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    • 9. 发明公开
    • VAPOR PRESSURE SENSOR AND METHOD
    • 抑制剂传感器不耐受
    • EP0832424A4
    • 1999-09-15
    • EP96917116
    • 1996-06-03
    • FENNER RALPH LQUINN ROBERT C
    • FENNER RALPH LQUINN ROBERT C
    • G01N19/10
    • G01N19/10
    • A vapor pressure sensor (11) comprising a substrate having a body (31) with first (33) and second (32) planar parallel surfaces. A hole (46) is formed in the body (31) and extends through the first surface (33) and between the first (33) and second (32) surfaces. A beam (51) is disposed in the hole (46) in the body (31) and is formed integral with the body (31) and forms a junction with the body (31) and is formed as a cantilever in the hole (46) in the body (31). The beam (51) has a surface. A vapor adsorbing coating (48) is carried by the surface of the beam and the coating (48) is substantially uniform in thickness. It is adhered to the surface of the beam and is fully shear restrained by the beam. A strain measuring device (36) is carried by the substrate and disposed at the junction between the body (31) and the beam (51) to measure shear forces placed in the beam by the vapor adsorbing coating. The vapor adsorbing coating expands and contracts in directions parallel to the surface of the beam (51) as the vapor adsorbing coating (48) adsorbs and desorbs vapor.
    • 一种蒸汽压力传感器,包括具有第一和第二平面平行表面的本体的基底。 在主体中形成一个孔并延伸穿过第一和第二表面之间。 梁设置在主体的孔中并与主体形成一体,并与主体形成一个结,并且在主体的孔中形成为悬臂。 梁有一个表面。 蒸汽吸附涂层由梁的表面承载,并且涂层厚度基本均匀。 它被粘附到梁的表面上并被梁束完全剪切。 应变测量装置由基板承载并且设置在主体和梁之间的接合处,以测量通过蒸汽吸附涂层放置在梁中的剪切力。 当蒸汽吸附涂层吸附和解吸蒸汽时,蒸气吸附涂层在平行于梁的表面的方向上膨胀和收缩。