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    • 2. 发明公开
    • MOVABLE JIG FOR SILICON-BASED THIN FILM SOLAR CELL
    • BEWEGLICHE VORRICHTUNGFÜREINEDÜNNSCHICHTSOLARZELLEAUF SILICIUMBASIS
    • EP2469611A1
    • 2012-06-27
    • EP10852665.8
    • 2010-10-21
    • Shenzhen Trony Science & Technology Development Co., Ltd.
    • HU, ShengmingLI, YiHE, ZhubingLI, ZhijianZHOU, JianhuaWANG, Chunzhu
    • H01L31/18C23C16/505H05H1/46
    • C23C16/505C23C16/545H01J37/32091H01J37/32577H01J37/32715H01L21/67313H01L21/67326H01L21/6734H01L31/18
    • A movable jig for a silicon-based thin film solar cell comprises parallel electrode plates (203,208), a supporting frame and a signal feed-in assembly (201). The supporting frame is a movable frame and its side frame (216) is grounded. A shield device is set on the jig or among jig arrays themselves for preventing from being disturbed. The signal feed-in assembly is a conductor and its middle portion and head portion form a ladder cylinder, and one end surface (201-1) of the signal feed-in assembly is triangular and can surface contact and connect with a sunken triangular feed-in port (203-1) in the center area of the back surface of the cathode plate (203) of the electrode plates, so the radio frequency/the very high frequency power supply signal can be fed in. Through the way of the surface feed-in in the center of the electrode plate, the consumption caused by the feeder distance in the way of one point feed-in or multipoint feed-in can be reduced, the large area stable discharge of the uniform electric field can be obtained, the production efficiency can be increased and the cost can be decreased.
    • 一种用于硅基薄膜太阳能电池的移动夹具包括平行电极板(203,208),支撑框架和信号馈入组件(201)。 支撑框架是可移动框架,其侧框架(216)接地。 屏蔽装置设置在夹具或夹具阵列之间,以防止被干扰。 信号馈入组件是导体,其中间部分和头部形成梯形气缸,信号馈入组件的一个端面(201-1)是三角形的,并且可以与凹陷的三角形进给面接触并连接 在电极板的阴极板(203)的后表面的中心区域中的入口(203-1),因此可以馈送射频/非常高频率的电源信号。通过 在电极板的中心的表面馈入可以减少由一点馈入或多点馈入的馈线距离引起的消耗,可以获得均匀电场的大面积稳定放电 ,可以提高生产效率,降低成本。