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1. 发明授权

EP0740769B1 Heterodyne interferometer with second harmonic correction 失效
标题翻译：阿差干涉仪与所述二次谐波的校正
公开(公告)号：EP0740769B1
公开(公告)日：2003-04-16
申请号：EP95910100.7
申请日：1995-01-13
申请人： Sparta, Inc.
发明人： LIS, Steven, A. , HENSHAW, Philip, D.
IPC分类号： G01B9/02
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02003 , G01B9/02027 , G01B9/02062 , G01B2290/70

2. 发明公开

EP2904347A4 POSITION MONITORING SYSTEM WITH REDUCED NOISE 有权
标题翻译： POSITIONSÜBERWACHUNGSSYSTEMMIT VERRINGERTEM RAUSCHEN
公开(公告)号：EP2904347A4
公开(公告)日：2016-07-27
申请号：EP13844118
申请日：2013-10-03
申请人： ZYGO CORP
发明人： DECK LESLIE L , WESLEY ALEXANDER D , HOLMES MICHAEL LOWELL , CARANGELO ROBERT M , LIESNER JAN
IPC分类号： G01B9/02
CPC分类号： G01B9/0209 , G01B9/02044 , G01B9/02062 , G01B9/02065 , G01B9/0207 , G01B9/02072 , G01B9/02074 , G01B2290/60
摘要： An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.
摘要翻译：一种用于监视物体位置变化的干涉测量系统，该系统包括光谱宽带光源，具有干涉仪的传感器模块，该干涉仪将沿着分开的路径的从光源接收的光的一部分引导。该系统包括具有检测器的强度监视器，该检测器被配置为测量从源导出的附加光的强度并产生监视器输出信号。该系统包括电子处理模块，用于基于监视器输出信号处理传感器输出信号，以解决由光源输出的光的强度波动，以及确定关于对象位置变化的信息。强度监视器被配置为表征作为光谱相关的波长或强度波动的函数的强度波动。

3. 发明授权

EP2904347B1 POSITION MONITORING SYSTEM WITH REDUCED NOISE 有权
公开(公告)号：EP2904347B1
公开(公告)日：2018-07-18
申请号：EP13844118.3
申请日：2013-10-03
申请人： Zygo Corporation
发明人： DECK, Leslie L. , WESLEY, Alexander D. , HOLMES, Michael Lowell , CARANGELO, Robert M. , LIESNER, Jan
IPC分类号： G01B9/02
CPC分类号： G01B9/0209 , G01B9/02044 , G01B9/02062 , G01B9/02065 , G01B9/0207 , G01B9/02072 , G01B9/02074 , G01B2290/60
摘要： An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.

4. 发明授权

EP1285223B1 DATA AGE ADJUSTMENTS 有权
标题翻译：适应数据的AGE
公开(公告)号：EP1285223B1
公开(公告)日：2009-04-08
申请号：EP01935631.0
申请日：2001-05-16
申请人： ZYGO CORPORATION
发明人： DEMAREST, Frank, C.
IPC分类号： G01B9/02 , G01J9/02 , G03F9/00
CPC分类号： G01B9/02062 , G01B9/02003 , G01B9/02083 , G01B2290/70 , G01J3/45 , G03F7/70775 , G03F9/7049 , G03F9/7092
摘要： A method for compensating data age in measurement signals from an interferometer includes measuring a value of the measurement signal and adjusting the measured value based on the measurement signal with a data age adjustment value to correct for data age.

5. 发明公开

EP2484273A1 Ophthalmologic apparatus and a control method thereof 有权
标题翻译：眼科装置及其控制方法
公开(公告)号：EP2484273A1
公开(公告)日：2012-08-08
申请号：EP12151322.0
申请日：2012-01-16
申请人： Tomey Corporation
发明人： Kato, Chihiro , Ohmori, Tsutomu , Nozawa, Yuji
IPC分类号： A61B3/10 , A61B3/117 , A61B3/12 , G01B11/24
CPC分类号： A61B3/1173 , A61B3/1005 , A61B3/102 , A61B3/12 , G01B9/02004 , G01B9/02062 , G01B9/02064 , G01B9/02068 , G01B9/02091
摘要： An ophthalmologic apparatus comprises a light source (12), an optical measurement system (13) that radiates first light from the light source to inside an eye (100) to be examined and guides first reflected light from the eye (100), an optical reference system (24, 22) that radiates second light from the light source to a reference surface (22a) and guides second reflected light from the reference surface, a photo detector (26) that detects interfering light between the first reflected light from the optical measurement system (13) and the second reflected light from the optical reference system (13), and a processor (64) that determines a position of a measuring portion of the inside of the eye (100) based on the detected interfering light. The optical measurement system (13) comprises an incident angle changing member (46) that changes an incident angle of the first light radiated to the eye within a predetermined angular range relative to an axis of vision of the eye.

6. 发明公开

EP2133658A1 Two-Wavelength Laser Interferometer and Method of Adjusting Optical Axis in the Same 审中-公开
标题翻译：激光干涉仪与两个波长和方法，用于调整其光轴
公开(公告)号：EP2133658A1
公开(公告)日：2009-12-16
申请号：EP09162542.6
申请日：2009-06-12
申请人： Mitutoyo Corporation
发明人： Miyata, Kaoru
IPC分类号： G01B9/02
CPC分类号： G01B9/02062 , G01B9/02007 , G01B2290/45 , G01B2290/70
摘要： A two-wavelength laser interferometer includes: a two-wavelength laser light source (11) that emits two laser beams (L1 and L2) having different wavelengths; a two-wavelength polarizing beam splitter that includes a beam splitter and a beam superposer, the beam splitter splitting each of the two laser beams (L1, L2) having the different wavelengths into a reference beam (L11, L21) and a measurement beam (L12, L22), the beam superposer superposing the reference beam and the measurement beam reflected by a reference surface and a target measurement surface together; and a calculator (24) that obtains a displacement amount of the target measurement surface per wavelength from the beams superposed together and obtains a displacement amount of the target measurement surface applied with atmospheric refractive index correction through a calculation in which the displacement amount obtained per wavelength is used. In the two-wavelength laser interferometer, an optical-axis superposer (13) is provided between the two-wavelength laser light source and the beam splitter. The optical-axis superposer initially separates the two laser beams having the different wavelengths emitted from the two-wavelength laser light source and subsequently superposes optical axes of the two laser beams together.
摘要翻译：一种双波长激光干涉仪包括：（11）做了双波长激光器光源发射具有不同波长的两个激光束（L1和L2）; 一个两波长偏振分束器那样包括分束器和光束超级拗造型，每个都具有不同的波长成参考光束（L11，L21）的两个激光束（L1，L2）的分束器分束和测量光束（ L12，L22），所述光束超级波塞尔叠加参考光束和由基准表面和一个目标测量表面一起反射的测量束; 和计算器（24），确实获得来自叠加在一起梁每波长的目标测量表面的位移量，并且获得通过计算与大气折射率校正施加的目标测量表面的位移量，其中由波长获得的位移量被使用。在双波长激光干涉仪到光轴超级拗造型（13）的双波长激光光源和所述分束器之间。光轴超级波塞尔最初分离具有从双波长激光光源发射的不同波长的两个laserbeams并随后叠加两个laserbeams的光轴一起。

7. 发明公开

EP1285223A2 DATA AGE ADJUSTMENTS 有权
标题翻译：适应数据的AGE
公开(公告)号：EP1285223A2
公开(公告)日：2003-02-26
申请号：EP01935631.0
申请日：2001-05-16
申请人： Zygo Corporation
发明人： DEMAREST, Frank, C.
IPC分类号： G01B9/02 , G01J9/02 , G03F9/00
CPC分类号： G01B9/02062 , G01B9/02003 , G01B9/02083 , G01B2290/70 , G01J3/45 , G03F7/70775 , G03F9/7049 , G03F9/7092
摘要： A method for compensating data age in measurement signals from an interferometer includes measuring a value of the measurement signal and adjusting the measured value based on the measurement signal with a data age adjustment value to correct for data age.

8. 发明授权

EP2484273B1 Ophthalmologic apparatus and a control method thereof 有权
标题翻译： Opthalmische Vorrichtung und Steuerungsverfahrendafür
公开(公告)号：EP2484273B1
公开(公告)日：2017-04-05
申请号：EP12151322.0
申请日：2012-01-16
申请人： Tomey Corporation
发明人： Kato, Chihiro , Ohmori, Tsutomu , Nozawa, Yuji
IPC分类号： G01B9/02 , A61B3/10 , A61B3/117
CPC分类号： A61B3/1173 , A61B3/1005 , A61B3/102 , A61B3/12 , G01B9/02004 , G01B9/02062 , G01B9/02064 , G01B9/02068 , G01B9/02091

9. 发明公开

EP2904347A1 POSITION MONITORING SYSTEM WITH REDUCED NOISE 有权
标题翻译：噪声降低位置监控系统
公开(公告)号：EP2904347A1
公开(公告)日：2015-08-12
申请号：EP13844118.3
申请日：2013-10-03
申请人： Zygo Corporation
发明人： DECK, Leslie L. , WESLEY, Alexander D. , HOLMES, Michael Lowell , CARANGELO, Robert M. , LIESNER, Jan
IPC分类号： G01B9/02 , G01B11/00
CPC分类号： G01B9/0209 , G01B9/02044 , G01B9/02062 , G01B9/02065 , G01B9/0207 , G01B9/02072 , G01B9/02074 , G01B2290/60
摘要： An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.

10. 发明公开

EP2171396A1 APPARATUS AND METHODS FOR UNIFORM FREQUENCY SAMPLE CLOCKING 有权转让
标题翻译：器件和方法采样时钟相同的频率 - 聚能
公开(公告)号：EP2171396A1
公开(公告)日：2010-04-07
申请号：EP08781819.1
申请日：2008-07-14
申请人： Volcano Corporation
发明人： KEMP, Nathaniel, J. , KURANOV, Roman , McELROY, Austin, Broderick , MILNER, Thomas, E.
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , A61B5/0066 , A61B5/0073 , A61B5/6852 , A61B5/7257 , G01B9/02004 , G01B9/02057 , G01B9/02062 , G01B9/02067 , G01B9/02069 , G01B9/02083 , G01B2290/25 , G01M11/3127 , G01M11/3172 , G01N21/4795
摘要： A method and a system for Uniform Frequency Sample Clocking to directly sample the OCT signal with a temporally-non-linear sampling clock derived from a k-space wavemeter on the external sample clock input port of a digitizer. The Uniform Frequency Sample Clocking comprises at least one Pathway, which includes characterizing the swept light source, creating a digital representation of the waveform based from the characterization data, and generating a clock signal using a waveform generator to output the clock signal to a digitizer external clock.

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