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1. 发明授权

EP1105913B1 ELECTRON MICROSCOPE 有权
标题翻译：电子显微镜
公开(公告)号：EP1105913B1
公开(公告)日：2005-05-04
申请号：EP99941873.4
申请日：1999-08-27
申请人： Technische Universiteit Delft
发明人： KRUIT, Pieter , MOOK, Hindrik, Willem
IPC分类号： H01J37/05 , H01J37/28 , H01J37/153
CPC分类号： H01J37/05 , H01J37/153 , H01J37/28

2. 发明公开

EP1105913A1 ELECTRON MICROSCOPE 有权
标题翻译：电子显微镜
公开(公告)号：EP1105913A1
公开(公告)日：2001-06-13
申请号：EP99941873.4
申请日：1999-08-27
申请人： Technische Universiteit Delft
发明人： KRUIT, Pieter , MOOK, Hindrik, Willem
IPC分类号： H01J37/05 , H01J37/28 , H01J37/153
CPC分类号： H01J37/05 , H01J37/153 , H01J37/28
摘要： An electron microscope provided with an electron source; an energy-dispersive element; an accelerating tube; a plate mounted between the energy-dispersive element and the specimen, in which a selection slit is provided at right angles to the dispersive direction of the dispersive element; source imaging electron optics for obtaining an image of a source in the plane of the plate comprising the selection slit. In addition to the selection slit, the plate comprises a plurality of further apertures useful for the determination of the cross-sectional form of the beam; and the electron microscope comprises means for the determination of the intensity of the beam being transmitted through and/or onto the plate, so that subject thereto, setting parameters of the energy-dispersive element and the source imaging electron optics can be aligned. The dimensions of the apertures are in the nanometric range and the plate constitutes a thin membrane placed at a position where the electron's kinetic energy is so low that it can be blocked by the thin membrane. Further, the plate is positioned directly after the energy-dispersive element and the source imaging electron optics.
摘要翻译：装有电子源的电子显微镜; 能量分散元件; 加速管; 安装在能量色散元件和样品之间的板，其中选择狭缝与分散元件的色散方向成直角; 源成像电子光学器件，用于在包括选择狭缝的板的平面中获得源的图像。除了选择狭缝之外，板还包括多个用于确定光束横截面形状的其他孔，并且电子显微镜包括用于确定通过和/或在板上传输的光束的强度的装置，使得受其影响的能量色散元件和源成像电子光学器件的设置参数可以对齐。孔的尺寸在纳米范围内，并且板构成薄膜，放置在电子的动能很低以致可以被薄膜阻挡的位置处。此外，该板位于能量色散元件和源成像电子光学器件之后。

3. 发明授权

EP1042784B1 WIEN FILTER 有权
公开(公告)号：EP1042784B1
公开(公告)日：2003-08-27
申请号：EP98962700.5
申请日：1998-12-23
申请人： Technische Universiteit Delft
发明人： MOOK, Hindrik, Willem
IPC分类号： H01J49/46 , H01J37/05
CPC分类号： H01J37/05 , H01J49/466
摘要： The invention relates to a Wien filter provided with electrodes for generating an electric field, and magnetic poles for generating a magnetic field, said electrodes and magnetic poles being positioned around and having a finite length along a filter axis, and being positioned around the filter axis such that electric and magnetic forces induced by the respective fields and exerted on an electrically charged particle moving substantially along the fileter axis at a certain velocity, take substantially an opposite direction to one another and are directed substantially perpendicular to the particle's direction of movement through the filter, said filter having along its axis two ends determined by the finite length of the electrodes and magnetic poles, and said ends both being terminated by a closing plate which is positioned substantially transversely to the filter axis and is provided with an aperture around the filter axis to allow the particle to enter into an exit from the filter. The closing plates are made from a material of low electric and magnetic resistance, and the distance from the closing plates to a plane halfway along and perpendicular to the filter axis is at most approximately equal to the shortest distance from the filter axis to the electrodes and/or magnetic poles.

4. 发明公开

EP1042784A1 WIEN FILTER 有权
标题翻译：维也纳FILTER
公开(公告)号：EP1042784A1
公开(公告)日：2000-10-11
申请号：EP98962700.5
申请日：1998-12-23
申请人： Technische Universiteit Delft
发明人： MOOK, Hindrik, Willem
IPC分类号： H01J49/46 , H01J37/05
CPC分类号： H01J37/05 , H01J49/466
摘要： The invention relates to a Wien filter provided with electrodes for generating an electric field, and magnetic poles for generating a magnetic field, said electrodes and magnetic poles being positioned around and having a finite length along a filter axis, and being positioned around the filter axis such that electric and magnetic forces induced by the respective fields and exerted on an electrically charged particle moving substantially along the fileter axis at a certain velocity, take substantially an opposite direction to one another and are directed substantially perpendicular to the particle's direction of movement through the filter, said filter having along its axis two ends determined by the finite length of the electrodes and magnetic poles, and said ends both being terminated by a closing plate which is positioned substantially transversely to the filter axis and is provided with an aperture around the filter axis to allow the particle to enter into an exit from the filter. The closing plates are made from a material of low electric and magnetic resistance, and the distance from the closing plates to a plane halfway along and perpendicular to the filter axis is at most approximately equal to the shortest distance from the filter axis to the electrodes and/or magnetic poles.

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