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    • 4. 发明公开
    • FLUIDIC DEVICE
    • STRÖMUNGSVORRICHTUNG
    • EP3101319A1
    • 2016-12-07
    • EP16172133.7
    • 2016-05-31
    • Surpass Industry Co., Ltd.
    • INOUE, Atsushi
    • F16K27/00
    • F16K11/20B24B57/02F16K27/003
    • To allow a unit having passages for passing fluids from a plurality of supply sources and a unit having passages for supplying the fluids to a plurality of destinations to be replace separately. Provided is a fluidic device 100 including a first fluid unit 10 having a plurality of first passages for passing fluids along a first direction, a second fluid unit 20 having a plurality of second passages for passing the fluids along a second direction intersecting the first direction, and a plurality of on/off valves 30 placed at a plurality of points, one at each point, where the first passages and the second passages intersect with each other. The first fluid unit 10 and the second fluid unit 20 are arranged such that outlets formed at a plurality of locations of the first passages are coupled to inlets formed at a plurality of locations of the second passages at each of the points.
    • 为了允许具有用于从多个供应源通过流体的通道的单元和具有用于将流体供应到多个目的地的单元的单元被单独替换。 提供了一种流体装置100,其包括:第一流体单元10,具有用于沿着第一方向流动流体的多个第一通道;第二流体单元20,具有多个第二通道,用于沿与第一方向相交的第二方向流过流体; 以及放置在多个点处的多个开/关阀30,每个点在第一通道和第二通道彼此相交。 第一流体单元10和第二流体单元20被布置成使得形成在第一通道的多个位置处的出口被联接到在每个点处形成在第二通道的多个位置处的入口。