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    • 1. 发明公开
    • Nitride-based light emitting device and method of manufacturing the same
    • 维多利亚·祖尔·赫斯特隆
    • EP2262013A2
    • 2010-12-15
    • EP10181626.2
    • 2004-10-05
    • Samsung LED Co., Ltd.Gwangju Institute of Science and Technology
    • Seong, Tae-yeonKim, Kyoung-kookSong, June-oLeem, Dong-seok
    • H01L33/40H01L33/42
    • H01L33/42H01L33/32H01L33/405H01L2933/0016
    • Provided are a nitride-based light emitting device and a method of manufacturing the same. The nitride-based light emitting device has a structure in which at least an n-cladding layer (130), an active layer (140), and a p-cladding layer (150) are sequentially formed on a substrate (110). The light emitting device further includes an ohmic contact layer (230) composed of a zinc (Zn)-containing oxide containing a p-type dopant formed on the p-cladding layer. The method of manufacturing the nitride-based light emitting device includes forming an ohmic contact layer composed of Zn-containing oxide containing a p-type dopant on the p-cladding layer, the ohmic contact layer being made and annealing the resultant structure. The nitride-based light emitting device and manufacturing method provide excellent I-V characteristics by improving ohmic contact with a p-cladding layer while significantly enhancing light emission efficiency of the device due to high light transmittance of a transparent electrode.
    • 提供一种氮化物系发光器件及其制造方法。 氮化物系发光器件具有在衬底(110)上依次形成至少n包层(130),有源层(140)和p包层(150)的结构。 该发光器件还包括由含有含锌(Zn)的氧化物构成的欧姆接触层(230),该氧化物含有形成在p包覆层上的p型掺杂剂,以及由至少一种元素组成的反射层(240) 在欧姆接触层上形成的由Ag,Al,Zn,Mg,Ru,Ti,Rh,Cr和Pt组成的组。 制造氮化物系发光器件的方法包括在p包层上形成由含有p型掺杂剂的含Zn氧化物构成的欧姆接触层,在欧姆接触层上形成至少一种元素的反射层 由Ag,Al,Zn,Mg,Ru,Ti,Rh,Cr和Pt组成的组,并退火所得结构。 氮化物系发光器件和制造方法通过改善与p型包层的欧姆接触而提供优异的I-V特性,同时由于反射型p电极的高反射率而显着提高了器件的发光效率。