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1. 发明公开

EP1655820A3 Integrated magnetic levitation and rotation system 失效
标题翻译：集成的磁悬浮和旋转系统
公开(公告)号：EP1655820A3
公开(公告)日：2006-07-05
申请号：EP06001269.7
申请日：1996-10-18
申请人： Satcon Technology Corporation
发明人： Nichols, Stephen B. , Jagannathan, Shankar , Leary, Kevin , Eisenhaure, David , Stanton, William , Hockney, Richard , Downer, James , Gondhalekar, Vijay
IPC分类号： H02K7/08 , H02K7/09 , H02K17/12 , H02K19/10 , H02K19/18
CPC分类号： H01L21/68792 , F16C32/0448 , F16C32/047 , F16C32/0493 , F16C2380/26 , H02K7/09 , H02K17/12 , H02K21/44
摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber (12), for semiconductor wafer (14) processing. The stator assembly (16) has a permanent magnet or magnets (38) sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor (18) is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly (16) levitates and passively centres the rotor (18) along a vertical axis and against tilt about the either horizontal axis (26,28), provides a radial position bias for the rotor (18), and establishes a motor flux field at a the rotor poles (18c). Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor (18) as a synchronous homopolar motor. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor (18) and can actively damp oscillations that may overcome the passive centering.
摘要翻译：旋转电机和旋转磁轴承集成在非接触式紧凑组件（10）中。定子组件（16）围绕具有环形气隙（20）的铁磁转子（18），该环形气隙可容纳例如圆柱形壁（12e）。的腔室（12），用于半导体晶片（14）的处理。定子组件（16）具有夹在垂直隔开的磁性定子板（36）与多个磁极段（36a）之间的永磁体或磁体（38）。转子（18）优选为具有互补极齿（18c）的磁性不锈钢环。定子组件（16）使转子（18）沿垂直轴线浮动并被动地居中，并防止围绕任一水平轴线（26,28）倾斜，为转子（18）提供径向位置偏置，并建立电机磁通在转子极点（18c）处。缠绕在定子板（36）上的多相线圈（40）产生作为同步单极电机驱动转子（18）的旋转磁通场。控制器（54）响应于感测到的转子（18）的物理位置而激励缠绕在每个定子极段（36a）上的控制线圈（42），并且可以主动地衰减可以克服被动对中的振荡。

2. 发明公开

EP1655820A2 Integrated magnetic levitation and rotation system 失效
标题翻译： Integriertes Magnetschwebe- und -rotationssystem
公开(公告)号：EP1655820A2
公开(公告)日：2006-05-10
申请号：EP06001269.7
申请日：1996-10-18
申请人： Satcon Technology Corporation
发明人： Nichols, Stephen B. , Jagannathan, Shankar , Leary, Kevin , Eisenhaure, David , Stanton, William , Hockney, Richard , Downer, James , Gondhalekar, Vijay
IPC分类号： H02K7/08
CPC分类号： H01L21/68792 , F16C32/0448 , F16C32/047 , F16C32/0493 , F16C2380/26 , H02K7/09 , H02K17/12 , H02K21/44
摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber, for semiconductor wafer processing. The stator assembly (16) has a permanent magnet (38) or magnets sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly levitates and passively centres the rotor along a vertical axis and against tilt about the either horizontal axis (26, 28), provides a radial position bias for the rotor, and establishes a motor flux field at a the rotor poles. Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor. The control coils (42) provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.
摘要翻译：旋转电动机和旋转磁性轴承集成在非接触的紧凑组件（10）中。定子组件（16）围绕铁磁转子（18），环形气隙（20）可容纳圆柱形壁（12e）的腔室（12），用于半导体晶片（14）处理。定子组件（16）具有夹在具有多个极段（36a）的竖直间隔的磁性定子板（36）之间的永磁体或磁体（38）。转子（18）优选为具有互补极齿（18c）的磁性不锈钢环。定子组件（16）使转子（18）沿着垂直轴线悬浮并被动地居中并且围绕任一水平轴线（26,28）倾斜，为转子（18）提供径向位置偏置，并建立电动机通量在转子极（18c）处。缠绕在定子板（36）上的多相线圈（40）产生作为同步单极电动机驱动转子（18）的旋转磁通场。响应于感测到的转子（18）的物理位置，控制器（54）激励缠绕在每个定子极段（36a）上的控制线圈（42），并且可以主动地抑制可以克服无源对中的振荡。

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