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1. 发明公开

EP2401579A1 MIKRO-ELEKTRO-MECHANISCHER SENSOR 有权转让
标题翻译：微电子机械传感器
公开(公告)号：EP2401579A1
公开(公告)日：2012-01-04
申请号：EP10703181.7
申请日：2010-02-03
申请人： Sensordynamics AG
发明人： KEMPE, Volker
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/574
摘要： The invention relates to an electromechanic microsensor (MEMS) (1) comprising drive elements (2, 3, 4) which are moved linearly in an x-y plane and disposed on a substrate for determining at least two, preferably three, components of the yaw rate vector of the substrate, wherein two groups of drive elements (2, 3; 4) exist, which are driven essentially in directions running essentially at right angles to each other. The electromechanic microsensor (MEMS) (1) according to the invention is characterized in that the drive elements (2, 4; 3, 4) which are moved at right angles to each other are connected to one another for synchronizing the movements by means of a coupling device (6, 7) that is rotatably mounted on the substrate.

2. 发明公开

EP2087315A1 ANORDNUNG ZUR MESSUNG EINER DREHRATE MIT EINEM VIBRATIONSSENSOR 有权
公开(公告)号：EP2087315A1
公开(公告)日：2009-08-12
申请号：EP07820163.9
申请日：2007-09-13
申请人： Continental Automotive GmbH , Sensordynamics AG
发明人： GIER, Lothar , KEMPE, Volker , STRLE, Drago
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： The invention relates to an arrangement for measuring a rate of rotation using a vibration sensor, the vibration of said sensor being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration. Alternating voltages having a second measuring frequency which is different from the first measuring frequency and higher than the excitation frequency are supplied to the fixed electrodes of the measuring elements, and/or an excitation voltage can be supplied to drive elements causing a vibration excitation in a direction on the basis of the excitation voltage, said excitation voltage being in antiphase with the excitation voltage supplied to other drive elements causing an excitation in the other direction.
摘要翻译：该装置具有振动传感器（2），即振动陀螺仪，其振动是使用电容驱动单元（11-14）垂直于轴启动的。电容单元由固定电极（18,18'）和与固定连接的电极（17）形成并可与振动传感器一起移动。激励电压被提供给电容单元的固定电极，其频率对应于电容性驱动单元的谐振频率的谐振频率或次谐波。

3. 发明公开

EP2076783A1 SENSOR ZUR ERFASSUNG VON BESCHLEUNIGUNGEN 有权转让
标题翻译：传感器检测出加速度
公开(公告)号：EP2076783A1
公开(公告)日：2009-07-08
申请号：EP07821240.4
申请日：2007-10-12
申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. , Sensordynamics Ag Entwicklungs- Und Produktionsges
发明人： SCHWARZELBACH, Oliver , WEISS, Manfred , KEMPE, Volker
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
摘要： The present invention relates to a sensor for detecting an acceleration acting on the sensor, having: a substrate (3), a mass unit (9), which acts as an inert mass in the event of the presence of an acceleration, a fixing structure (2, 1, 5), by means of which the mass unit is articulated on the substrate, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis (y; z) is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and wherein the mass unit has an interial centre of gravity (4), which is at a distance from the respective pivot axis, and at least one detection unit (11; 15), with which a change in position between the mass unit and the substrate can be detected, characterized in that the detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit. Preferably, two detection units are provided. A change in position between the mass unit and the substrate which is brought about as a result of an acceleration of the sensor acting in a first direction can be detected using one of these units, while the other unit can be used to detect a change in position between the mass unit and the substrate brought about as a result of an acceleration of the sensor acting in a second direction.

4. 发明授权

EP2087315B1 ANORDNUNG ZUR MESSUNG EINER DREHRATE MIT EINEM VIBRATIONSSENSOR 有权
公开(公告)号：EP2087315B1
公开(公告)日：2017-07-12
申请号：EP07820163.9
申请日：2007-09-13
申请人： Continental Automotive GmbH , Sensordynamics AG
发明人： GIER, Lothar , KEMPE, Volker , STRLE, Drago
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712

5. 发明公开

EP2401581A1 MIKRO-GYROSKOP ZUR ERMITTLUNG VON ROTATIONSBEWEGUNGEN UM EINE X- UND/ODER Y- SOWIE Z-ACHSE 有权转让
标题翻译：微陀螺仪用于确定旋转而移动到X和/或Y轴和Z轴
公开(公告)号：EP2401581A1
公开(公告)日：2012-01-04
申请号：EP10705341.5
申请日：2010-02-22
申请人： Sensordynamics AG
发明人： KEMPE, Volker
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5747
摘要： The invention relates to a microgyroscope for determining rotational movements about an x and/or y and z axis, comprising a substrate, several oscillating masses (4, 5), springs for fastening the oscillating masses (4, 5) to the substrate, drive elements for vibrating at least individual ones of the masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements for detecting deflections of the masses (4, 5) on account of the Coriolis forces produced. At least individual ones of the masses (4, 5) are arranged in two groups. The masses (4, 5) of both groups can be jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses (4) of the first group are arranged on the substrate in such a manner that they allow movements starting from the x-y plane. The masses (5) of the second group are arranged on the substrate in such a manner that they allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.

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