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    • 2. 发明公开
    • Motorized manipulator for positioning a TEM specimen
    • Motorisierter机械手zur Positionierung eines TEM-Prüflings
    • EP2051281A2
    • 2009-04-22
    • EP08166727.1
    • 2008-10-16
    • The Regents Of The University Of California
    • Schmid, AndreasAndresen, Nord
    • H01J37/20H01L41/09
    • H02N2/0095H01J37/20H01J37/26H01J2237/20207H01J2237/20214H01J2237/20221H01J2237/20264H01J2237/20278H01J2237/28Y10T74/20348
    • The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means ( 30 ) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3 a , 3 b , 3 c ) mounted on the base, each nano-actuator showing a tip (4 a , 4 b , 4 c ), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.
    • 本发明涉及一种用于定位与yz平面平行的亚微米分辨率的TEM样本保持器并将样本架旋转在yz平面中的机动操纵器,所述操纵器包括基座(2)和附接装置(30),用于附接 所述样本保持器到所述操纵器,其特征在于,所述操纵器还包括安装在所述基座上的至少三个纳米致动器(3a,3b,3c),每个纳米致动器显示尖端(4a,4b, c),限定yz平面的至少三个尖端,每个尖端能够相对于yz平面中的基座移动; 与纳米致动器的尖端接触的平台(5); 以及用于将平台压靠在纳米致动器的尖端上的夹紧装置(6) 其结果是,纳米致动器可以使平台相对于基座在y-z平面中旋转,并将平台平行于y-z平面平移。