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1. 发明公开

EP2166344A1 Defect inspection method and apparatus for transparent plate materials 审中-公开
标题翻译：透明板材的缺陷检测方法和设备
公开(公告)号：EP2166344A1
公开(公告)日：2010-03-24
申请号：EP09015076.4
申请日：2005-10-21
申请人： Asahi Glass Company, Limited
发明人： Sonda, Yoshiyuki
IPC分类号： G01N21/896 , G01N21/89
CPC分类号： G01N21/896 , G01N2021/8908 , G01N2021/8967
摘要： Inspection method for determining the location of defects on or in transparent plate material.
Included are the step of capturing an image (hereinafter called a first image) of a main surface of a transparent plate material (1) by using a first reflective bright-field optical system disposed at a main surface side of the transparent plate material (1), the first optical system including a linear light source (2) and a camera (3); the step of capturing an image (hereinafter called a second image) of a rear surface of the transparent plate material (1) in the same way; the step of searching for a defect candidate in each of the first and second images; and the step of obtaining the distance between two images of an identical defect candidate, appearing in an identical camera; and determining, based on the distance between the two images, whether the defect candidate is located on the main surface, inside, or on the rear surface of the transparent plate material.
摘要翻译：用于确定透明板材上或内部缺陷位置的检验方法。包括通过使用布置在透明板材（1）的主表面侧的第一反射明视场光学系统捕获透明板材（1）的主表面的图像（以下称为第一图像）的步骤），第一光学系统包括线性光源（2）和照相机（3）; 以相同的方式捕获透明板材（1）的后表面的图像（以下称为第二图像）的步骤; 在第一和第二图像中的每一个中搜索缺陷候选者的步骤; 以及获得出现在相同相机中的相同缺陷候选的两个图像之间的距离的步骤; 以及基于两幅图像之间的距离确定缺陷候选物是位于透明板材的主表面，内部还是后表面上。

2. 发明公开

EP2128605A1 METHOD FOR INSPECTING DEFECT OF HOLLOW FIBER POROUS MEMBRANE, DEFECT INSPECTION EQUIPMENT AND PRODUCTION METHOD 审中-公开
标题翻译： METHODS FOR检查故障时的多孔中空纤维膜组成，缺陷检查装置和方法
公开(公告)号：EP2128605A1
公开(公告)日：2009-12-02
申请号：EP07738814.8
申请日：2007-03-16
申请人： Asahi Kasei Chemicals Corporation
发明人： IKEDA, Makoto , UCHIYAMA, Ryuhei , NAGASAWA, Osamu
IPC分类号： G01N21/892 , B01D65/10 , D01D5/24
CPC分类号： G01N21/8914 , B01D63/02 , B01D65/102 , B01D69/08 , G01N21/8901 , G01N21/894 , G01N21/952 , G01N2021/8908
摘要： A method for inspecting a defect of a hollow fiber porous membrane having substantially uniform, continuous inner hollow portions comprises steps for introducing a part of the hollow fiber porous membrane into an irradiation chamber, for irradiating the hollow fiber porous membrane with light from the outside in the irradiation chamber, and for detecting light exiting the hollow fiber porous membrane on the outside of the irradiation chamber.
摘要翻译：一种用于检查具有基本均匀的中空纤维多孔膜的缺陷的方法，连续的内中空部分包括步骤用于引入中空纤维多孔膜的一部分进入到照射室，用于与来自外部的光在照射中空纤维多孔膜照射室，以及用于检测光的照射室的外侧离开中空纤维多孔膜。

3. 发明公开

EP1816466A4 METHOD AND DEVICE FOR INSPECTING DEFECT OF TRANSPARENT PLATE BODY 有权
标题翻译：方法和设备检查故障时的透明板体的
公开(公告)号：EP1816466A4
公开(公告)日：2009-11-11
申请号：EP05805124
申请日：2005-10-21
申请人： ASAHI GLASS CO LTD
发明人： SONDA YOSHIYUKI
IPC分类号： G01N21/896
CPC分类号： G01N21/896 , G01N2021/8908 , G01N2021/8967

4. 发明公开

EP1816466A1 METHOD AND DEVICE FOR INSPECTING DEFECT OF TRANSPARENT PLATE BODY 有权
标题翻译： VERFAHREN UND VORRICHTUNG ZUR INSPEKE EINES DEFEKTS EINES DURCHSICHTIGENPLATTENKÖRPERS
公开(公告)号：EP1816466A1
公开(公告)日：2007-08-08
申请号：EP05805124.4
申请日：2005-10-21
申请人： Asahi Glass Company, Limited
发明人： SONDA, Yoshiyuki, Asahi Glass Company, Limited
IPC分类号： G01N21/896
CPC分类号： G01N21/896 , G01N2021/8908 , G01N2021/8967
摘要： A conventional problem in which inspection performance deteriorates as a transparent plate material becomes larger is solved.
Included are the step of capturing an image (hereinafter called a first image) of a main surface of a transparent plate material 1 by using a first reflective bright-field optical system disposed at a main surface side of the transparent plate material 1, the first optical system including a linear light source 2 and a camera 3; the step of capturing an image (hereinafter called a second image) of a rear surface of the transparent plate material 1 in the same way; the step of searching for a defect candidate in each of the first and second images; and the step of checking, based on a result of the search, whether defect candidates are located at positions corresponding to each other in the first and second images; when defect candidates are found from both the first and second images, regarding the defect candidates as a defect; and when a defect candidate is found from only one of the first and second images, regarding the defect candidate as a pseudo defect.
摘要翻译：解决了透明板材变大时检查性能恶化的常规问题。包括通过使用设置在透明板材1的主表面侧的第一反射亮场光学系统来捕获透明板材1的主表面的图像（以下称为第一图像）的步骤，第一光学系统，包括线性光源2和照相机3; 以相同的方式拍摄透明板材1的后表面的图像（以下称为第二图像）的步骤; 在第一和第二图像的每一个中搜索缺陷候选的步骤; 以及基于搜索结果来检查缺陷候选是否位于第一和第二图像中彼此对应的位置的步骤; 当从第一和第二图像中找到缺陷候选时，将缺陷候选作为缺陷; 并且当从第一和第二图像中的仅一个中找到缺陷候选时，将缺陷候选作为伪缺陷。

6. 发明公开

EP0426166A2 Automatic high speed optical inspection system 失效
标题翻译：自动售货机Geschwindigkeit arbeitende optischePrüfungsvorrichtung。
公开(公告)号：EP0426166A2
公开(公告)日：1991-05-08
申请号：EP90120932.0
申请日：1990-10-31
申请人： KLA INSTRUMENTS CORP.
发明人： Chadwick, Curt H. , Sholes, Robert H. , Greene, John D. , Tucker, Francis D. III , Fein, Michael E. , Jann, P.C. , Harvey, David J. , Bell, William
IPC分类号： G01N21/88 , G01R31/308 , G06T7/60
CPC分类号： G01N21/8806 , G01N21/956 , G01N21/95607 , G01N2021/8907 , G01N2021/8908 , G01N2021/95615 , G01N2021/95638 , G01N2201/06126 , G01R31/309 , G01R31/311
摘要： Methods and apparatus for inspecting surface features of a substrate. In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate, with those portions illuminated either with substantially uniform illumination. In one configuration, a substrate is compared to the expected characteristic features prestored in a memory. In a second configuration, a first and second pattern in a region of the surface of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other without the prestoring of an expected pattern. This is accomplished by illuminating at least the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Here, the comparison reveals whether the two patterns agree or not. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. Each time the comparison is performed, it is noted whether or not there has been agreement between the two patterns and which two patterns where compared. After all of the patterns are sequentially compared, the bad ones are identified by identifying those that did not compare with other patterns in the test process. This inspection technique is useful for doing die-to-die inspections. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns, thus eliminating the need for the temporary memory. In this configuration, the two patterns are simultaneous imaged and compared, then additional patterns are compared sequentially, in the same manner with the results of the comparisons and the pattern locations stored determine which patterns are bad when the inspection of all patterns is completed.
摘要翻译：用于检查基板的表面特征的方法和装置。在每种配置中，使用至少一个TDI传感器来对基片的感兴趣的部分进行成像，其中那些部分以基本均匀的照明照亮。在一种配置中，将衬底与预先存储在存储器中的预期特征特征进行比较。在第二配置中，通过将一个图案与另一个基板的一个图案进行比较，并且注意到它们是否彼此一致而不预先预定图案，来检查至少一个基板的表面区域中的第一和第二图案。这是通过照亮至少两个图案，对第一图案进行成像并将其特征存储在临时存储器中，然后对第二图案进行成像并将其与来自临时存储器的存储特性进行比较来实现的。在这里，比较显示两种模式是否一致。然后比较继续顺序地与第二图案相对于新的第二图案在下一个成像/比较序列中成为第一图案。每次执行比较时，都注意到两种模式之间是否存在一致性，以及两种模式之间的比较。在所有模式顺序比较之后，通过识别在测试过程中与其他模式不相比较的那些模式来识别不良模式。这种检查技术对于进行模具检查是有用的。第二配置的变型使用两个TDI传感器来同时对第一和第二图案进行成像，因此不需要临时存储器。在该配置中，两个图案被同时成像和比较，然后以与比较的结果相同的方式对附加图案进行比较，并且存储的图案位置确定当所有图案的检查完成时哪些图案是不好的。

7. 发明公开

EP3309508A4 SHAPE MEASUREMENT DEVICE AND SHAPE MEASUREMENT METHOD 有权转让
公开(公告)号：EP3309508A4
公开(公告)日：2018-07-18
申请号：EP17802711
申请日：2017-05-19
申请人： NIPPON STEEL & SUMITOMO METAL CORP
发明人： KONNO YUSUKE , KOBAYASHI TAKAMICHI , AKAGI TOSHIO , HIBI ATSUHIRO , FURUYA NOBUHIRO , NAKAZAKI AKIHITO
IPC分类号： G01B11/24 , G01B11/30 , G01N21/892
CPC分类号： G01B11/24 , G01B11/26 , G01B11/303 , G01B11/306 , G01N21/8901 , G01N21/892 , G01N2021/8908 , G01N2021/8918 , G01N2201/062
摘要： [Object] To measure a surface shape of a strip-shaped body made of a metallic body at higher speed with higher precision while suppressing occurrence of speckle noise. [Solution] A shape measurement apparatus according to the present invention includes: a linear light source that includes a superluminescent diode and applies linear light spreading in a width direction of the strip-shaped body to a surface of the strip-shaped body; a screen on which reflected light of the linear light off the surface of the strip-shaped body is projected; an area camera that captures an image of the reflected light of the linear light projected on the screen; and an arithmetic processing apparatus that calculates the surface shape of the strip-shaped body using the captured image of the reflected light of the linear light captured by the area camera. The linear light source has a spectral half-width of 20 nm or more, and is placed in a manner that an angle ¸ formed by an optical axis of the linear light source and a direction normal to the surface of the strip-shaped body and a wavelength » of the linear light satisfy Formula (I) related to specularity of the strip-shaped body.

8. 发明公开

EP3179205A1 METAL BODY SHAPE INSPECTION DEVICE AND METAL BODY SHAPE INSPECTION METHOD 有权转让
标题翻译：金属体形状检测装置和金属体形状检测方法
公开(公告)号：EP3179205A1
公开(公告)日：2017-06-14
申请号：EP16803133.4
申请日：2016-05-24
申请人： Nippon Steel & Sumitomo Metal Corporation
发明人： AKAGI, Toshio , KONNO, Yusuke , YAMAJI, Hironao , UMEMURA, Jun
IPC分类号： G01B11/245 , G01B11/25 , G01N21/892
CPC分类号： G01B11/2509 , G01B11/245 , G01B11/26 , G01N21/86 , G01N21/8903 , G01N21/8914 , G01N21/892 , G01N2021/8636 , G01N2021/8908 , G01N2021/8918 , G06T7/0004 , G06T7/521 , G06T7/586 , G06T2207/10024 , G06T2207/10152 , G06T2207/30136
摘要： [Object] To perform shape inspection of a metallic body in a simple way at higher speed with higher density.
[Solution] An apparatus of the present invention includes: a measurement apparatus configured to irradiate a metallic body with at least two illumination light beams, and measure reflected light separately; and an arithmetic processing apparatus configured to calculate information used for shape inspection of the metallic body on the basis of measurement results. The measurement apparatus includes a plurality of illumination light sources configured to emit strip-shaped illumination light having different peak wavelengths, and a plurality of monochrome line sensor cameras that have band-pass filters and are aligned vertically above a surface of the metallic body and set to capture images of the same portion of the metallic body by their respective shift lenses, the number of the monochrome line sensor cameras being the same as the number of the peak wavelengths of the emitted illumination light. At least two of the plurality of illumination light sources are provided in a manner that an angle formed by a normal direction to the surface of the metallic body and an optical axis of the first illumination light source is substantially equal to an angle formed by the normal direction and an optical axis of the second illumination light source and the two illumination light sources face each other with the line sensor cameras therebetween in a relative movement direction of the metallic body and the measurement apparatus.
摘要翻译： [对象]以更高的速度和更高的密度以简单的方式执行金属体的形状检查。解决方案本发明的设备包括：测量设备，被配置为用至少两个照明光束照射金属体并分别测量反射光; 以及算术处理装置，其被配置为基于测量结果来计算用于金属体的形状检查的信息。测量设备包括：多个照明光源，其被配置为发射具有不同峰值波长的条形照明光;以及多个单色线传感器照相机，其具有带通滤波器并且在金属本体的表面上垂直地排列并设定以通过它们各自的移位透镜来捕获金属体的相同部分的图像，单色线性传感器相机的数量与发射的照明光的峰值波长的数量相同。多个照明光源中的至少两个照明光源以这样的方式设置，即由金属体的表面的法线方向和第一照明光源的光轴形成的角度基本上等于由法线所述第二照明光源和所述两个照明光源的光轴在所述金属体与所述测定装置的相对移动方向上隔着所述线传感器相互相对。

9. 发明公开

EP2874761A1 OPTICAL INSPECTION APPARATUS AND OPTICAL SORTING APPARATUS 审中-公开
标题翻译：装置：用于光学分类光学检测系统和设备
公开(公告)号：EP2874761A1
公开(公告)日：2015-05-27
申请号：EP13765499.2
申请日：2013-07-15
申请人： Visys NV
发明人： DIRIX, Bert
IPC分类号： B07C5/36 , B07C5/342 , G01N21/89
CPC分类号： G01N21/8901 , B07C5/3425 , B07C5/363 , B07C2501/0018 , G01N2021/845 , G01N2021/8908
摘要： The invention concerns an apparatus for inspection of products (3', 3"), provided with a transport mechanism (2) configured to transport a continuous stream of products (3', 3") so that, on leaving the transport mechanism, the product stream (3', 3") follows a free-fall path along which it is fed in a single product layer through an inspection zone (16), which has a length (L) that at least corresponds to the width of the aforementioned single product layer, a light source (5, 5') configured to illuminate said inspection zone (16), a detection unit (6), configured to optically scan the illuminated inspection zone (16), an analysis unit (17) and possibly a removal unit (7) and also a background element (10'), which is situated behind the falling product stream, seen from the position of the detection unit, positioned so that: - light beams from the light source impinge on an illumination zone (14) of the background element when these beams do not impinge on a product from the product stream (3', 3"), - the detection unit can only receive an image of a detection zone (13) of the background element, characterized in that the background element is mounted so that the illumination zone (14) and the detection zone (13) are separated from each other.

10. 发明公开

EP2253948A1 Vorrichtung zum optischen Untersuchen eines Gegenstandes 有权
标题翻译： Vorrichtung und Verfahren zum optischen Untersuchen eines Gegenstandes
公开(公告)号：EP2253948A1
公开(公告)日：2010-11-24
申请号：EP09006906.3
申请日：2009-05-22
申请人： Dr. Schenk GmbH Industriemesstechnik
发明人： Vetter, Erich , Wilkens, Dr. Ludger
IPC分类号： G01N21/89 , G01N21/896 , G01B11/30
CPC分类号： G01N21/8903 , G01N21/21 , G01N21/455 , G01N21/896 , G01N2021/1774 , G01N2021/8845 , G01N2021/8908 , G01N2021/8962 , G01N2021/9583 , G01N2201/0627 , G01N2201/0631 , G01N2201/0634
摘要： Die Erfindung betrifft eine Vorrichtung zum optischen Untersuchen eines Gegenstands (14), umfassend eine Beleuchtung (10) zum Ausleuchten eines Inspektionsbereichs (12) des Gegenstands (14), welche eine erste Lichtquelle (22) zur Emission einer ersten Art von Licht (24) und eine zweite Lichtquelle (28) zur Emission einer zweiten Art von Licht (28) aufweist sowie eine zwischen den Lichtquellen (22,26) und dem Gegenstand (14) angeordnete Blende (34), welche für die erste Art von Licht (24) undurchlässig und für die zweite Art von Licht (28) durchlässig ist und welche eine Kante (36) aufweist, die eine Leuchtfläche der Beleuchtung (10) bezüglich der ersten Art von Licht (24) in einen hellen und einen dunklen Bereich (38,40) teilt; und einen für beide Arten von Licht (24,28) empfindlichen Sensor (16) zum Erfassen der Intensität des von dem Gegenstand (14) transmittierten oder reflektierten Lichts (24,28) der Beleuchtung (10), wobei der Sensor (16) und die Kante (36) der Blende (34) derart miteinander ausgerichtet sind, dass die bei einem fehlerfreien Inspektionsbereich (12) von dem Sensor (16) erfasste Intensität der ersten Art von Licht (24) etwa 50 % der Intensität entspricht, die ohne Blende (34) gemessen würde. Die Erfindung betrifft auch ein entsprechendes Verfahren zum optischen Untersuchen eines Gegenstands.
摘要翻译：光学装置具有用于照射物体的检查区域（12）的照明单元（10）。提供光源用于发射一种类型的光，其中提供另一光源用于发射另一种类型的光。在光源和物体之间布置有孔（34）。还包括用于物体的光学检查方法的独立权利要求。

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