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    • 8. 发明公开
    • Complementary transistor structure and method for manufacture
    • KomplementäreTransistorstruktur und deren Herstellungsverfahren。
    • EP0386413A2
    • 1990-09-12
    • EP90100764.1
    • 1990-01-15
    • International Business Machines Corporation
    • Harame, David L.Patton, Gary L.Stork, Johannes M.C.
    • H01L27/082H01L21/82H01L27/08
    • H01L21/82H01L27/0826
    • A transistor structure including a complementary pair of vertical bipolar transistors on a common semicon­ductor substrate. A first epitaxial layer (12) of semiconductor material of a first conductivity type is formed on the surface of a semiconductor substrate (10) of a second conductivity type, and a sub-emitter region for one of said complementary transistors being formed in said first layer (12). A sub-collector region (14) of a second conductivity type for the other of said complementary transistors is formed in the first layer (12). A second epitaxial layer (16) of semiconductor material of said second conductivity type is formed on the surface of said first layer (12). A third epitaxial layer (18) of semiconductor material of said first conductivity type is formed on the surface of said second layer (16). Deep recessed isolation regions (30, 32, 34) extend from the surface of said third layer (18) into said substrate (10), said deep isolation regions surround each of said transistors. Intrinsic base and collector regions (54, 56) of said one transistor are formed in said second and third layers (16, 18) respectively and intrinsic collector and base regions (58, 60) of said other transistor are formed in said second and third layers (16, 18) respectively. Shallow recessed isolation regions (44, 46, 48, 50, 52) are formed in said second and third layers (16, 18) surrounding said intrinsic base and collector regions (54, 58). A pair of ex­trinsic base regions (76, 78) of said first con­ductivity type for said other transistor and an extrinsic collector region (72) of said first con­ductivity type for said one transistor are formed on the surface of said third layer (18). An emitter reach-through region (74) of said first conductivity type is formed in said second and third layers (16, 18). An extrinsic base region (92) of said second con­ductivity type for said one transistor overlies said collector region (56) of said first conductivity type. A sub-collector reach-through region (94) of said second conductivity type is formed in said second and third layers (16, 18), and an emitter region (96) of said second conductivity type for said other transistor is formed overlying said base region (60) of said first conductivity type.
    • 一种在公共半导体衬底上包括一对互补的垂直双极晶体管的晶体管结构。 第一导电类型的半导体材料的第一外延层(12)形成在第二导电类型的半导体衬底(10)的表面上,并且用于所述互补晶体管之一的子发射极区域形成在所述第一导电类型 层(12)。 在第一层(12)中形成用于另一个所述互补晶体管的第二导电类型的子集电极区(14)。 所述第二导电类型的半导体材料的第二外延层(16)形成在所述第一层(12)的表面上。 所述第一导电类型的半导体材料的第三外延层(18)形成在所述第二层(16)的表面上。 深凹陷隔离区域(30,32,34)从所述第三层(18)的表面延伸到所述衬底(10)中,所述深隔离区域围绕每个所述晶体管。 所述一个晶体管的本征基极和集电极区域(54,56)分别形成在所述第二和第三层(16,18)中,并且所述另一个晶体管的本征集电极和基极区域(58,60)形成在所述第二和第三层 层(16,18)。 在围绕所述本征基极和集电极区域(54,58)的所述第二和第三层(16,18)中形成浅凹陷的隔离区域(44,46,48,50,52)。 在所述第三层(18)的表面上形成有用于所述另一晶体管的所述第一导电类型的一对非本征基区(76,78)和用于所述一晶体管的所述第一导电类型的非本征集电极区(72)。 在所述第二和第三层(16,18)中形成有所述第一导电类型的发射极贯通区(74)。 用于所述一个晶体管的所述第二导电类型的非本征基极区域覆盖所述第一导电类型的所述集电极区域(56)。 在所述第二和第三层(16,18)中形成所述第二导电类型的子集电极贯通区(94),并且形成所述另一晶体管的所述第二导电类型的发射极区(96),覆盖所述第二导电类型 所述第一导电类型的基极区域(60)。