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    • 2. 发明公开
    • LASER REFINING APPARATUS AND LASER REFINING METHOD
    • LASERVEREDELUNGSGERÄTUND LASERVEREDELUNGSVERFAHREN
    • EP2351861A1
    • 2011-08-03
    • EP09823560.9
    • 2009-10-27
    • Electra Holdings Co., Ltd.
    • YABE, TakashiCHOIJIL, BaasandashSATOH, Yuji
    • C22B5/16C22B26/22
    • C22B9/223C01B33/023C01B33/037C22B5/16C22B9/14
    • A laser refining apparatus and the laser refining method for efficiently collecting evaporant other than oxygen from an oxidized compound.
      (Means for solving the problem)
      The laser refining apparatus comprises a stage inside a processing chamber where an oxidized compound is placed; an irradiation means for irradiating a laser under the condition that the oxidized compound placed on the stage is heated to a temperature at or above the boiling point of said oxidized compound; an attaching medium to which non-oxygen evaporant evaporated by the laser irradiated by the irradiation means attaches; and a feeding means for feeding gas that prevents the non-oxygen evaporant from becoming an oxidized compound into the processing chamber. The attaching medium is positioned so that the non-oxygen evaporant can attach to the attaching medium before becoming an oxidized compound, and the oxidized compound is metal oxide or silicon oxide.
    • 一种激光精炼装置和用于从氧化化合物有效地收集除氧以外的蒸发剂的激光精制方法。 (解决问题的手段)激光精制装置包括:放置氧化化合物的处理室内的台; 在放置在载物台上的氧化化合物被加热到等于或高于所述氧化化合物的沸点的温度的条件下照射激光的照射装置; 由照射装置照射的激光蒸发了非氧蒸发剂的附着介质; 以及用于将防止非氧蒸发剂变成氧化化合物的气体的进料装置进入处理室。 所述附着介质被定位成使得所述非氧蒸发器在成为氧化化合物之前可附着于所述附着介质,并且所述氧化化合物是金属氧化物或氧化硅。