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1. 发明公开

EP2036096A1 HIGH-SPEED MEASUREMENT, ANALYSIS AND IMAGING SYSTEMS AND METHODS FOR LENGTH SCALES FROM METER TO SUB-NANOMETER 审中-公开
标题翻译： HOCHGESCHWINDIGKEITSMESSUNGS-，分析和成像系统和长度测量仪给作者NM相关方法
公开(公告)号：EP2036096A1
公开(公告)日：2009-03-18
申请号：EP07875106.2
申请日：2007-06-04
申请人： Kley, Victor B.
发明人： Kley, Victor B.
IPC分类号： G12B21/00
CPC分类号： G01B11/002 , G01B11/303 , G01Q30/02 , G01Q30/04
摘要： An system for the measurement, analysis, and imaging of objects and surfaces in a variety of sizes is provided. In the most general terns, the invention relates to a device capable of measuring an object using a combination of low-resolution optical, high-resolution optical, SPM/AFM and/or material analysis techniques. The data gathered at various resolutions is correlated to absolute locations on the object's surface, allowing selected regions of the object's surface to be analyzed to any desired degree of precision (down to atomic scale). In a specific embodiment of the present invention, a system for collecting measurement data regarding an object of interest is disclosed. The system includes a sample stage adapted to hold the object of interest. The system further includes an optical lens assembly disposed above the sample stage. The optical lens assembly is configured to capture an optical image of the object of interest.

2. 发明公开

EP1523652A1 VERFAHREN ZUR ÖRTLICH HOCHAUFGELÖSTEN, MASSENSPEKTROSKOPISCHEN CHARAKTERISIERUNG VON OBERFLÄCHEN MITTELS EINER RASTERSONDENTECHNIK 有权
标题翻译： FOR当地的方法解决了，质谱表面特性通过网格探针技术手段
公开(公告)号：EP1523652A1
公开(公告)日：2005-04-20
申请号：EP03787732.1
申请日：2003-07-24
申请人： JPK Instruments AG
发明人： KNEBEL, Detlef , AMREIN, Matthias
IPC分类号： G01B7/34 , G12B21/00 , G01N27/00
CPC分类号： G01Q30/02 , G01Q60/22 , H01J49/04 , Y10S977/849 , Y10S977/86 , Y10S977/863
摘要： The invention relates to a combined method, according to which a high-resolution reproduction of a sample surface is registered using scanning force microscopy and a locally highly resolved chemical nature of the sample surface, said nature being correlated with the reproduction, is measured using mass spectroscopy. The chemical analysis of the surface takes place after the laser desorption of a limited surface area. To achieve said desorption, the surface is illuminated at each relevant point by pulses according to the optical near field principle. The optical near-field principle guarantees an analysis with a local resolution that provides unlimited diffraction. A hollow tip of the measuring probe that is used permits the unique allocation of the chemical analysis to a selected surface area. The highly symmetrical arrangement enables a high degree of transmission of the generated molecular ions.
摘要翻译：本发明涉及在样品表面的高分辨率图像通过扫描力显微镜的手段和局部高分辨率，化学性质（所有这一切都与此相关）样品表面的由装置测量记录组合的方法通过质谱测定。表面化学分析，受限制的表面积的激光解吸的基础上。为了这个目的，该表面以脉冲形式在每个兴趣点使用光学近场原理照亮。的位置分辨率的光学近场原理担保分析所有未衍射限制。测量探头的中空尖端没有被用于允许该化学分析和所选择的表面区域之间明确的关联。高度对称的布置允许该分子离子的良好的传输产生一样。

3. 发明授权

EP1523652B1 VERFAHREN ZUR ÖRTLICH HOCHAUFGELÖSTEN, MASSENSPEKTROSKOPISCHEN CHARAKTERISIERUNG VON OBERFLÄCHEN MITTELS EINER RASTERSONDENTECHNIK 有权
标题翻译： FOR当地的方法解决了，质谱表面特性通过网格探针技术手段
公开(公告)号：EP1523652B1
公开(公告)日：2009-04-01
申请号：EP03787732.1
申请日：2003-07-24
申请人： JPK Instruments AG
发明人： KNEBEL, Detlef , AMREIN, Matthias , DREISEWERD, Klaus
IPC分类号： G01B7/34 , G12B21/00 , G01N27/00
CPC分类号： G01Q30/02 , G01Q60/22 , H01J49/04 , Y10S977/849 , Y10S977/86 , Y10S977/863
摘要： The invention relates to a combined method, according to which a high-resolution reproduction of a sample surface is registered using scanning force microscopy and a locally highly resolved chemical nature of the sample surface, said nature being correlated with the reproduction, is measured using mass spectroscopy. The chemical analysis of the surface takes place after the laser desorption of a limited surface area. To achieve said desorption, the surface is illuminated at each relevant point by pulses according to the optical near field principle. The optical near-field principle guarantees an analysis with a local resolution that provides unlimited diffraction. A hollow tip of the measuring probe that is used permits the unique allocation of the chemical analysis to a selected surface area. The highly symmetrical arrangement enables a high degree of transmission of the generated molecular ions.

4. 发明公开

EP1797567A1 VORRICHTUNG UND VERFAHREN ZUR RASTERSONDENMIKROSKOPIE 审中-公开
标题翻译： DEVICE AND METHOD FOR扫描探针显微镜
公开(公告)号：EP1797567A1
公开(公告)日：2007-06-20
申请号：EP05796430.6
申请日：2005-09-30
申请人： nAmbition GmbH
发明人： STRUCKMEIER, Jens , SCHLAGENHAUF, Karl
IPC分类号： G12B21/20 , G12B21/00
CPC分类号： G01Q30/08 , G01Q20/02 , G01Q30/04 , G01Q30/10 , G01Q30/14 , G01Q60/42
摘要： The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.

5. 发明授权

EP0839311B1 INTER-ATOMIC MEASUREMENT TECHNIQUE 失效
标题翻译：原子间的测定方法
公开(公告)号：EP0839311B1
公开(公告)日：2006-08-09
申请号：EP97921980.5
申请日：1997-05-20
申请人： Ohara, Tetsuo
发明人： Ohara, Tetsuo
IPC分类号： G12B21/00 , G01B7/00 , G01N27/00 , G11B9/00
CPC分类号： G01Q10/06 , G11B9/1436 , Y10S977/851
摘要： A method of and apparatus for producing improved real-time continual nanometer scale positioning data of the location of sensing probe used with one of a scanning tunneling microscope, an atomic force microscope, or a capacitive or magnetic field-sensing system, for measuring the probe distance and the position relative to an atomic surface or other periodically undulating surface such as a grating or the like moving relatively with respect to the probe, and between which and the surface there exists a sensing field, through rapid oscillating of the probe under the control of sinusoidal voltages, and comparison of the phase and/or amplitude of the output sinusoidal voltages produce by current in the sensing field to provide positional signals indicative of the direction and distance off the apex of the nearest atom or undulation of the surface; and, where desired, feeding back such positional signals to control the relative movement of the probe and surface; and wherein improved operation is achieved through one or all of eliminating errors caused by phase delays between the sinusoidal voltage driving the probe and its actual oscillation position, particularly when near the probe natural frequency, thereby providing for increased speed, frequency response and reliability; preventing the possible crashing of the probe into the surface and other probe-to-surface gap control problems; providing for absolute positioning; and providing for improved single and multi-probe micromachined probe design particularly of monolithic crystal wafer construction.

6. 发明公开

EP1329686A2 Integrated measuring instrument 审中-公开
标题翻译： IntegriertesMessgerät
公开(公告)号：EP1329686A2
公开(公告)日：2003-07-23
申请号：EP03075156.4
申请日：2003-01-20
申请人： FEI COMPANY
发明人： Muckenhirn, Sylvain G.
IPC分类号： G01B7/34 , G12B21/00
CPC分类号： G01Q30/02 , G01N21/4788 , G01Q40/02 , H01J37/244
摘要： A surface analyzing system including in one system both an integrating optical instrument, such as a scatterometer, and individual-feature-measuring instrument, such as a scanning probe microscope or a beam imaging system, for example, a scanning electron microscope. In a preferred embodiment, the two instruments are capable of characterizing a wafer held on a common stage. The stage may be movable over a predetermined displacement to allow the same area of the wafer to be characterized by a scatterometer at one position of the stage and to be characterized by the scanning probe microscope or beam imaging system. The scatterometer can rapidly measure wafers to indicate whether a problem exists, and the scanning probe microscope can perform detailed measurements on wafers flagged by the scatterometer.
摘要翻译：一种表面分析系统，包括一个系统，诸如散射仪的积分光学仪器和诸如扫描探针显微镜或束成像系统的单独特征测量仪器，例如扫描电子显微镜。在优选实施例中，两个仪器能够表征保持在公共平台上的晶片。舞台可以在预定的位移上移动，以允许晶片的相同面积由阶段的一个位置处的散射仪表征，并且由扫描探针显微镜或束成像系统表征。散射仪可以快速测量晶片以指示是否存在问题，扫描探针显微镜可以对通过散射仪标记的晶片进行详细测量。

7. 发明公开

EP1938334A2 OSCILLATOR AND METHOD OF MAKING FOR ATOMIC FORCE MICROSCOPE AND OTHER APPLICATIONS 审中-公开
标题翻译：振荡器及方法显微镜原子部队和其他应用
公开(公告)号：EP1938334A2
公开(公告)日：2008-07-02
申请号：EP06813545.8
申请日：2006-08-18
申请人： BEYDER, Arthur , SACHS, Frederick
发明人： BEYDER, Arthur , SACHS, Frederick
IPC分类号： G12B21/00 , G12B21/08
CPC分类号： G01Q10/045 , G01Q60/38 , Y10T29/49 , Y10T29/49007 , Y10T74/10
摘要： A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.

8. 发明授权

EP1333436B1 Record condition extraction system and method for a dielectric recording medium, and information recording apparatus 有权
标题翻译：系统和方法，用于介电存储介质和信息存储装置中提取的存储状态
公开(公告)号：EP1333436B1
公开(公告)日：2006-12-27
申请号：EP03002234.7
申请日：2003-01-31
申请人： Pioneer Corporation , Cho, Yasuo
发明人： Cho, Yasuo , Onoe, Atsushi c/o Pioneer Corporation
IPC分类号： G11B9/00 , G11B9/02 , G11B9/06 , G11B9/07 , G11B9/08 , G11B11/00 , G02B21/00 , G12B21/00
CPC分类号： B82Y10/00 , G11B9/02 , G11B9/14 , G11B9/1472 , G11B11/007 , G11B11/08

9. 发明公开

EP1544864A1 Contact probe storage sensor POD 审中-公开
标题翻译： Speechersensor mit Kontaktprobe
公开(公告)号：EP1544864A1
公开(公告)日：2005-06-22
申请号：EP04015148.2
申请日：2004-06-28
申请人： Hewlett-Packard Development Company, L.P.
发明人： Mejia, Robert Guido
IPC分类号： G12B21/00
CPC分类号： G01Q60/58 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1445 , G11B11/06 , G11B11/08 , G11B13/00 , G11B2005/0021
摘要： An embodiment of a read mechanism used in a contact atomic resolution storage system, has a cantilever (106) disposed with a medium (101) which is movable relative to the cantilever, the cantilever having a probe (104) which extends from the cantilever and which contacts a surface of the medium; a pod (114) formed on a side of the cantilever facing the medium, the pod extending toward the media; and a sensor element (108, 116) formed on the pod so as to juxtapose the medium.
摘要翻译：在接触原子分辨率存储系统中使用的读取机构的实施例具有悬臂（106），其布置有可相对于悬臂运动的介质（101），悬臂具有从悬臂延伸的探针（104）和其接触介质的表面; 形成在面向所述介质的所述悬臂的一侧上的容器（114），所述容器朝向所述介质延伸; 以及形成在所述容器上的传感器元件（108,116），以便将所述介质并置。

10. 发明公开

EP1543152A1 CONTROLLED ALIGNMENT OF NANOBARCODES ENCODING SPECIFIC INFORMATION FOR SCANNING PROBE MICROSCOPY (SPM) READING 有权
标题翻译：纳米条形码的排列受控对探针显微分析具体所包含的信息GRID
公开(公告)号：EP1543152A1
公开(公告)日：2005-06-22
申请号：EP03752088.9
申请日：2003-09-05
申请人： INTEL CORPORATION
发明人： CHAN, Selena , SU, Xing , YAMAKAWA, MIneo
IPC分类号： C12Q1/68 , G01N33/543 , G12B21/00
CPC分类号： C12Q1/6816 , B82Y5/00 , B82Y10/00 , B82Y30/00 , Y10S977/702 , Y10S977/704 , Y10S977/705 , Y10S977/728 , Y10S977/729 , Y10S977/734 , Y10S977/742 , Y10S977/773 , Y10S977/774 , Y10S977/924 , C12Q2565/601 , C12Q2563/185
摘要： The methods, apparatus and compositions disclosed herein concern the detection, identification and/or sequencing of biomolecules, such as nucleic acids or proteins. In certain embodiments of the invention, coded probes comprising a probe molecule attached to one or more nanobarcodes may be allowed to bind to one or more target molecules. After binding and separation from unbound coded probes, the bound coded probes may be aligned on a surface and analyzed by scanning probe microscopy. The nanobarcodes may be any molecule or complex that is distinguishable by SPM, such as carbon nanotubes, fullerenes, submicrometer metallic barcodes, nanoparticles or quantum dots. Where the probes are oligonucleotides, adjacent coded probes hybridized to a target nucleic acid may be ligated together before alignment and SPM analysis. Compositions comprising coded probes are also disclosed herein. Systems for biomolecule analysis may comprise an SPM instrument and at least one coded probe attached to a surface.

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