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1. 发明公开

EP0567124A3 Bonding tool having diamond head and method of manufacturing the same 失效
标题翻译：具有钻石头的连接工具及其制造方法
公开(公告)号：EP0567124A3
公开(公告)日：1993-12-08
申请号：EP93106560.1
申请日：1993-04-22
申请人： SUMITOMO ELECTRIC INDUSTRIES, LIMITED
发明人： Tanabe, Keiichiro, c/o Itami Works of Sumitomo , Takahashi, Toshiya, c/o Itami Works of Sumitomo , Ikegaya, Akihiko, c/o Itami Works of Sumitomo , Fujimori, Naoji, c/o Itami Works of Sumitomo
IPC分类号： H01L21/603 , H01L21/00 , C04B41/50 , B23K20/02 , C23C16/26
CPC分类号： C04B41/009 , B23K20/025 , C04B41/5002 , C04B41/85 , H01L24/79 , H05K13/003 , C04B41/4531 , C04B41/51 , C04B41/526 , C04B41/5053 , C04B35/565 , C04B35/584 , C04B35/581
摘要： A bonding tool (40) has a head portion (45) which consists essentially of vapor-deposited diamond, wherein a principal diamond crystal plane forming a head face (47) is a (111) plane. Such a head face has high hardness, and is hard to wear. In order to improve toughness of a bonding head which is mainly made of vapor-deposited diamond, a portion forming a head face consists essentially of high-purity diamond, and another portion supporting the head face consists essentially of low-purity diamond. The head face has high rigidity, while the portion supporting the head face has high toughness. In order to provide a bonding head portion which is mainly made of vapor-deposited diamond with electrical conductivity, a portion forming a head face consists essentially of polycrystalline diamond containing a relatively small amount of dopant, and another portion supporting this portion contains a large amount of dopant. The head portion having electrical conductivity can be heated by energization. In a tool employing a coating containing vapor-deposited diamond as a bonding head portion, the coating is formed by a complex of a metal or ceramics and vapor-deposited diamond, in order to improve strength of the coating and adhesion to a tool substrate. The metal or ceramics is closer in thermal expansion coefficient to the tool substrate than the diamond.

2. 发明公开

EP0487292A1 Polycrystalline diamond tool and method for producing same 失效
标题翻译： Polykristallines Dimantwerkzeug und Verfahrenfürseine Herstellung。
公开(公告)号：EP0487292A1
公开(公告)日：1992-05-27
申请号：EP91310636.5
申请日：1991-11-19
申请人： SUMITOMO ELECTRIC INDUSTRIES, LIMITED
发明人： Tanabe, Keiichiro, c/o Itami Works of Sumitomo , Fujimori, Naoji, c/o Itami Works of Sumitomo
IPC分类号： C23C16/00 , C23C16/26
CPC分类号： C23C16/27 , C23C16/01 , C23C16/271 , C23C16/274 , C23C16/276 , C23C16/277 , C23C16/278 , C23C16/279 , Y10S76/12 , Y10T407/27 , Y10T408/78 , Y10T408/81 , Y10T428/12021 , Y10T428/12028 , Y10T428/12056 , Y10T428/12146
摘要： Polycrystalline diamond (2) has non-uniform impurity concentration along the direction of thickness. The diamond near the rake surface (4) has lower impurity concentration. The diamond near the fixation surface (5) has high impurity concentration. The diamond with higher impurity concentration near the fixation surface (5) alleviates a strong stress or absorbs an external shock. Owing to the higher impurity concentration of diamond near the fixation surface (5), the diamond tool excels in chip resistance or toughness. The diamond with high impurity concentration near the rake surface heightens abrasion resistance, adhesion resistance and strength.
摘要翻译：多晶金刚石（2）沿着厚度方向具有不均匀的杂质浓度。靠近耙面（4）的金刚石杂质浓度较低。固定面（5）附近的金刚石杂质浓度高。在固定表面（5）附近具有较高杂质浓度的金刚石缓解强烈的应力或吸收外部冲击。由于在固定表面（5）附近金刚石的杂质浓度较高，金刚石工具的芯片电阻或韧性优异。在前刀面附近具有高杂质浓度的金刚石提高了耐磨性，耐粘连性和强度。

4. 发明公开

EP0666338A1 Method of synthesizing and polishing a flat diamond film 失效
标题翻译： Verfahren zur Herstellung und Polierung eines flank Diamantfilmes。
公开(公告)号：EP0666338A1
公开(公告)日：1995-08-09
申请号：EP95300431.4
申请日：1995-01-25
申请人： SUMITOMO ELECTRIC INDUSTRIES, LIMITED
发明人： Ikegaya, Akihiko, c/o Itami Works of Sumitomo , Tanabe, Keiichiro, c/o Itami Works of Sumitomo , Fujimori, Naoji, c/o Itami Works of Sumitomo
IPC分类号： C23C16/26 , B24B9/16
CPC分类号： C23C16/279 , B24B9/16 , C23C16/27 , C23C16/271
摘要： A flat free-standing diamond film is produced by growing alternately more than one pair of a potential-concave diamond layer and a potential-convex diamond layer on a non-diamond substrate and eliminating the substrate. The potential-concave films are made by a CVD method under a condition (b) of a substrate temperature of 880°C to 950°C and a hydrocarbon ratio of 2.5 vol% to 3.5vol%. The potential-convex films are made by a CVD method under the condition (a) of a substrate temperature of 800°C to 850°C and a hydrocarbon ratio of 0.5 vol% to 1.5 vol%. The condition (a) can make a potential-convex film of a good crystal quality in spite of the slow deposition speed. It is preferable to employ an assembly of thinner potential-convex films and thicker potential-concave films to curtail the total time of synthesis. A multilayered diamond film with an arbitrary curvature can be produced by selecting the production conditions (a) and (b), and the thicknesses of the potential-convex layers and the potential-concave layers.
The diamond films still fixed on the substrate can be polished by an ordinary polishing apparatus, since the film is flat. A polished flat diamond film can be obtained by eliminating the substrate.
摘要翻译：通过在非金刚石基底上交替生长多于一对的潜在 - 凹金刚石层和潜在 - 凸出的金刚石层并消除基底来制造平坦独立的金刚石膜。在基板温度为880℃〜950℃，烃比为2.5体积％〜3.5体积％的条件（b）下，通过CVD法制作电位凹形膜。在基板温度为800〜850℃，烃比为0.5体积％〜1.5体积％的条件（a）下，通过CVD法制造电位凸形薄膜。尽管沉积速度慢，但条件（a）可以制成具有良好晶体质量的潜在凸形膜。优选使用较薄的电势凸膜和较厚的电势凹膜的组合来缩短总合成时间。可以通过选择生产条件（a）和（b）以及电位 - 凹陷层和电位 - 凹陷层的厚度来制造具有任意曲率的多层金刚石薄膜。仍然固定在基板上的金刚石膜可以由普通的抛光装置抛光，因为该膜是平的。抛光的平面金刚石膜可以通过消除基底而获得。

5. 发明公开

EP0567124A2 Bonding tool having diamond head and method of manufacturing the same 失效
标题翻译： Verbindungswerkzeug mit Diamantkopf und dessen Herstellungsverfahren。
公开(公告)号：EP0567124A2
公开(公告)日：1993-10-27
申请号：EP93106560.1
申请日：1993-04-22
申请人： SUMITOMO ELECTRIC INDUSTRIES, LIMITED
发明人： Tanabe, Keiichiro, c/o Itami Works of Sumitomo , Takahashi, Toshiya, c/o Itami Works of Sumitomo , Ikegaya, Akihiko, c/o Itami Works of Sumitomo , Fujimori, Naoji, c/o Itami Works of Sumitomo
IPC分类号： H01L21/603 , H01L21/00 , C04B41/50 , B23K20/02 , C23C16/26
CPC分类号： C04B41/009 , B23K20/025 , C04B41/5002 , C04B41/85 , H01L24/79 , H05K13/003 , C04B41/4531 , C04B41/51 , C04B41/526 , C04B41/5053 , C04B35/565 , C04B35/584 , C04B35/581
摘要： A bonding tool (40) has a head portion (45) which consists essentially of vapor-deposited diamond, wherein a principal diamond crystal plane forming a head face (47) is a (111) plane. Such a head face has high hardness, and is hard to wear. In order to improve toughness of a bonding head which is mainly made of vapor-deposited diamond, a portion forming a head face consists essentially of high-purity diamond, and another portion supporting the head face consists essentially of low-purity diamond. The head face has high rigidity, while the portion supporting the head face has high toughness. In order to provide a bonding head portion which is mainly made of vapor-deposited diamond with electrical conductivity, a portion forming a head face consists essentially of polycrystalline diamond containing a relatively small amount of dopant, and another portion supporting this portion contains a large amount of dopant. The head portion having electrical conductivity can be heated by energization. In a tool employing a coating containing vapor-deposited diamond as a bonding head portion, the coating is formed by a complex of a metal or ceramics and vapor-deposited diamond, in order to improve strength of the coating and adhesion to a tool substrate. The metal or ceramics is closer in thermal expansion coefficient to the tool substrate than the diamond.
摘要翻译：接合工具（40）具有主要由气相沉积金刚石组成的头部（45），其中形成头部面（47）的主要金刚石晶体面是（111）面。这样的头部表面硬度高，难以磨损。为了提高主要由气相沉积金刚石制成的接合头的韧性，形成头部的部分基本上由高纯度的金刚石组成，而支撑头部面的另一部分主要由低纯度的金刚石组成。头部表面具有高刚性，而支撑头部的部分具有高韧性。为了提供主要由具有导电性的气相沉积金刚石制成的接合头部分，形成头部面的部分基本上由包含相对少量掺杂剂的多晶金刚石组成，并且支撑该部分的另一部分含有大量的掺杂剂。可以通过通电来加热具有导电性的头部。在使用含有气相沉积金刚石作为粘合头部分的涂层的工具中，通过金属或陶瓷和气相沉积金刚石的复合物形成涂层，以提高涂层的强度和对工具基底的粘附。与金刚石相比，金属或陶瓷的热膨胀系数比工具基板更热。

6. 发明授权

EP0666338B1 Method of synthesizing and polishing a flat diamond film 失效
标题翻译：一种用于扁平金刚石膜的制造和抛光工艺
公开(公告)号：EP0666338B1
公开(公告)日：1999-05-12
申请号：EP95300431.4
申请日：1995-01-25
申请人： SUMITOMO ELECTRIC INDUSTRIES, LIMITED
发明人： Ikegaya, Akihiko, c/o Itami Works of Sumitomo , Tanabe, Keiichiro, c/o Itami Works of Sumitomo , Fujimori, Naoji, c/o Itami Works of Sumitomo
IPC分类号： C23C16/26 , B24B9/16
CPC分类号： C23C16/279 , B24B9/16 , C23C16/27 , C23C16/271

7. 发明授权

EP0487292B1 Polycrystalline diamond tool and method for producing same 失效
标题翻译：多晶Dimantwerkzeug及其制备方法
公开(公告)号：EP0487292B1
公开(公告)日：1996-02-14
申请号：EP91310636.5
申请日：1991-11-19
申请人： SUMITOMO ELECTRIC INDUSTRIES, LIMITED
发明人： Tanabe, Keiichiro, c/o Itami Works of Sumitomo , Fujimori, Naoji, c/o Itami Works of Sumitomo
IPC分类号： C23C16/00 , C23C16/26
CPC分类号： C23C16/27 , C23C16/01 , C23C16/271 , C23C16/274 , C23C16/276 , C23C16/277 , C23C16/278 , C23C16/279 , Y10S76/12 , Y10T407/27 , Y10T408/78 , Y10T408/81 , Y10T428/12021 , Y10T428/12028 , Y10T428/12056 , Y10T428/12146

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