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1. 发明公开

EP2294359A1 MIKRO-GYROSKOP 有权转让
公开(公告)号：EP2294359A1
公开(公告)日：2011-03-16
申请号：EP09769333.7
申请日：2009-06-25
申请人： Sensordynamics AG
发明人： ROCCHI, Alessandro
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/574
摘要： The invention relates to a microgyroscope for determining rotational movements about an x, y or z axis. At least one anchor is fastened to a substrate. A plurality of, in particular four, masses which oscillate radially with respect to the anchor are fastened to the anchor by means of springs. Drive elements are used to vibrate at least individual ones of the masses in an oscillatory manner in the x or y direction in order to produce Coriolis forces when the substrate is deflected. Sensor elements are used to detect deflections of the masses on account of the Coriolis forces produced. The oscillating masses are connected to at least one further, non-oscillating mass which can, however, rotate together with the oscillating masses on the substrate about the at least one anchor. A further sensor element is associated with this further mass.
摘要翻译：用于确定围绕x，y或z轴的旋转运动的微型曝光机。至少一个锚固件固定到基底上。相对于锚固件径向摆动的多个，特别是四个质量块通过弹簧固定到锚固件上。驱动元件用于在x或y方向上以振荡的方式振动至少单个质量块，以便当衬底偏转时产生科里奥利力。传感器元件用于根据所产生的科里奥利力来检测质量的偏转。振荡块连接到至少一个附加的非振荡质量，然而，其可以与围绕至少一个锚的基板上的振荡块一起旋转。另外的传感器元件与该附加质量相关联。

2. 发明公开

EP1933514A2 Verfahren zur Zweiseitenbandübertragung 审中-公开
标题翻译： Verfahren zurZweiseitenbandübertragung
公开(公告)号：EP1933514A2
公开(公告)日：2008-06-18
申请号：EP07020207.2
申请日：2007-10-16
申请人： Sensordynamics AG
发明人： Schultes, Gerhard, Dr.
IPC分类号： H04L27/00
CPC分类号： H04L27/2053 , H04L27/233
摘要： Bei einem Verfahren zur digitalen Datenübertragung über ein bestimmtes möglichst schmalbandiges Frequenzband mithilfe von Phasenmodulation eines seriellen Datenstromes, vorzugsweise in NRZ-(Non-Return-to-Zero) oder differentieller NRZI (Non-Return-to-Zero, Invert on Ones) Kodierung dient ein Datenstromteiler der Erzeugung zweier Sekundär-Datenströme aus einem Primärdatenstrom. Durch Modulation auf zwei Teilfrequenzbänder unterhalb und oberhalb der zugeordneten Zentralfrequenz entsteht ein kombiniertes Frequenzband mit einer fiktiven (nicht vorhandenen oder primär nur zur Modulation genutzten) Trägerfrequenz und einem unterem Seitenband und einem oberen Seitenband.
Die gebildete Frequenzlücke (Notch) bietet Vorteile gegenüber den gegenwärtigen Methoden bei nahezu gleichem Bandbreitebedarf wie bei bestehenden Verfahren.
Das Verfahren eliminiert die Nachteile der bestehenden Übertragungsverfahren ohne auf die entwickelten Basistechnologien vollständig verzichten zu müssen, dadurch kann eine Schaltungsintegration in monolithische Halbleiter mit äußerst geringen Qualitätskompromisse und ohne externe Komponenten erreicht werden, wodurch kleinste Übertragungsgeräte zu geringeren Produktionskosten erzielbar sind.
摘要翻译：该方法包括利用数据分割单元（3）将具有数据速率（R-o）的串行数字数据流（11）与另一数据速率（R1，R2）分离成两个数字部分数据流（13,14）。每个部分数据流被引导到具有调制频率的相位调制器（5,6）。相对于虚拟载波（f-c）表示频率扫描，虚拟载波被选择为使得部分数据流的显影部分频带（LSB，USB）在虚拟载波上方和下方不彼此重叠。

3. 发明公开

EP2401580A1 MEMS-GYROSKOP ZUR ERMITTLUNG VON ROTATIONSBEWEGUNGEN UM EINE X-, Y- UND/ODER Z-ACHSE 有权转让
标题翻译： MEMS陀螺仪用于确定旋转使一个X，Y和/或Z轴
公开(公告)号：EP2401580A1
公开(公告)日：2012-01-04
申请号：EP10703284.9
申请日：2010-02-11
申请人： Sensordynamics AG
发明人： ROCCHI, Alessandro
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5712 , G01C19/574
摘要： The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially with respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses (2) are connected to at least one further non-oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect deflections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).

4. 发明公开

EP2257822A1 MIKROELEKTROMECHANISCHER INERTIALSENSOR MIT ATMOSPHAERISCHER BEDAEMPFUNG 审中-公开
标题翻译：微机电与大气衰减惯性传感器
公开(公告)号：EP2257822A1
公开(公告)日：2010-12-08
申请号：EP09723766.3
申请日：2009-03-25
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. , SD Sensordynamics AG
发明人： REINERT, Wolfgang , HELLER, Martin
IPC分类号： G01P15/08
CPC分类号： G01P1/003 , G01C19/5783 , G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-filled cavity in which a first detection unit is disposed moveably relative to the housing for detection of an acceleration to be detected, wherein the inertial sensor comprises a damping structure.

5. 发明公开

EP2183548A1 MIKROMECHANISCHER DREHRATENSENSOR 有权转让
公开(公告)号：EP2183548A1
公开(公告)日：2010-05-12
申请号：EP08786708.1
申请日：2008-07-31
申请人： Sensordynamics AG
发明人： HAMMER, Hanno
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： The present invention relates to a micromechanical Coriolis rate-of-rotation sensor for detecting a rate of rotation about a measurement axis which is denoted the X axis below, having a substrate, an oscillation structure and means for generating a rotational oscillation about an excitation axis (Z axis) which is orthogonal to the measurement axis, wherein the oscillation structure is rotatably connected to the substrate by means of first, inner suspension means or by means of a central suspension means, with the result that it can carry out rotational oscillations about a fulcrum relative to the substrate, wherein at least one pair of second suspension means also connects the oscillation structure to the substrate and is arranged on opposite sides of the fulcrum, wherein the at least one pair of second suspension means is arranged at a greater radial distance from the fulcrum than the first, inner suspension means or the central suspension means in order to provide a micromechanical Coriolis rate-of-rotation sensor with a response behaviour which can be designed in a manner specific to the axis of rotation and with sufficient sensitivity to rates of rotation in one or more directions of rotation, which sensor simultaneously has sufficient robustness with respect to the effect of external shock or vibration in the measuring direction or directions (about a detection axis) in order to meet the requirements for electronic signal processing as far as possible and, in particular, to counteract the risk of the oscillation structure sticking on the substrate.

6. 发明公开

EP2087315A1 ANORDNUNG ZUR MESSUNG EINER DREHRATE MIT EINEM VIBRATIONSSENSOR 有权
公开(公告)号：EP2087315A1
公开(公告)日：2009-08-12
申请号：EP07820163.9
申请日：2007-09-13
申请人： Continental Automotive GmbH , Sensordynamics AG
发明人： GIER, Lothar , KEMPE, Volker , STRLE, Drago
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： The invention relates to an arrangement for measuring a rate of rotation using a vibration sensor, the vibration of said sensor being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration. Alternating voltages having a second measuring frequency which is different from the first measuring frequency and higher than the excitation frequency are supplied to the fixed electrodes of the measuring elements, and/or an excitation voltage can be supplied to drive elements causing a vibration excitation in a direction on the basis of the excitation voltage, said excitation voltage being in antiphase with the excitation voltage supplied to other drive elements causing an excitation in the other direction.
摘要翻译：该装置具有振动传感器（2），即振动陀螺仪，其振动是使用电容驱动单元（11-14）垂直于轴启动的。电容单元由固定电极（18,18'）和与固定连接的电极（17）形成并可与振动传感器一起移动。激励电压被提供给电容单元的固定电极，其频率对应于电容性驱动单元的谐振频率的谐振频率或次谐波。

7. 发明公开

EP2076783A1 SENSOR ZUR ERFASSUNG VON BESCHLEUNIGUNGEN 有权转让
标题翻译：传感器检测出加速度
公开(公告)号：EP2076783A1
公开(公告)日：2009-07-08
申请号：EP07821240.4
申请日：2007-10-12
申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. , Sensordynamics Ag Entwicklungs- Und Produktionsges
发明人： SCHWARZELBACH, Oliver , WEISS, Manfred , KEMPE, Volker
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
摘要： The present invention relates to a sensor for detecting an acceleration acting on the sensor, having: a substrate (3), a mass unit (9), which acts as an inert mass in the event of the presence of an acceleration, a fixing structure (2, 1, 5), by means of which the mass unit is articulated on the substrate, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis (y; z) is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and wherein the mass unit has an interial centre of gravity (4), which is at a distance from the respective pivot axis, and at least one detection unit (11; 15), with which a change in position between the mass unit and the substrate can be detected, characterized in that the detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit. Preferably, two detection units are provided. A change in position between the mass unit and the substrate which is brought about as a result of an acceleration of the sensor acting in a first direction can be detected using one of these units, while the other unit can be used to detect a change in position between the mass unit and the substrate brought about as a result of an acceleration of the sensor acting in a second direction.

8. 发明公开

EP2401579A1 MIKRO-ELEKTRO-MECHANISCHER SENSOR 有权转让
标题翻译：微电子机械传感器
公开(公告)号：EP2401579A1
公开(公告)日：2012-01-04
申请号：EP10703181.7
申请日：2010-02-03
申请人： Sensordynamics AG
发明人： KEMPE, Volker
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/574
摘要： The invention relates to an electromechanic microsensor (MEMS) (1) comprising drive elements (2, 3, 4) which are moved linearly in an x-y plane and disposed on a substrate for determining at least two, preferably three, components of the yaw rate vector of the substrate, wherein two groups of drive elements (2, 3; 4) exist, which are driven essentially in directions running essentially at right angles to each other. The electromechanic microsensor (MEMS) (1) according to the invention is characterized in that the drive elements (2, 4; 3, 4) which are moved at right angles to each other are connected to one another for synchronizing the movements by means of a coupling device (6, 7) that is rotatably mounted on the substrate.

9. 发明公开

EP2388908A2 Integrierter CMOS-Weitband-Taktgeber mit differentiellem Aufbau 有权转让
公开(公告)号：EP2388908A2
公开(公告)日：2011-11-23
申请号：EP11162921.8
申请日：2011-04-19
申请人： SensorDynamics AG
发明人： Akbari-Dilmaghani, Rahim Dr.
IPC分类号： H03B5/12
CPC分类号： H03B5/1228 , H03B5/1215 , H03B5/1243
摘要： Differentieller Weitband-Taktgeber mit einem spannungsgesteuertem Oszillator zum Erzeugen eines differentiellen Oszillatorsignals, umfassend zwei kreuzgekoppelte PMOS-Transistoren, welche jeweils einen Source-Anschluss, einen Drain-Anschluss und einen Gate-Anschluss aufweisen, umfassend eine symmetrische Kapazitätsdiodenschaltung, welche eine durch eine Steuerspannung einstellbare Kapazität aufweist, welche zwischen den beiden Drain-Anschlüssen wirkt, umfassend eine zur Kapazitätsdiodenschaltung parallel geschaltete Induktivitätsschaltung, welche einen Mittenabgriff aufweist, und umfassend zwei Ausgangsanschlüsse zum Abgreifen des differentiellen Oszillatorsignals, welche jeweils mit einem der Drain-Anschlüsse verbunden sind, mit einem positiven Versorgungskontakt und einem negativen Versorgungskontakt und mit einer Ruhestromquelle zur Beaufschlagung des Oszillators mit einem Ruhestrom, deren erster Pol mit dem positiven Versorgungskontakt und deren zweiter Pol mit den Source-Anschlüssen der PMOS-Transistoren verbunden ist, wobei ein einstellbarer Diodenblock vorgesehen ist, der eine Vielzahl von NMOS-Transistoren umfasst, welche jeweils einen Source-Anschluss, einen Drain-Anschluss und einen Gate-Anschluss aufweisen, wobei deren Drain-Anschlüsse mit dem Mittenabgriff der Induktivitätsschaltung und deren Source-Anschlüsse mit dem einen negativen Versorgungskontakt verbunden sind, wobei jedem der NMOS-Transistoren jeweils eine Steuerschaltung zugeordnet ist, welche in Abhängigkeit eines binären Programmiersignals den jeweiligen Gate-Anschluss entweder mit dem jeweiligen Drain-Anschluss oder mit dem jeweiligen Source-Anschluss verbindet.
摘要翻译：互补对称金属氧化物半导体集成差分宽带时钟发生器包括调整二极管块（4）和具有源极端（SNi）的n沟道金属氧化物半导体场效应晶体管（MNi）漏极端子和栅极端子。为n沟道金属氧化物半导体场效应晶体管提供控制电路。电感电路包括金属层形成的电感元件（L1，L2）。

10. 发明公开

EP2210065A1 METHOD AND DEVICE FOR CONTACTLESS SENSING ROTATION AND ANGULAR POSITION USING ORIENTATION TRACKING 审中-公开
标题翻译：方法和装置用于非接触式检测旋转和角度位置使用姿势的跟踪
公开(公告)号：EP2210065A1
公开(公告)日：2010-07-28
申请号：EP07815163.6
申请日：2007-10-25
申请人： Sensordynamics AG , Trontelj, Janez
发明人： TRONTELJ, Janez
IPC分类号： G01D5/14
CPC分类号： G01B7/30 , G01D5/145 , G01R33/07
摘要： 1. Method and device for contactless sensing rotation and angular position using orientation tracking. 2.1 To improve the accuracy and possible resolution of a magnetic positioning system, a method and a device using a special tracking technique is proposed. 2.2. The method and the device are using multiple magnetic field sensing elements at different positions below a magnetic target. The sensed signals are used to select or combine the sensing elements for a best approach to the actual orientation of the magnet. This allows putting out the related orientation of the approach as a coarse value and the remaining displacement as a fine value. 2.3. A device using this method allows highly accurate measurement of angular positions controlling or tolerating the placement of a magnet as the input source.

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