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    • 3. 发明公开
    • Rotating electrical machine and method for measuring a displacement of a rotating electrical machine
    • 旋转电机和方法,用于测量的旋转电机的位移
    • EP2589827A1
    • 2013-05-08
    • EP11405353.1
    • 2011-11-04
    • ETH Zürich
    • Looser, Andreas
    • F16C32/04
    • H02K11/0031F16C32/0402F16C32/0448G01B7/14G01D5/202G01P3/49H02K7/09H02K11/225
    • A rotating electrical machine comprises a stator (2), a rotor (3) and at least one active magnetic bearing (21, 22, 31, 32, 33) comprising a bearing winding (21; 22) which is an air-gap winding and comprises at least a first phase winding (B) and a second phase winding (A). A measurement arrangement (4, 5, 6, 7) measures the radial displacement of the rotor (3) by injecting a displacement measurement injected signal into at least one section of at least one of the bearing windings (21; 22) of one of the magnetic bearings, and capturing at least one displacement measurement signal wherein this displacement measurement signal depends on the rotor displacement in radial direction relative to the stator, this dependency being due to eddy currents in the rotor induced by the displacement measurement injected signal.
    • 一种旋转电机,包括一个定子(2),一个转子(3)和至少一个主动磁轴承(21,22,31,32,33)包括(21; 22)的轴承绕组是气隙绕组 并包括至少一个第一绕组相(B)和第二相绕组(A)。 的一个的选择;所述的测量装置(4,5,6,7)通过注入位移测量注入信号到轴承绕组中的至少一个(22 21)中的至少一个部分测量所述转子(3)的径向位移 磁性轴承,以及捕获worin这个位移测量信号的至少一个位移测量信号取决于在相对径向方向上的转子位移到定子,这种依赖性是由于在由位移测量感应的转子涡流注入信号。
    • 4. 发明公开
    • DISPLACEMENT SENSOR AND A MAGNETIC BEARING SYSTEM USING THE SAME
    • VERDRÄNGUNGSSENSORUND MAGNETISCHES LAGERSYSTEM DAMIT
    • EP2543956A2
    • 2013-01-09
    • EP11750888.7
    • 2011-02-28
    • D&M Technology Co., Ltd
    • CHOI, Sang-Hyun
    • G01B7/14G01B7/00F16C32/04
    • G01B7/144F16C32/044F16C32/0448G01D5/2046
    • In a displacement sensor and a magnetic bearing system using the same, the displacement sensor includes: a first coil unit including at least one first coil; a second coil unit including at least one second coil differentially connected to one side of the at least one first coil of the first coil unit; a sensor drive means for supplying a first power source voltage and a second power source voltage having the same drive frequency to the first coil unit and the second coil unit, respectively; and a detection circuit for extracting displacement information from a differential signal produced by the first coil unit and the second coil unit due to a change in inductances of the at least one first coil and the at least one second coil according to a position change of a displacement measurement object.
    • 在位移传感器和使用该位移传感器的磁轴承系统中,位移传感器包括:第一线圈单元,其包括至少一个第一线圈; 第二线圈单元,其包括与所述第一线圈单元的所述至少一个第一线圈的一侧差分连接的至少一个第二线圈; 传感器驱动装置,用于分别向第一线圈单元和第二线圈单元提供具有相同驱动频率的第一电源电压和第二电源电压; 以及检测电路,用于根据由所述第一线圈单元和所述第二线圈单元的位置变化引起的所述至少一个第一线圈和所述至少一个第二线圈的电感的变化,从由所述第一线圈单元和所述第二线圈单元产生的差分信号中提取位移信息 位移测量对象。
    • 6. 发明公开
    • Sensorless magnetic bearing apparatus
    • Sensorlose Magnetlageranordnung
    • EP2083183A2
    • 2009-07-29
    • EP09000942.4
    • 2009-01-23
    • EBARA CORPORATION
    • Barada, ToshimitsuYoshida, Toshiya
    • F16C32/04
    • F16C32/0448F16C32/0457F16C32/0463F16C2360/45
    • A sensorless magnetic bearing apparatus supports a rotating (1) object using magnetic levitation by a magnetic force of electromagnets (2,3). The magnetic bearing apparatus includes a PWM driver (4) configured to supply exciting currents to the electromagnets (2,3), a driver power source (5) configured to drive the PWM driver (4), and a displacement error signal removing section configured to extract a displacement error signal (verr) of the displacement information (vdisp) from a current (ie) flowing through the driver power source (5) and to remove (15) the displacement error signal (verr) from the displacement information (vdisp).
    • 无传感器的磁轴承装置通过磁铁(2,3)的磁力使用磁悬浮来支撑旋转(1)物体。 磁轴承装置包括:PWM驱动器(4),被配置为向电磁体(2,3)提供激励电流;驱动器电源(5),被配置为驱动PWM驱动器(4);以及位移误差信号去除部件 从位于流过驱动器电源(5)的电流(即)中提取位移信息(vdisp)的位移误差信号(verr),并从位移信息(vdisp)移除(15)位移误差信号(verr) )。
    • 8. 发明公开
    • Magnetic bearing device and method of operating the device
    • Magnetlagervorrichtung und Verfahren zum Betrieb der Vorrichtung
    • EP1942283A2
    • 2008-07-09
    • EP08004830.9
    • 2006-07-04
    • EBARA CORPORATION
    • Barada, ToshimitsuYoshida, Toshiya
    • F16C32/04
    • F16C32/0457F16C32/0448F16C2360/45
    • An energy-saving magnetic bearing device with no bias current for making the relation between the excitation current and the magnetic force of the electromagnet linear is provided. In a magnetic bearing device for supporting a rotor 1 serving as the magnetic piece in a levitating state allowing free rotation at a specified position by the magnetic force of a pair of electromagnets 2, 3, the electromagnets 2, 3 are constituted to interpose the rotor 1 and face each other. A driver 204 is a PWM (pulse width modulation) type driver for controlling the excitation current in the electromagnets 2, 3 by modulating the pulse width of a voltage driven at a specified carrier frequency fc, and includes a resonator means for electrically resonating at a frequency equal to the carrier frequency fc. When an excitation current flows in either one of the pair of opposing electromagnets 2, 3, then the other magnet is regulated so that the DC component in the electromagnet excitation current is zero, and a voltage is applied via the resonator means to the electromagnet whose DC component in the excitation current is discharged to zero.
    • 提供了一种无偏置电流的节能磁轴承装置,用于使励磁电流与电磁铁线性的磁力之间的关系。 在用于以悬浮状态支承用作磁片的转子1的磁轴承装置中,通过一对电磁铁2,3的磁力使指定位置自由旋转,电磁体2,3被构成为将转子 1并相互面对。 驱动器204是PWM(脉冲宽度调制)型驱动器,用于通过调制以特定载波频率fc驱动的电压的脉冲宽度来控制电磁体2,3中的激励电流,并且包括谐振器装置,用于在 频率等于载波频率fc。 当励磁电流在一对相对电磁体2,3中的任一个中流动时,另一个磁体被调节,使得电磁铁激励电流中的直流分量为零,并且经由谐振器装置将电压施加到电磁体, 励磁电流中的直流分量放电到零。
    • 9. 发明公开
    • MAGNETIC BEARING DEVICE AND MAGNETIC BEARING METHOD
    • MAGNETLAGERVORRICHTUNG UND MAGNETLAGERVERFAHREN
    • EP1903228A1
    • 2008-03-26
    • EP06767857.3
    • 2006-07-04
    • EBARA CORPORATION
    • BARADA, Toshimitsu Ebara CorporationYOSHIDA, Toshiya
    • F16C32/04
    • F16C32/0457F16C32/0448F16C2360/45
    • An energy-saving magnetic bearing device with no bias current for making the relation between the excitation current and the magnetic force of the electromagnet linear is provided. In a magnetic bearing device for supporting a rotor 1 serving as the magnetic piece in a levitating state allowing free rotation at a specified position by the magnetic force of a pair of electromagnets 2, 3, the electromagnets 2, 3 are constituted to interpose the rotor 1 and face each other. A driver 204 is a PWM (pulse width modulation) type driver for controlling the excitation current in the electromagnets 2, 3 by modulating the pulse width of a voltage driven at a specified carrier frequency fc, and includes a resonator means for electrically resonating at a frequency equal to the carrier frequency fc. When an excitation current flows in either one of the pair of opposing electromagnets 2, 3, then the other magnet is regulated so that the DC component in the electromagnet excitation current is zero, and a voltage is applied via the resonator means to the electromagnet whose DC component in the excitation current is discharged to zero.
    • 提供了一种无偏置电流的节能磁轴承装置,用于使励磁电流与电磁铁线性的磁力之间的关系。 在用于以悬浮状态支承用作磁片的转子1的磁轴承装置中,通过一对电磁铁2,3的磁力使指定位置自由旋转,电磁体2,3被构成为将转子 1并相互面对。 驱动器204是PWM(脉冲宽度调制)型驱动器,用于通过调制以特定载波频率fc驱动的电压的脉冲宽度来控制电磁体2,3中的激励电流,并且包括谐振器装置,用于在 频率等于载波频率fc。 当励磁电流在一对相对电磁体2,3中的任一个中流动时,另一个磁体被调节,使得电磁铁激励电流中的直流分量为零,并且经由谐振器装置将电压施加到电磁体, 励磁电流中的直流分量放电到零。
    • 10. 发明公开
    • Integrated magnetic levitation and rotation system
    • 集成的磁悬浮和旋转系统
    • EP1655820A3
    • 2006-07-05
    • EP06001269.7
    • 1996-10-18
    • Satcon Technology Corporation
    • Nichols, Stephen B.Jagannathan, ShankarLeary, KevinEisenhaure, DavidStanton, WilliamHockney, RichardDowner, JamesGondhalekar, Vijay
    • H02K7/08H02K7/09H02K17/12H02K19/10H02K19/18
    • H01L21/68792F16C32/0448F16C32/047F16C32/0493F16C2380/26H02K7/09H02K17/12H02K21/44
    • A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber (12), for semiconductor wafer (14) processing. The stator assembly (16) has a permanent magnet or magnets (38) sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor (18) is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly (16) levitates and passively centres the rotor (18) along a vertical axis and against tilt about the either horizontal axis (26,28), provides a radial position bias for the rotor (18), and establishes a motor flux field at a the rotor poles (18c). Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor (18) as a synchronous homopolar motor. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor (18) and can actively damp oscillations that may overcome the passive centering.
    • 旋转电机和旋转磁轴承集成在非接触式紧凑组件(10)中。 定子组件(16)围绕具有环形气隙(20)的铁磁转子(18),该环形气隙可容纳例如圆柱形壁(12e)。 的腔室(12),用于半导体晶片(14)的处理。 定子组件(16)具有夹在垂直隔开的磁性定子板(36)与多个磁极段(36a)之间的永磁体或磁体(38)。 转子(18)优选为具有互补极齿(18c)的磁性不锈钢环。 定子组件(16)使转子(18)沿垂直轴线浮动并被动地居中,并防止围绕任一水平轴线(26,28)倾斜,为转子(18)提供径向位置偏置,并建立电机磁通 在转子极点(18c)处。 缠绕在定子板(36)上的多相线圈(40)产生作为同步单极电机驱动转子(18)的旋转磁通场。 控制器(54)响应于感测到的转子(18)的物理位置而激励缠绕在每个定子极段(36a)上的控制线圈(42),并且可以主动地衰减可以克服被动对中的振荡。