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    • 2. 发明公开
    • INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
    • 具有共模抑制的共模抑制惯性传感器
    • EP3106833A3
    • 2017-05-03
    • EP16174422.2
    • 2016-06-14
    • NXP USA, Inc.
    • Singer, StefanGerster, JochenHerrmann, StephanNeff, Albrecht
    • G01C19/574G01P1/00G01C19/5733
    • G01C19/5621G01C19/5614G01C19/5733
    • A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
    • MEMS器件包括耦合一对可移动质量的两个弹簧系统。 每个弹簧系统包括约束刚性梁和一对挠曲件,其中一个挠曲件直接联接到刚性梁的一端并且联接到一个可运动质量块,并且另一个挠曲件直接联接到刚性件的相对端 梁和另一个可移动的质量。 响应于可动质量块的驱动运动,挠曲件能够使受约束的刚性梁枢转运动,使得刚性梁围绕其中心铰接点在相反方向上枢转。 这种枢转运动使得驱动质量块的反相线性振荡运动成为可能,同时基本上抑制或以其他方式拒绝可动质量块的同相运动。
    • 3. 发明公开
    • INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
    • 传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG
    • EP3106833A2
    • 2016-12-21
    • EP16174422.2
    • 2016-06-14
    • NXP USA, Inc.
    • Singer, StefanGerster, JochenHerrmann, StephanNeff, Albrecht
    • G01C19/574G01P1/00G01C19/5733
    • G01C19/5621G01C19/5614G01C19/5733
    • A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
    • MEMS装置包括耦合一对可移动质量块的两个弹簧系统。 每个弹簧系统包括受约束的刚性梁和一对挠曲,其中一个挠曲件直接联接到刚性梁的一端和一个可移动质量块,另一个挠曲件直接联接到刚性梁的相对端 梁和另一个移动块。 响应于可移动质量块的驱动运动,挠曲能够使约束的刚性梁枢转运动,使得刚性梁在相对的方向绕其中心铰链点枢转。 该枢转运动使得驱动质量的反相线性振荡运动能够基本上抑制或以其他方式拒绝可移动质量块的同相运动。