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    • 1. 发明公开
    • STATIC ELIMINATOR
    • EP3354117A1
    • 2018-08-01
    • EP16784301.0
    • 2016-09-23
    • Alpha Innovation Inc.
    • LARKIN, William, J., Sr.LARKIN, William, J., Jr.
    • H05F3/02
    • H05F3/06H05F3/02
    • The present invention relates to a protective ionizing laminate (PIL) static eliminating device that uses a wide variety of laminate materials to protect ionizing points that eliminate static. In an embodiment, the protective encasement is made from laminate and in others it is made from a substrate onto which of electrically conductive or static dissipative material is printed or placed. The present invention includes a plurality of electrically conductive or static dissipative material or microfibers, wherein the plurality of electrically conductive or static dissipative material or microfibers forms a pattern and a ground in communication with the electrically conductive or static dissipative microfibers or material. The laminate materials form an encasement or enclosure of the electrically conductive or static dissipative microfibers or material and at least a portion of the ground. The PIL of the present invention includes an edge or slit in the enclosure that exposes the plurality of electrically conductive or static dissipative material or microfibers at the edge or slit to create a series of ionizing points. When air between the ionizing points and charged material passes by or near the PIL static eliminating device, the PIL sufficiently removes or reduces static charge from the passing material.
    • 7. 发明公开
    • Ionization system
    • Ionisierungssystem
    • EP0987929A2
    • 2000-03-22
    • EP99115192.9
    • 1999-08-16
    • ILLINOIS TOOL WORKS INC.
    • Richie, William S., Jr.Rodrigo, Richard D.Hall, Philip R.
    • H05F3/04H01T23/00
    • H01T23/00H05F3/06Y10T307/839
    • A room ionization system includes a plurality of emitter modules, each including an electrical ionizer. The emitter modules are spaced around the room and are connected in a daisy-chain manner to a system controller. Each emitter module has an individual address for allowing the system controller or a remote control transmitter to individually address and control each emitter module. Electrical lines containing both power and communication lines connect the plurality of emitter modules with the system controller. Each emitter module stores a balance reference value and an ion output current reference value for use by automatic balance control and automatic ion output current control circuitry. These reference values are stored in a software-adjustable memory so that they may be easily changed via the system controller or via the remote control transmitter if actual measured balance or decay times in the work space, such as measured by a charged plate monitor, indicate an ion imbalance or out of range ion output current. Each emitter module can send detailed alarm condition information and emitter module identification information to the system controller upon detection of a malfunction. Each emitter module connected to the system controller may be individually set to a desired operating power mode. The emitter modules use a switching power supply to lessen effects of line loss. Each emitter module includes miswire protection circuitry so that the electrical lines may be automatically flipped if initially connected in the reverse manner.
    • 室内电离系统包括多个发射器模块,每个发射器模块包括电离器。 发射器模块围绕房间隔开,并以菊花链方式连接到系统控制器。 每个发射器模块都有一个单独的地址,用于允许系统控制器或遥控发射器单独地寻址和控制每个发射器模块。 包含电源和通信线路的电气线路将多个发射器模块与系统控制器连接。 每个发射器模块存储用于自动平衡控制和自动离子输出电流控制电路的平衡参考值和离子输出电流参考值。 这些参考值存储在软件可调整的存储器中,使得如果通过充电板监视器测量的工作空间中的实际测量平衡或衰减时间(如通过充电板监视器测量)指示,则可以经由系统控制器或经由遥控发射器容易地改变 离子失衡或超出离子输出电流。 每个发射器模块可以在发现故障时向系统控制器发送详细的报警条件信息和发射器模块识别信息。 连接到系统控制器的每个发射器模块可以被单独设置为期望的操作功率模式。 发射器模块使用开关电源来减少线路损耗的影响。 每个发射器模块包括错线保护电路,使得如果最初以相反的方式连接,则电线可以被自动翻转。
    • 9. 发明公开
    • APPARATUS FOR NEUTRALIZING CHARGED BODY
    • VORRICHTUNG ZUR NEUTALISIERUNG EINES GELADENENKÖRPERS。
    • EP0597103A1
    • 1994-05-18
    • EP92916221.2
    • 1992-07-24
    • TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHAOHMI, Tadahiro
    • OHMI, Tadahiro, 1-17-301, Komegabukuro 2-chomeINABA, Hitoshi, 24-8, Nakamachi 3-chome
    • H01L21/02H05H1/26G02F1/13H05F3/06G21K1/14H01L21/00
    • H05F3/06G21K1/14
    • An apparatus which can neutralize charged bodies such as processed substrates for semiconductor devices and for flat display, free from electromagnetic noise, impurity contamination, and residual potentials. To process in a prescribed way a wafer (5) to be processed, the wafer (5) is, for example, moved from a pretreatment chamber (2) to a low pressure reaction chamber (3). In this case, a gas, which does not react on the wafer, such as nitrogen and argon, is introduced into the pretreatment chamber (2), and is kept under a predetermined pressure by a vacuum pump (15). Then, ultraviolet rays are projected in the pretreatment chamber (2) from an ultraviolet rays lamp (11) constituting a means for generating neutralization charges, and positive and negative floating charged particles (electrons and positive ions) are generated by exciting the atmosphere in the chamber (2). Since the charges are removed by projecting the ultraviolet rays from the outsides of a case (1) and the case (2) and moreover in a non-contact way, no electromagnetic noise is generated and the residual potentials are vanished too.
    • 可以中和带电体的装置,例如半导体器件的处理衬底和平面显示器,没有电磁噪声,杂质污染和残留电位。 为了以规定的方式处理要处理的晶片(5),晶片(5)例如从预处理室(2)移动到低压反应室(3)。 在这种情况下,将不与晶圆反应的气体(例如氮气和氩气)引入预处理室(2),并通过真空泵(15)保持在预定压力下。 然后,从构成产生中和电荷的装置的紫外线灯(11)将紫外线投射到预处理室(2)中,通过激发正极和负的浮动带电粒子(电子和正离子) 室(2)。 由于通过从壳体(1)和壳体(2)的外侧投射紫外线而且以非接触方式移除电荷,因此不会产生电磁噪声并且剩余电位也消失。
    • 10. 发明公开
    • EQUIPMENT FOR NEUTRALIZING CHARGED MATERIAL
    • VORRICHTUNG ZUM NEURTRICISENE ELEKTRISCH GELADENEN材料。
    • EP0546178A1
    • 1993-06-16
    • EP91914621.7
    • 1991-08-20
    • TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHAOHMI, Tadahiro
    • OHMI, Tadahiro, 1-17-301, Komegabukuro 2-chomeINABA, H., Takasago Netsugaku K.K.K.Sogokenkyushu
    • H05F3/06
    • H01L21/67017H05F3/06
    • Neutralizing equipment which can realize simply and effectively the removal of the charges on a charged body such as a wafer which is easily charged. For example, after such an easily chargeable body as a wafer (3) is transported into a case (1), if if neutralizing-charge producing means which are typically light sources (8a, 8b) for projecting ultraviolet rays for exciting into the case (1) is operated, the case (1) is filled with ions which are produced by ionizing the atmosphere gas, etc. of a nonreactive gas, etc. introduced beforehand in the case (1). Hereupon, the neutralizing-charge producing means can produce positive and negative ions and electrons. When the body is charged positively, the electrons or negative ions are moved toward the charge body to neutralize the positive charges on the charged body. On the other hand, when the body is charged negatively, the positive ions produced in the case (1) are moved toward the charged body to neutralize the negative charges thereon.
    • 中和设备可以简单有效地实现诸如容易充电的晶片等带电体的电荷的去除。 例如,在将这样的容易充电的本体作为晶片(3)传送到壳体(1)中之后,如果中和电荷产生装置通常是用于将紫外线投射到壳体中的光源(8a,8b) 如图1所示),情况(1)中填充有离子,该离子是通过电离室内(1)中预先引入的非反应性气体等的气氛气体等产生的。 因此,中和电荷产生装置可以产生正负离子和电子。 当身体被正电充电时,电子或负离子朝向充电体移动以中和带电体上的正电荷。 另一方面,当身体被负电荷时,在情况(1)中产生的正离子朝向带电体移动以中和其上的负电荷。