of a test facility for carrying out the test procedure is formed on one side of the preparation component (1) and another test path for the introduction of a test facility for carrying out the other test procedure on the test sample is formed on an opposite side of the preparation component (1), wherein a supporting and covering element (3a) which has an aperture (5) through which the test path is formed is pressed against the preparation component (1) on one side (FIG. 1).

8. 发明公开

EP1592057A2 Method and apparatus for removing and/or preventing surface contamination of a probe 审中-公开
标题翻译：方法和装置，以除去表面污染的探针和/或防止。
公开(公告)号：EP1592057A2
公开(公告)日：2005-11-02
申请号：EP05103367.8
申请日：2005-04-26
申请人： Solid State Measurements, Inc.
发明人： Howland Jr., William H. , Healy, James E.
IPC分类号： H01L21/66 , G01R31/28 , G12B21/00 , G12B21/22 , G12B21/04
CPC分类号： B08B5/00 , G01Q60/14 , G01Q60/16 , G01Q70/02 , G01R3/00
摘要： To remove and/or prevent contamination of a probe, at least a portion of the probe is positioned in a chamber having an inlet passage and an outlet passage, with a distal end of the probe extending through the outlet passage and terminating on a side thereof opposite the chamber. A gas is caused to flow through the inlet passage into the chamber and out the outlet passage, thereby modifying an environment surrounding the distal end of the probe. The gas may be heated prior to injection.

9. 发明公开

EP1466333A1 MICROSTRUCTURES 有权
标题翻译：微构造
公开(公告)号：EP1466333A1
公开(公告)日：2004-10-13
申请号：EP02781555.4
申请日：2002-11-21
申请人： International Business Machines Corporation
发明人： CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
IPC分类号： G12B21/00 , G12B21/02 , G01B7/34
CPC分类号： G11C23/00 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/1409 , G11B9/1418 , G11C13/025 , G11C2213/81 , Y10S977/732 , Y10S977/733
摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting microstructure comprises a body portion and a nanotube embedded in the body portion.

10. 发明公开

EP1221606A4 SCANNING TUNNELING MICROSCOPE LIGHT EMITTING/CONDENSING DEVICE 审中-公开
标题翻译： VORRICHTUNG ZUR EMISSION UND ZUM SAMMELN VON LICHTFÜREIN RASTERTUNNELMIKROSKOP
公开(公告)号：EP1221606A4
公开(公告)日：2003-04-09
申请号：EP00953457
申请日：2000-08-17
申请人： JAPAN SCIENCE & TECH CORP
发明人： ARAFUNE RYUICHI , USHIODA SUKEKATSU , SAKAMOTO KENJI
IPC分类号： G01Q60/12 , G01Q30/02 , G01Q60/10 , G01B7/34 , G01N13/12 , G12B21/00
CPC分类号： G01Q60/12 , B82Y35/00 , Y10S362/804 , Y10S977/861 , Y10S977/868
摘要： An object is to provide a light collecting device for scanning tunneling microscope emission spectroscopy which has a higher light collective efficiency in vacuum without sacrifice in a high spatial resolution provided by the STM. The light collecting device for scanning tunneling microscope emission spectroscopy comprises a scanning tunneling microscope, and a plurality of optical fibers (2) radially disposed around a scanning tunneling microscope probe (1) with the tip end of the probe (1) as the center so as to collect light emission in operating this microscope.
摘要翻译：目的是提供一种用于扫描隧道显微镜发射光谱的光收集装置，其在真空中具有较高的光集中效率，而不牺牲由STM提供的高空间分辨率。用于扫描隧道显微镜发射光谱的光收集装置包括扫描隧道显微镜和以探针（1）的尖端为中心的扫描隧道显微镜探针（1）周围径向设置的多个光纤（2）以便在操作该显微镜时收集光照。

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