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2. 发明公开

EP0815411A1 VERFAHREN UND VORRICHTUNG ZUR BESTIMMUNG DREIDIMENSIONALER STRUKTUREN IM SUBMIKROMETERBEREICH 失效
标题翻译：方法和设备，用来确定三维亚微米
公开(公告)号：EP0815411A1
公开(公告)日：1998-01-07
申请号：EP96903862.0
申请日：1996-03-06
申请人： Weber, Heinz Paul, Prof. Dr.
发明人： WEBER, Heinz, Paul , HODEL, Walter , ROMANO, Valerio
IPC分类号： G01B9 , G01B11 , G01N21 , G02B21
CPC分类号： G01B11/2441 , G01B9/023
摘要： The invention concerns a process for determining three-dimensional structures in the submicron range, which process operates with a coherent beam (3), in particular a laser beam, divided into two partial beams (5a, 11a, 14a; 5b, 11b, 21). The first partial beam (5a, 11b, 21) is focused on an object (1) to be dimensioned structurally with a focusing diameter (24) having approximately the wavelength of the beam. The radiation (25) reflected back from the focus point (24) by the focusing lens (23) is superimposed with the radiation of the second partial beam (5a, 11a, 14a) on a detector field (19) comprising a plurality of mutually independent detectors, and the location-dependent radiation intensity values on the detectors are converted by the latter into analogue electrical signals and stored. Complex amplitude values are determined in each case from these stored values with first phase values of the local wave field at the location (19) of the detectors. Second phase values are formed from the given first phase values by multiplication with a predetermined value. With these second phase values, the intensity values of the original complex amplitude values stored in first memories (30), and the location co-ordinates of the respective detectors, an enlarged object structure is calculated and can be displayed graphically as an enlarged or hologram-like image with structures in the submicron range.

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