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    • 8. 发明公开
    • Systems and methods for curing a deposited layer on a substrate
    • 用于在基板上固化的沉积膜的系统和方法
    • EP2009969A2
    • 2008-12-31
    • EP08252094.1
    • 2008-06-18
    • Weyerhaeuser Company
    • Hirahara, EdwinLee, David L.
    • H05K3/12
    • B23K26/0622B05D3/06B23K26/03B23K26/082B23K2201/40H01L51/0027H05K1/095H05K3/0008H05K3/1283H05K3/22H05K2203/107
    • Curing systems (20) are provided that include a planar support surface (22) for supporting a substrate (24) having at least one layer (26) deposited thereon, at least one curing device (28) for curing the at least one deposited layer, and a control system (32) for controlling the overall curing process. The curing device includes at least one laser (40), a lens module (42), and an optional modulator (44). During curing, the beam of light emitted from the laser may be directed onto the deposited layer by 1) controlling the position of an X-Y beam deflecting module to direct the focused beam of laser light onto a desired illumination area of the deposited layer; 2) controlling the position of the laser via an X-Y table (50), or 3) controlling the position of the substrate via an X-Y table (54).
    • 被提供(20)固化体系确实包括一个平面的支承表面(22)为用于固化所述至少一个沉积层支撑衬底(24)具有至少一个层(26)沉积在其上,至少一个固化装置(28) 以及控制系统(32),用于控制整个固化过程。 固化装置包括至少一个激光器(40),透镜模块(42),并在任选的调制器(44)。 在固化期间,光从激光器发射的光束可以在由1沉积层被定向)控制X-Y光束偏转模组以引导激光的聚焦束引导到沉积层的期望的照明区域的位置; 2)经由(一个X-Y工作台50)控制激光器的位置,或3)通过(一个X-Y工作台54)控制所述基板的位置。
    • 10. 发明公开
    • ELECTRONIC DEVICE AND ITS METHOD OF MANUFACTURE
    • VERFAHREN ZU IHRER HERSTELLUNG的ELEKTRONISCHE VORRICHTUNG
    • EP2691985A1
    • 2014-02-05
    • EP12719435.5
    • 2012-03-30
    • Pragmatic Printing Ltd
    • PRICE, RichardRAMSDALE, Catherine
    • H01L29/786H01L29/66
    • H01L21/268H01L21/428H01L29/6675H01L29/66757H01L29/66772H01L29/66969H01L29/78618H01L29/7869H01L29/78696H01L51/0027H01L51/105
    • A method of manufacturing an electronic device comprises: providing a layer of semiconductor material comprising a first portion, a second portion, and a third portion, the third portion connecting the first portion to the second portion and providing a semiconductive channel for electrical current flow between the first and second portions; providing a gate terminal arranged with respect to said third portion such that a voltage may be applied to the gate terminal to control an electrical conductivity of said channel; and processing at least one of the first and second portions so as to have an electrical conductivity greater than an electrical conductivity of the channel when no voltage is applied to the gate terminal. In certain embodiments, the processing comprises exposing at least one of the first and second portions to electromagnetic radiation. The first and second portions may be laser annealed to increase their conductivities.
    • 一种制造电子器件的方法包括:提供包括第一部分,第二部分和第三部分的半导体材料层,第三部分将第一部分连接到第二部分,并提供半导体通道,用于在 第一和第二部分; 提供相对于所述第三部分布置的栅极端子,使得可以向栅极端子施加电压以控制所述沟道的电导率; 以及当没有电压施加到所述栅极端子时,处理所述第一部分和所述第二部分中的至少一个,使得具有大于所述沟道的电导率的导电性。 在某些实施例中,处理包括将第一和第二部分中的至少一个暴露于电磁辐射。 第一和第二部分可以被激光退火以增加它们的电导率。