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1. 发明公开

EP2557689A1 Breath-mode ring resonator structure, and method of designing, operating and using same 审中-公开
标题翻译：环形谐振器与呼吸模式和设计，操作和使用方法及其
公开(公告)号：EP2557689A1
公开(公告)日：2013-02-13
申请号：EP12191245.5
申请日：2006-08-11
申请人： ROBERT BOSCH GMBH
发明人： Partridge, Aaron , Lutz, Markus , Pan, Zhiyu
IPC分类号： H03H9/02 , H03H3/007 , H03H9/24
CPC分类号： H03H9/2431 , H03H3/0077 , H03H9/0023 , H03H9/02244 , H03H9/02259 , H03H9/02338 , H03H2009/02354 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527
摘要： The present invention is directed to a microelectromechanical ring resonator structures having a substantially circular outer surface and substantially circular inner surface. The microelectromechanical ring resonator(s) include an anchor support element (26) having an impedance matching structure (28) coupled to at least one substrate anchor (30). The impedance matching structure may be a beam, having a predetermined length, which couples the ring resonator(s) to substrate anchor. In one embodiment, the impedance matching structure operates in a bulk-elongation mode. In another embodiment, the impedance matching structure operates in a flexure mode. In operation, when induced, the microelectromechanical ring resonator structure oscillates in an elongating/compressing or breathing mode (or in a primarily or substantially elongating or breathing mode). In this regard, the ring resonator structure exhibits an elongating/compressing-like or breathing-like motion.
摘要翻译：本发明涉及具有基本上为圆形的外表面和基本上为圆形的内表面的微机电环形谐振器结构。微机电谐振器环（一个或多个）包括耦合到至少一个锚定基片（30）的锚定支撑件（26），其具有在阻抗匹配结构（28）。阻抗匹配结构可以是光束，具有预定长度，其耦合环形谐振器（多个）到锚基材。在一个中，实施方式的阻抗匹配结构工作于散装伸长模式。在另一个，本实施例的阻抗匹配结构工作于挠曲模式。在操作中，当诱导时，微机电谐振器结构环振荡在伸长/压缩或呼吸模式（或者在主要的或基本上拉长或呼吸模式）。在这方面，在伸长/压缩状或呼吸状运动的环形谐振器结构展品。

2. 发明公开

EP1797395A1 RESONATEUR A MASSES OSCILLANTES 审中-公开
标题翻译： RESONATEUR A A MASSES OSCILLANTES
公开(公告)号：EP1797395A1
公开(公告)日：2007-06-20
申请号：EP05810750.9
申请日：2005-10-05
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： DELEVOYE, Elisabeth
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , H03H9/02275 , H03H9/02338 , H03H9/2405 , H03H9/2431 , H03H2009/02354 , H03H2009/02503 , H03H2009/2442
摘要： The suspension and coupling beams (14, 15, 16, 17) of the oscillating masses (11, 12) in a device used for example as rate gyro and comprising oscillating masses (11, 12) form a single and continuous system allowing compact construction of the device. Preferably, a junction beam (16) surrounds the two oscillating masses.
摘要翻译：振荡质量体（11,12）在例如用作速率陀螺仪并包括振荡质量体（11,12）的装置中的悬挂梁和耦合梁（14,15,16,17）形成单个且连续的系统，从而允许紧凑的结构的设备。优选地，接合梁（16）围绕两个振动质量。

3. 发明公开

EP0461761A1 Inertial sensors 有权转让
标题翻译： Trägheitssensoren。
公开(公告)号：EP0461761A1
公开(公告)日：1991-12-18
申请号：EP91304327.9
申请日：1991-05-14
申请人： BRITISH AEROSPACE PUBLIC LIMITED COMPANY
发明人： Varnham, M.P., British Aerospace Public Ltd. Co. , Norris, T.S., British Aerospace Public Ltd., Co. , Hodgins, D., British Aerospace Public Ltd., Co. , Thomas, H.D., British Aerospace Public Ltd., Co.
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5684 , G01P15/14 , H03H2009/02354
摘要： A vibrating planar ring (10) or hoop-like structure (10) is disclosed. The structure is suspended in space by a suitable support mount (22,53) for detecting turning rate, linear acceleration and angular acceleration. Turning rate is sensed by detecting vibrations coupled by Coriolis forces, whereas linear acceleration and angular acceleration are sensed by lateral, vertical and rocking movement of the entire ring (10) or hoop-like structure (10) within its mount.
摘要翻译：公开了一种振动平面环（10）或环形结构（10）。结构通过合适的支撑座（22,53）悬挂在空间中，用于检测转速，线性加速度和角加速度。通过检测由科里奥利力耦合的振动感测转弯速率，而线性加速度和角加速度通过整个环（10）或环形结构（10）在其安装件内的横向，垂直和摇摆运动来感测。

4. 发明公开

EP2347506A1 FRAME-SHAPED MEMS PIEZORESISTIVE RESONATOR 有权
标题翻译：框架式MEMS压电谐振器
公开(公告)号：EP2347506A1
公开(公告)日：2011-07-27
申请号：EP09740991.6
申请日：2009-10-13
申请人： NXP B.V.
发明人： PHAN LE, Kim , VAN BEEK, Jozef, T.M
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/02259 , H03H9/2431 , H03H2009/02307 , H03H2009/02354 , H03H2009/02496
摘要： A novel Si MEMS piezoresistive resonator is described. The resonator has a shape of a frame, such as a ring or a polygon frame, which has two or more anchors. Electrodes located at the outer or inner rim of the resonant structure are used to excite the structure electrostatically into resonance with a desired mode shape. One or plurality of locally doped regions on the structure is used for piezoresistive readout of the signal. In the most preferred embodiments, the structure is a ring, which has four anchors, two electrodes and four piezoresistive regions at different segments of the structure. The piezoresistive regions are alternatively located at the outer rim and inner rim of the structure in such a way that the piezoresistive signals of the same sign from different regions can be collected. Advantages of this device are large readout signal, large electrode area, robustness, suppressed out-of-plane vibration and larger usable linear range.
摘要翻译：描述了一种新型Si MEMS压阻式谐振器。谐振器具有框架的形状，例如具有两个或更多个锚定件的环或多边形框架。位于谐振结构的外缘或内缘处的电极用于以期望的模式形状静电地激励该结构成共振。该结构上的一个或多个局部掺杂区域用于信号的压阻读出。在最优选的实施例中，该结构是环，其在结构的不同部分具有四个锚，两个电极和四个压阻区。压阻区域可选地位于结构的外缘和内缘处，使得可以收集来自不同区域的相同符号的压阻信号。该器件的优点是读出信号大，电极面积大，鲁棒性好，抑制了平面外振动和更大的可用线性范围。

5. 发明公开

EP1676096A2 X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 有权
标题翻译：具有垂直集成电子元件及密封封装晶片规模x-y轴双质体STIMMGABEL GYRO
公开(公告)号：EP1676096A2
公开(公告)日：2006-07-05
申请号：EP04795573.7
申请日：2004-10-12
申请人： Invensense Inc.
发明人： NASIRI, Steven S. , SEEGER, Joseph
IPC分类号： G01C19/00
CPC分类号： G01C19/5712 , G01C19/5719 , H03H2009/02354
摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.

6. 发明公开

EP1658675A2 MICROMECHANICAL RESONATOR DEVICE AND METHOD OF MAKING THE MICROMECHANICAL RESONATOR DEVICE 审中-公开
标题翻译： MICRO机械谐振器和方法，用于制备微机械装置
公开(公告)号：EP1658675A2
公开(公告)日：2006-05-24
申请号：EP03816755.7
申请日：2003-12-17
申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN
发明人： NGUYEN, Clark, T., C. , ABDELMONEUM, Mohamed, A.
IPC分类号： H03H1/00
CPC分类号： H03H9/02338 , H03H3/0072 , H03H9/2431 , H03H9/2436 , H03H2009/02354 , H03H2009/02503
摘要： A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.

7. 发明授权

EP2409403B1 RESONATOR DEVICE AND METHOD OF OPTIMIZING A Q-FACTOR 有权
标题翻译：谐振器装置和优化Q因子的方法
公开(公告)号：EP2409403B1
公开(公告)日：2017-12-27
申请号：EP10710446.5
申请日：2010-03-15
申请人： NXP B.V.
发明人： STEENEKEN, Peter
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/02433 , H03H9/2405 , H03H9/2436 , H03H2009/02354 , H03H2009/0237 , H03H2009/0244 , H03H2009/02527 , H03H2009/2442

8. 发明授权

EP1676096B1 X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 有权
标题翻译：具有垂直集成电子元件及密封封装晶片规模x-y轴双质体STIMMGABEL GYRO
公开(公告)号：EP1676096B1
公开(公告)日：2017-06-07
申请号：EP04795573.7
申请日：2004-10-12
申请人： InvenSense, Inc.
发明人： NASIRI, Steven S. , SEEGER, Joseph
IPC分类号： G01C19/5712 , G01C19/5719 , H03H9/02
CPC分类号： G01C19/5712 , G01C19/5719 , H03H2009/02354
摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
摘要翻译：平面在角速度传感器具有两个质量哪些是尾盘反弹在设置成X-Y和间接地连接到一个框架上。两个质量块由一个键连接在一起寻求在相反的方向上thatthey必然移动沿着围绕Y轴可通过两个质量块驱动到Z向反相振荡并由此测量的角振荡振幅来感测传感器的Z.角速度赋予到所述框架。在优选的实施方式的角速度传感器被从散装MEMS陀螺仪晶片，盖晶片和参考晶片制造。在另一优选实施例，晶片的这个集合提供了质量之间，并在周围环境的气密屏障。

9. 发明授权

EP1900095B1 MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME 有权
标题翻译： MEMS RESONATORARRAYSTRUKTUR和运营及使用它们的方法
公开(公告)号：EP1900095B1
公开(公告)日：2009-09-16
申请号：EP06770771.1
申请日：2006-05-19
申请人： ROBERT BOSCH GMBH
发明人： LUTZ, Markus , PARTRIDGE, Aaron , PAN, Zhiyu
IPC分类号： H03H9/02 , H03H9/24 , H03H9/46 , H03H9/50
CPC分类号： H03H9/2405 , H03H3/0076 , H03H9/02338 , H03H9/02448 , H03H9/2431 , H03H9/462 , H03H9/505 , H03H2009/02354 , H03H2009/0244 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/02527
摘要： Mechanically coupled MEMS resonators 102 a, b, c, d are arranged in an N x M array. Each resonator includes straight elongated beam sections 106 a, b, c, d. Each elongated beam section is connected to another elongated beam section at a distal end via a curved sections 108 a, b, c, d thereby forming a geometric shape (e.g., rounded square). Each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section 104, which may be disposed between elongated beam sections of adjacent resonators. The resonators, oscillate at the same frequency in a combined elongating (or breathing) mode and bending mode. The resonators of the array may include nodal points 114 (i.e., portions of the resonator that are stationary, during oscillation of the resonator) in the curved sections. The nodal points are preferable locations to anchor the resonators.

10. 发明公开

EP1936805A1 Oscillateur mécanique formé d'un réseau d'oscillateurs élémentaires 有权
标题翻译：从基本振荡器的网络形成机械振荡器。
公开(公告)号：EP1936805A1
公开(公告)日：2008-06-25
申请号：EP07122705.2
申请日：2007-12-10
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： Delevoye, Elisabeth , Barbe, Jean-Charles
IPC分类号： H03H9/24
CPC分类号： H03H9/2431 , H03H9/02338 , H03H9/02393 , H03H9/02401 , H03H9/505 , H03H2009/02354 , H03H2009/02503
摘要： Un oscillateur élémentaire (18) à deux masses (1, 2) oscillant en opposition de phases au moyen d'une poutre de couplage (3) à contour fermé est disposé en plusieurs exemplaires en un réseau généralement linéaire ou bidimensionnel, avec des poutres de liaison (19, 20) parcourant les lignes du réseau pour unir les oscillateurs et des points d'ancrage (21) à un substrat. Ce réseau permet la propagation d'informations ou de perturbations et l'énergie qui y est dissipée est très faible.
摘要翻译：的振荡器具有基本振荡器（18）的可变形连接闭合轮廓光束的网络，其中，每个基本振荡器包括可变形的连接梁（19，20）。连接梁延伸上沿着一组单元的行。钩挂点（21）钩在固定基板上的连接梁和沿基于周期性图案允许等于细胞的长度的倍数的间距每个连接梁放置。

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