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    • 1. 发明公开
    • Drive control apparatus
    • Einrichtung zur Antriebsregelung
    • EP0762255A1
    • 1997-03-12
    • EP96306378.9
    • 1996-09-03
    • CANON KABUSHIKI KAISHA
    • Sato, Mikio, Canon K.K.Takeishi, Hiroaki, Canon K.K.
    • G05D3/20G05B19/416
    • G03F7/70691G03F7/70358G05B19/231G05B2219/37275G05B2219/41026G05B2219/41028G05B2219/41029G05B2219/41172G05B2219/41203G05B2219/41216G05B2219/42033
    • A target state quantity generating unit generates a target state quantity (11) for a stage, and a laser interferometer (9) detects the current state quantity (position) of the stage. Based on the target state quantity (11) and the detected state quantity (position), a compensation system constituted by a variable phase compensator (13) and a PID compensator (12) controls the driving operation of the stage. A memory unit (15,16) stores forward and reverse gain tables, and provides adjustment information for adjusting the compensation system in correspondence with the state quantity of the stage. The corresponding gain table is selected on the basis of the driving direction of the stage, and the adjustment information is read out from the selected gain table on the basis of the position of the storage. The corner frequency of the variable phase compensator is changed on the basis of the readout adjustment information.
    • 目标状态量生成部生成用于舞台的目标状态量(11),激光干涉仪(9)检测舞台的当前状态量(位置)。 基于目标状态量(11)和检测到的状态量(位置),由可变相位补偿器(13)和PID补偿器(12)构成的补偿系统控制级的驱动操作。 存储单元(15,16)存储正向增益表和反向增益表,并提供调整信息,用于根据阶段的状态量来调整补偿系统。 基于级的驱动方向来选择对应的增益表,并且基于存储器的位置从所选择的增益表中读出调整信息。 可变相位补偿器的转角频率基于读出调整信息而改变。
    • 2. 发明公开
    • Positioning control system
    • 定位控制系统
    • EP0262624A3
    • 1989-07-19
    • EP87114075.2
    • 1987-09-26
    • KABUSHIKI KAISHA SG
    • Yuasa, YasuhiroIto, Minoru
    • G05D3/20G05B13/02
    • G05B19/19G05B2219/41203
    • Position of an object is detected by a position detector (10) and position data detected by this position detector is stored in a memory circuit (11). A time data supply section (21) supplies time data ( Δt) as a lead compensation parameter. A compensation circuit (22) takes out position data (Dx (-Δt)) preceding by time corresponding to the supplied time data ( Δt) from the memory circuit (11) and corrects at least one of present position data (Dx) and target position data (Sx) in accordance with difference between the taken out position data and the present position data detected by the position detector thereby performing lead compensation. A control signal relating to the position of the object is generated in accordance with the present position data corrected by the compensation cirucit and the target position data and the positioning control is made by this control signal.
    • 由位置检测器(10)检测物体的位置,并将由该位置检测器检测到的位置数据存储在存储器电路(11)中。 时间数据提供部分(21)提供时间数据(Δt)作为超前补偿参数。 补偿电路(22)从存储器电路(11)中取出与所提供的时间数据(Δt)相对应的时间的前面的位置数据(Dx(-Δt)),并且校正当前位置数据(Dx)和目标中的至少一个 根据取出的位置数据与由位置检测器检测到的当前位置数据之间的差异来确定位置数据(Sx),由此执行超前补偿。 根据由补偿电路校正的当前位置数据和目标位置数据产生与目标位置有关的控制信号,并且通过该控制信号进行定位控制。
    • 5. 发明公开
    • Positioning control system
    • 位置-Regelsystem。
    • EP0262624A2
    • 1988-04-06
    • EP87114075.2
    • 1987-09-26
    • KABUSHIKI KAISHA SG
    • Yuasa, YasuhiroIto, Minoru
    • G05D3/20G05B13/02
    • G05B19/19G05B2219/41203
    • Position of an object is detected by a position detector (10) and position data detected by this position detector is stored in a memory circuit (11). A time data supply section (21) supplies time data ( Δt) as a lead compensation parameter. A compensation circuit (22) takes out position data (Dx (-Δt)) preceding by time corresponding to the supplied time data ( Δt) from the memory circuit (11) and corrects at least one of present position data (Dx) and target position data (Sx) in accordance with difference between the taken out position data and the present position data detected by the position detector thereby performing lead compensation. A control signal relating to the position of the object is generated in accordance with the present position data corrected by the compensation cirucit and the target position data and the positioning control is made by this control signal.
    • 通过位置检测器(10)检测物体的位置,并且由该位置检测器检测到的位置数据被存储在存储器电路(11)中。 时间数据提供部(21)将时间数据(DELTA t)作为引导补偿参数。 补偿电路(22)从存储器电路(11)取出与提供的时间数据(DELTA t)对应的时间之前的位置数据(Dx( - DELTA t)),并校正当前位置数据(Dx) 和目标位置数据(Sx),根据取出位置数据与由位置检测器检测出的当前位置数据之间的差异,进行引导补偿。 根据由补偿电路校正的当前位置数据和目标位置数据产生与物体的位置相关的控制信号,并且通过该控制信号进行定位控制。