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    • 7. 发明公开
    • ISOLATOR SYSTEM
    • EP3964289A1
    • 2022-03-09
    • EP21205180.9
    • 2018-01-05
    • JGC Japan Corporation
    • KOJIMA, Takeshi
    • B01L1/02B25J21/02C12M1/12G21F7/04
    • An isolator system includes a glove box 11 that forms an operation space for performing an internal operation and is provided with a glove 14, an intake port 12 for taking a gas into a buffer space 10a, an operation space side gas supply unit 17 for taking an inert gas to the operation space 10 and an exhaust port 13 connected to an exhaust pipe 21 for exhausting the gas. A flow rate regulation mechanism 22 regulates an exhaust flow rate of the gas, which is exhausted to the exhaust pipe 21, to an exhaust flow rate where a differential pressure which is set in advance can be formed between an operation space 10 and an outside of the glove box 11 by a differential pressure forming portion 121 provided in the intake port 12. Moreover, the operation space side gas supply unit 17 is configured such that a flow rate of the operation space gas supplied from the operation space side gas supply unit 17 is set at a flow rate where a pressure loss occurring when the buffer gas passes through a differential pressure forming portion 121 of the buffer side gas supply unit 16 becomes larger than a pressure loss occurring when the operation space gas passes through a filter 182.