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1. 发明公开

EP2581949A1 SURFACE FEED-IN ELECTRODE FOR DEPOSITION OF THIN FILM SOLAR BATTERY AND SIGNAL FEED-IN METHOD THEREOF 有权
标题翻译： OBERFLÄCHENEINSPEISELEKTRODE用于薄膜太阳电池的分离。确保SIGNALEINSPEISMETHODE
公开(公告)号：EP2581949A1
公开(公告)日：2013-04-17
申请号：EP10852666.6
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： HU, Shengming , LI, Yi , HE, Zhubing , LI, Zhijian , ZHOU, Jianhua , WANG, Chunzhu
IPC分类号： H01L31/18 , C23C16/505 , H01J37/04
CPC分类号： C23C16/505 , C23C16/24 , H01J37/32091 , H01J37/32577 , H01L31/1804 , H01L31/1824 , Y02E10/545 , Y02E10/547 , Y02P70/521
摘要： The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RFNHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

2. 发明公开

EP2468922A1 DEPOSITION BOX FOR SILICON-BASED THIN FILM SOLAR CELL 有权
标题翻译： ABLAGERUNGSKASTENFÜREINEDÜNNSCHICHTSOLARZELLEAUF SILICIUMBASIS
公开(公告)号：EP2468922A1
公开(公告)日：2012-06-27
申请号：EP10852667.4
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： LI, Yi
IPC分类号： C23C16/509
CPC分类号： C23C16/24 , C23C16/509 , C23C16/545 , H01J37/32091 , H01J37/32577 , H01J37/32715 , H01L31/1816 , Y02E10/50
摘要： A movable deposition box (02) for silicon-based thin film solar cell comprises an electrode array composed of at least a group of cathode plates (203) and a piece of anode plate (208) which are set in movable chamber, wherein a feeding socket (203-1) is positioned on a circular or semicircular concave surface in the center area on the backside of the cathode plates (203), a circular or semicircular end face (201-1) of a feeding component (201) which has a flat middle part contacts the signal feeding socket (203-1) and feeds in RF/VHF power signal, the anode plate (208) is grounded, and a shield cover (204) of the cathode plate has through-hole (204-1) and is insulated from the cathode plate (203).
摘要翻译：一种用于硅基薄膜太阳能电池的可移动沉积盒（02）包括由至少一组阴极板（203）和一块阳极板（208）组成的电极阵列，该组阳极板设置在可移动室中，插座（203-1）位于阴极板（203）的背面的中心区域的圆形或半圆形的凹面上，馈送部件（201）的圆形或半圆形端面（201-1）平坦的中间部分接触信号馈送插座（203-1）并馈入RF / VHF功率信号，阳极板（208）接地，阴极板的屏蔽罩（204）具有通孔（204- 并且与阴极板（203）绝缘。

3. 发明授权

EP2468922B1 DEPOSITION BOX FOR SILICON-BASED THIN FILM SOLAR CELL 有权
标题翻译：保管箱薄膜太阳能电池ON硅基
公开(公告)号：EP2468922B1
公开(公告)日：2014-12-10
申请号：EP10852667.4
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： LI, Yi
IPC分类号： C23C16/509 , H01J37/32
CPC分类号： C23C16/24 , C23C16/509 , C23C16/545 , H01J37/32091 , H01J37/32577 , H01J37/32715 , H01L31/1816 , Y02E10/50

4. 发明公开

EP2581948A1 DISCHARGE ELECTRODE PLATE ARRAY FOR FILM SOLAR CELL DISPOSITION 有权
标题翻译： ENTLADUNGSELEKTRODENPLATTENARRAYFÜRDIE ABSCHEIDUNG VON FOLIENSOLARZELLEN
公开(公告)号：EP2581948A1
公开(公告)日：2013-04-17
申请号：EP10852664.1
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： LI, Zhijian , LI, Yi , HE, Zhubing , HE, Shengming , WANG, Chunzhu , ZHOU, Jianhua
IPC分类号： H01L31/18
CPC分类号： H01J1/02 , C23C16/517 , H01J37/32091 , H01J37/32577 , H01L31/202 , Y02E10/50 , Y02P70/521
摘要： A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.
摘要翻译：提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池淀积室的放电电极阵列。放电电极阵列包括具有矩形端部的信号馈送部件，平坦的腰部对应于位于具有屏蔽罩的阴极板的中心区域上的仰卧矩形区域中的馈入端口，连接馈入电源信号通过表面接触。电极阵列至少包括一组阴极板和阳极板，两个阴极板共享或围绕一个阳极板。可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。可以提高生产效率，降低成本。

5. 发明公开

EP2469611A1 MOVABLE JIG FOR SILICON-BASED THIN FILM SOLAR CELL 有权
标题翻译： BEWEGLICHE VORRICHTUNGFÜREINEDÜNNSCHICHTSOLARZELLEAUF SILICIUMBASIS
公开(公告)号：EP2469611A1
公开(公告)日：2012-06-27
申请号：EP10852665.8
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： HU, Shengming , LI, Yi , HE, Zhubing , LI, Zhijian , ZHOU, Jianhua , WANG, Chunzhu
IPC分类号： H01L31/18 , C23C16/505 , H05H1/46
CPC分类号： C23C16/505 , C23C16/545 , H01J37/32091 , H01J37/32577 , H01J37/32715 , H01L21/67313 , H01L21/67326 , H01L21/6734 , H01L31/18
摘要： A movable jig for a silicon-based thin film solar cell comprises parallel electrode plates (203,208), a supporting frame and a signal feed-in assembly (201). The supporting frame is a movable frame and its side frame (216) is grounded. A shield device is set on the jig or among jig arrays themselves for preventing from being disturbed. The signal feed-in assembly is a conductor and its middle portion and head portion form a ladder cylinder, and one end surface (201-1) of the signal feed-in assembly is triangular and can surface contact and connect with a sunken triangular feed-in port (203-1) in the center area of the back surface of the cathode plate (203) of the electrode plates, so the radio frequency/the very high frequency power supply signal can be fed in. Through the way of the surface feed-in in the center of the electrode plate, the consumption caused by the feeder distance in the way of one point feed-in or multipoint feed-in can be reduced, the large area stable discharge of the uniform electric field can be obtained, the production efficiency can be increased and the cost can be decreased.
摘要翻译：一种用于硅基薄膜太阳能电池的移动夹具包括平行电极板（203,208），支撑框架和信号馈入组件（201）。支撑框架是可移动框架，其侧框架（216）接地。屏蔽装置设置在夹具或夹具阵列之间，以防止被干扰。信号馈入组件是导体，其中间部分和头部形成梯形气缸，信号馈入组件的一个端面（201-1）是三角形的，并且可以与凹陷的三角形进给面接触并连接在电极板的阴极板（203）的后表面的中心区域中的入口（203-1），因此可以馈送射频/非常高频率的电源信号。通过在电极板的中心的表面馈入可以减少由一点馈入或多点馈入的馈线距离引起的消耗，可以获得均匀电场的大面积稳定放电，可以提高生产效率，降低成本。

6. 发明公开

EP2469610A1 CLAMPING UNIT FOR DEPOSITING THIN FILM SOLAR CELL AND SIGNAL FEED-IN METHOD 有权
标题翻译： KLEMMEINHEIT ZUR ABLAGERUNG EINERDÜNNSCHICHTSOLARZELLEUND SIGNALEINSPEISUNGSVERFAHREN
公开(公告)号：EP2469610A1
公开(公告)日：2012-06-27
申请号：EP10852663.3
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： LI, Yi
IPC分类号： H01L31/18 , C23C16/505 , H01J37/04
CPC分类号： H01J37/32091 , C23C16/4587 , H01J37/32577 , H01J37/32715
摘要： A clamping unit for depositing a thin film solar cell and a signal feed-in method are provided. The clamping unit comprises an electrode plate module, a signal feed-in module (201), and a supporting frame. The electrode plate module is set with a shielding cover (204). The signal feed-in module (201) comprises a waist section and a head section, wherein the head section is a rectangular-shaped signal feed-in surface. The head section of the signal feed-in module (201) is surface contacted with and is connected to the feed-in port of the electrode plate module. The feed-in port is set on the concave rectangular surface which is arranged in the central region of the back side of the cathode plate of the electrode plate module. The clamping unit can effectively remove standing wave effect and skin effect, improve the yields and reduce the costs.
摘要翻译：提供了用于沉积薄膜太阳能电池的夹紧单元和信号馈入方法。夹持单元包括电极板模块，信号馈入模块（201）和支撑框架。电极板模块设置有屏蔽盖（204）。信号馈入模块（201）包括腰部和头部，其中头部是矩形信号馈入表面。信号馈入模块（201）的头部与电极板模块的馈入口表面接触并连接到电极板模块的馈入口。馈入口设置在凹形矩形表面上，该矩形表面布置在电极板模块的阴极板的背面的中心区域中。夹紧单元可有效消除驻波效应和皮肤效应，提高产量，降低成本。

7. 发明授权

EP2469611B1 MOVABLE JIG FOR SILICON-BASED THIN FILM SOLAR CELL 有权
标题翻译：移动设备薄膜太阳能电池ON硅基
公开(公告)号：EP2469611B1
公开(公告)日：2014-12-10
申请号：EP10852665.8
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： HU, Shengming , LI, Yi , HE, Zhubing , LI, Zhijian , ZHOU, Jianhua , WANG, Chunzhu
IPC分类号： H01L31/18 , C23C16/505 , H05H1/46 , H01J37/32
CPC分类号： C23C16/505 , C23C16/545 , H01J37/32091 , H01J37/32577 , H01J37/32715 , H01L21/67313 , H01L21/67326 , H01L21/6734 , H01L31/18

8. 发明授权

EP2469610B1 CLAMPING UNIT FOR DEPOSITING THIN FILM SOLAR CELL AND SIGNAL FEED-IN METHOD 有权
标题翻译：终端单元存款的薄膜太阳能电池和信号注入程序
公开(公告)号：EP2469610B1
公开(公告)日：2014-10-15
申请号：EP10852663.3
申请日：2010-10-21
申请人： Shenzhen Trony Science & Technology Development Co., Ltd.
发明人： LI, Yi
IPC分类号： H01L31/18 , C23C16/505 , H01J37/04 , H01J37/32
CPC分类号： H01J37/32091 , C23C16/4587 , H01J37/32577 , H01J37/32715

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