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1. 发明公开

EP1733180A1 OPTICAL READHEAD 审中-公开
标题翻译：光学阅读器
公开(公告)号：EP1733180A1
公开(公告)日：2006-12-20
申请号：EP05717892.3
申请日：2005-03-04
申请人： Renishaw plc
发明人： MCMURTRY, David Roberts , HENSHAW, James Reynolds , HOMER, Michael , CHAPMAN, Mark Adrian Vincent , CHANEY, Raymond John , LEE, William Ernest , SLACK, Jason Kempton
IPC分类号： G01B9/02
CPC分类号： G01B9/02081 , G01B9/02041 , G01B9/02084 , G01B2290/70 , G01J9/02 , G01J2009/0234 , G01J2009/0261
摘要： Interferometry apparatus which comprises a measurement light beam (2a, 2b) and a reference light beam (2c, 2d) which interact with each other to cause a spatial fringe pattern (24). An optical device (12) is provided which interacts with the spatial fringe pattern (24), such that light is spatially separated into different directions (30, 32, 34, 36). The intensity modulation in two or more directions of the spatially separated light is phase shifted. The optical device may comprise, for example, a diffractive device, a refractive device or a diffractive optical element.

2. 发明公开

EP1577637A1 Optical heterodyne interferometer for shape measurement 有权
标题翻译： Optische Bildmessvorrichtung
公开(公告)号：EP1577637A1
公开(公告)日：2005-09-21
申请号：EP05005271.1
申请日：2005-03-10
申请人： Kabushiki Kaisha TOPCON
发明人： Chan, Kinpui , Akiba, Masahiro , Fukuma, Yasufumi Kabushiki Kaisha TOPCON , Otsuka, Hiroyuki Kabushiki Kaisha TOPCON , Tsukada, Hisashi Kabushiki Kaisha TOPCON
IPC分类号： G01B11/24 , G01B9/02 , G01J9/04
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02041 , G01B9/02069 , G01B2290/45 , G01J2009/0234
摘要： An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.
摘要翻译：提供一种能够有效地获得由干涉光的背景光组成的外差信号的直流分量的光学图像测量装置。光学图像测量装置包括：光学干涉系统，其中来自光源的光束被分束器分成信号光和参考光，参考光的频率被移频器偏移，并且信号光通过被测量物体传播并且通过分束器将反射在反射镜上的参考光相互叠加以产生干涉光; 分束器，用于将干涉光分成干涉光束; 用作强度调制单元的快门，用于以预定间隔调制各个干涉光束的强度; 用于接收其强度被调制并输出电信号的各个干涉光束的CCD; 以及信号处理部分，用作计算单元，用于基于输出的电信号计算与干涉光的背景光相对应的直流分量的强度。

3. 发明授权

EP1577637B1 Optical image measuring apparatus 有权
标题翻译： OPTISCHE Bildmessvorrichtung
公开(公告)号：EP1577637B1
公开(公告)日：2012-11-14
申请号：EP05005271.1
申请日：2005-03-10
申请人： Kabushiki Kaisha TOPCON
发明人： Chan, Kinpui , Akiba, Masahiro , Fukuma, Yasufumi Kabushiki Kaisha TOPCON , Otsuka, Hiroyuki Kabushiki Kaisha TOPCON , Tsukada, Hisashi Kabushiki Kaisha TOPCON
IPC分类号： G01B11/24 , G01B9/02 , G01J9/04
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02041 , G01B9/02069 , G01B2290/45 , G01J2009/0234

4. 发明公开

EP2318810A2 USES OF ELECTROMAGNETIC INTERFERENCE PATTERNS 有权
标题翻译：用途电磁干扰PATTERN
公开(公告)号：EP2318810A2
公开(公告)日：2011-05-11
申请号：EP09785006.9
申请日：2009-08-25
申请人： The University Court Of The University Of Glasgow
发明人： WEAVER, Jonathan, Mark, Ralph , DOBSON, Phillip, Stephen , BURT, David, Paul , THOMS, Stephen , DOCHERTY, Kevin, Edward , ZHANG, Yuan
IPC分类号： G01D5/26 , G01D11/00
CPC分类号： G01D5/266 , G01D5/38 , G01D11/00 , G01J9/0246 , G01J2009/0234 , G01N21/45 , G03H1/0005
摘要： Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern.

5. 发明授权

EP2318810B1 USES OF ELECTROMAGNETIC INTERFERENCE PATTERNS 有权
公开(公告)号：EP2318810B1
公开(公告)日：2018-08-01
申请号：EP09785006.9
申请日：2009-08-25
申请人： The University Court Of The University Of Glasgow
发明人： WEAVER, Jonathan, Mark, Ralph , DOBSON, Phillip, Stephen , BURT, David, Paul , THOMS, Stephen , DOCHERTY, Kevin, Edward , ZHANG, Yuan
IPC分类号： G01D11/00 , G01D5/26 , G01D5/38 , G01J9/02 , G01N21/45 , G03H1/00
CPC分类号： G01D5/266 , G01D5/38 , G01D11/00 , G01J9/0246 , G01J2009/0234 , G01N21/45 , G03H1/0005
摘要： Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern.

6. 发明公开

EP0341960A3 Method for improving performance of a laser interferometer in the presence of wavefront distortion 失效
标题翻译：改善激光干涉仪在波形失真存在下的性能的方法
公开(公告)号：EP0341960A3
公开(公告)日：1990-10-03
申请号：EP89304644.1
申请日：1989-05-08
申请人： Hewlett-Packard Company
发明人： Wayne, Kenneth.J.
IPC分类号： G01J9/02 , G01B9/02
CPC分类号： G01B9/02041 , G01B9/02059 , G01J9/02 , G01J2009/0234 , G01J2009/0261 , G01J2009/0284
摘要： Method and apparatus for obtaining an enhanced clearer measurement signal with improved fringe contrast from a laser interferometer. The interferometer sends a laser beam (12) through atmospheric air to a polarizing or nonpolarizing beamsplitter (13) that sends one laser beam portion (14,16) to a fixed reference retroreflector (15) and another portion (19,21) to a movable measurement retroreflector (20). Both beams, upon retroreflection go back to the beamsplitter and are recombined to produce a combined beam (22) that is then sent to an aperture (30) such that only a small selected portion of that combined beam passes through the aperture, attenuating the energy of the combined beam but increasing its fringe contrast. This portion is sent to a detector (32) and is subsequently amplified by a high-gain amplifier.
摘要翻译：用于从激光干涉仪获得具有改进的条纹对比度的增强的更清晰的测量信号的方法和装置。干涉仪将激光束（12）通过大气引导到偏振或非偏振分束器（13），该分束器将一个激光束部分（14,16）发送到固定参考后向反射器（15），另一部分（19,21）发送到可移动测量回射器（20）。两个光束在逆反射时返回分束器并被重新组合以产生组合的光束（22），然后将组合的光束（22）发送到孔（30），使得只有该组合光束的小的选定部分通过孔径，衰减能量的组合光束，但增加其条纹对比度。该部分被发送到检测器（32），随后被高增益放大器放大。

7. 发明公开

EP0341960A2 Method for improving performance of a laser interferometer in the presence of wavefront distortion 失效
标题翻译：一种用于改善在波前变形的存在的激光干涉仪的性能的方法。
公开(公告)号：EP0341960A2
公开(公告)日：1989-11-15
申请号：EP89304644.1
申请日：1989-05-08
申请人： Hewlett-Packard Company
发明人： Wayne, Kenneth.J.
IPC分类号： G01J9/02 , G01B9/02
CPC分类号： G01B9/02041 , G01B9/02059 , G01J9/02 , G01J2009/0234 , G01J2009/0261 , G01J2009/0284
摘要： Method and apparatus for obtaining an enhanced clearer measurement signal with improved fringe contrast from a laser interferometer. The interferometer sends a laser beam (12) through atmospheric air to a polarizing or nonpolarizing beamsplitter (13) that sends one laser beam portion (14,16) to a fixed reference retroreflector (15) and another portion (19,21) to a movable measurement retroreflector (20). Both beams, upon retroreflection go back to the beamsplitter and are recombined to produce a combined beam (22) that is then sent to an aperture (30) such that only a small selected portion of that combined beam passes through the aperture, attenuating the energy of the combined beam but increasing its fringe contrast. This portion is sent to a detector (32) and is subsequently amplified by a high-gain amplifier.
摘要翻译：用于与从激光干涉条纹改进造影增强的更清晰的测量信号的获取方法和装置。干涉仪发送，通过大气的激光束（12）的偏振或非偏振分束器（13）没有在发送部分中的一个激光束（14,16），以固定的参考后向反射器（15）而另一部分（19,21）到可动测量后向反射器（20）。两个光束中，在回射返回到分束器和再结合以产生组合光束（22）并然后被发送到在孔（30）检测只做的并组合光束的小的选定部分通过所述开口部，衰减的能量的组合波束的但增加其条纹对比度。该部分被发送到检测器（32），并随后通过一个高增益放大器放大。

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